Chucking status detection with chucking sensor normalized figure of merit and active chucking voltage control
US-2026081119-A1 · Mar 19, 2026 · US
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Rubio Thomas patents
Rubio Thomas is listed as an inventor on 13 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Rubio Thomas |
| Total patents | 13 |
| First publication | Jan 7, 2021 |
| Latest publication | Mar 19, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Process chamber conductive film build-up detector
US-2026056156-A1 · Feb 26, 2026 · US
Cleaning assemblies for substrate processing chambers
US-2024368756-A1 · Nov 7, 2024 · US
Cleaning assemblies for substrate processing chambers
US-12012653-B2 · Jun 18, 2024 · US
Hardware to prevent bottom purge incursion in application volume and process gas diffusion below heater
US-11952663-B2 · Apr 9, 2024 · US
Hardware to prevent bottom purge incursion in application volume and process gas diffusion below heater
US-2023392259-A1 · Dec 7, 2023 · US
Isolator apparatus and methods for substrate processing chambers
US-11827980-B2 · Nov 28, 2023 · US
Hardware to prevent bottom purge incursion in application volume and process gas diffusion below heater
US-11643725-B2 · May 9, 2023 · US
Isolator apparatus and methods for substrate processing chambers
US-2023047451-A1 · Feb 16, 2023 · US
Isolator apparatus and methods for substrate processing chambers
US-11492705-B2 · Nov 8, 2022 · US
Recent patents
Latest publications not already listed above.
Cleaning assemblies for substrate processing chambers
US-2022307129-A1 · Sep 29, 2022 · US
Hardware to prevent bottom purge incursion in application volume and process gas diffusion below heater
US-2022307135-A1 · Sep 29, 2022 · US
Isolator apparatus and methods for substrate processing chambers
US-2021002763-A1 · Jan 7, 2021 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 13 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| C23C16/4412 | 11 |
| C23C16/4585 | 11 |
| C23C16/4408 | 8 |
| C23C16/45544 | 8 |
| C23C16/45565 | 8 |