Isolator apparatus and methods for substrate processing chambers

Patent metadata

Field	Value
Publication number	US-11827980-B2
Application number	US-202217974408-A
Country	US
Kind code	B2
Filing date	Oct 26, 2022
Priority date	Jul 4, 2019
Publication date	Nov 28, 2023
Grant date	Nov 28, 2023

Abstract

Aspects of the present disclosure relate generally to isolator devices, components thereof, and methods associated therewith for substrate processing chambers. In one implementation, a substrate processing chamber includes an isolator ring disposed between a pedestal and a pumping liner. The isolator ring includes a first surface that faces the pedestal, the first surface being disposed at a gap from an outer circumferential surface of the pedestal. The isolator ring also includes a second surface that faces the pumping liner and a protrusion that protrudes from the first surface of the isolator ring and towards the outer circumferential surface of the pedestal. The protrusion defines a necked portion of the gap between the pedestal and the isolator ring.

First claim

What is claimed is:

1. An isolator ring for a substrate processing chamber, the isolator ring comprising:
an annular member including:
a first surface facing radially inwardly;
a second surface facing radially outwardly;
a bottom surface extending between the first surface and the second surface;
an upper surface tapering upwards in a direction from the second surface and towards the first surface, and defining an upper edge; and
a protrusion that protrudes radially inwardly from the first surface, the protrusion defining a stepped surface extending between the upper edge and a lower edge, the lower edge spaced apart from the bottom surface by a portion of the first surface;
wherein the protrusion includes a rounded edge disposed between the lower edge and the stepped surface.

2. The isolator ring of claim 1 , wherein the annular member comprises an electrically isolating material.

3. The isolator ring of claim 2 , wherein the annular member comprises one or more of quartz, aluminum oxide, or aluminum nitride.

4. The isolator ring of claim 1 , wherein the protrusion and the annular member form a single integral body.

5. The isolator ring of claim 1 , wherein the annular member is formed from a plurality of individual bodies.

6. The isolator ring of claim 5 , wherein the protrusion includes a ring coupled to the first surface of the annular member.

7. The isolator ring of claim 1 , wherein:
the second surface includes a shoulder extending radially outwardly; and
the upper surface extends from the shoulder towards the first surface.

8. An isolator ring for a substrate processing chamber, the isolator ring comprising:
an annular member including:
a first surface facing radially inwardly;
a protrusion that protrudes radially inwardly from the first surface; and
a second surface facing radially outwardly;

wherein in use:
the first surface faces a pedestal of the substrate processing chamber, the first surface disposed at a gap from an outer circumferential surface of the pedestal;
the protrusion defines a necked portion of the gap between the pedestal and the first surface, and defines a stepped surface;
the gap between the first surface and the outer circumferential surface of the pedestal has a first width;
the necked portion between the stepped surface and the outer circumferential surface of the pedestal has a second width smaller than first width; and
the second width is a ratio of the first width, the ratio within a range of 0.25 to 0.75.

9. The isolator ring of claim 8 , wherein the annular member comprises an electrically isolating material.

10. The isolator ring of claim 9 , wherein the annular member comprises one or more of quartz, aluminum oxide, or aluminum nitride.

11. The isolator ring of claim 8 , wherein the protrusion and the annular member form a single integral body.

12. The isolator ring of claim 8 , wherein the annular member is formed from a plurality of individual bodies.

13. The isolator ring of claim 12 , wherein the protrusion includes a ring coupled to the first surface of the annular member.

14. An isolator ring for a substrate processing chamber, the isolator ring comprising: an annular member formed from a plurality of bodies, the annular member including: a first surface facing radially inwardly; a protrusion that protrudes radially inward from the first surface, the protrusion comprising a ring coupled to the first surface of the annular member; a second surface facing radially outwardly; and an upper surface tapering upwards in a direction from the second surface and towards the first surface, and defining an upper edge;
wherein in use: the upper edge is disposed above a support surface of a pedestal in the substrate processing chamber; the upper edge is disposed at a distance from a lower surface of a showerhead of the substrate processing chamber; the support surface of the pedestal is disposed at a gap from the lower surface of the showerhead; and the distance is within a range of 50 percent to 100 percent of the gap.

15. The isolator ring of claim 14 , wherein the annular member comprises an electrically isolating material.

16. The isolator ring of claim 15 , wherein the annular member comprises one or more of quartz, aluminum oxide, or aluminum nitride.

17. An isolator ring for a substrate processing chamber, the isolator ring comprising: an annular member including: a first surface facing radially inwardly; a protrusion that protrudes radially inward from the first surface; wherein the protrusion and the annular member form a single integral body; a second surface facing radially outwardly; and an upper surface tapering upwards in a direction from the second surface and towards the first surface, and defining an upper edge; wherein in use: the upper edge is disposed above a support surface of a pedestal in the substrate processing chamber; the upper edge is disposed at a distance from a lower surface of a showerhead of the substrate processing chamber; the support surface of the pedestal is disposed at a gap from the lower surface of the showerhead; and the distance is within a range of 50 percent to 100 percent of the gap.

18. The isolator ring of claim 14 , wherein:
the second surface includes a shoulder extending radially outwardly; and
the upper surface extends from the shoulder towards the first surface.

Assignees

• Applied Materials Inc

Inventors

• Pathak Nitin
• Bansal Amit Kumar
• Nguyen Tuan Anh
• Rubio Thomas
• Ramamurthi Badri N
• Rocha-Alvarez Juan Carlos

Classifications

• C23C16/45565

  Shower nozzles · CPC title

• C23C16/4585 Primary

  Devices at or outside the perimeter of the substrate support, e.g. clamping rings, shrouds · CPC title

• C23C16/4412

  Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps · CPC title

• H01J2329/94

  Means for exhausting the vessel or maintaining vacuum within the vessel · CPC title

• H01J2329/941

  Means for exhausting the vessel · CPC title