Vacuum pump, and control device of vacuum pump

Patent metadata

Field	Value
Publication number	US-11821440-B2
Application number	US-201916967892-A
Country	US
Kind code	B2
Filing date	Feb 8, 2019
Priority date	Feb 16, 2018
Publication date	Nov 21, 2023
Grant date	Nov 21, 2023

Abstract

To provide a vacuum pump capable of efficiently cooling electrical equipment. The vacuum pump comprises a pump main body, and an electrical equipment case disposed outside the pump main body, wherein the electrical equipment case includes a cooling jacket in which a cooling medium flow passage is formed, and a power supply circuit portion that has a circuit component and can be cooled by the cooling jacket, the power supply circuit portion being attached to the cooling jacket so that heat from the electrical component portion can be transferred, and the cooling jacket includes a jacket main body and a cooling pipe for circulating cooling water in the jacket main body, and partially exposes the cooling pipe toward the power supply circuit portion.

First claim

What is claimed is:

1. A vacuum pump, comprising:
a pump main body; and
a control device disposed outside the pump main body,
wherein the control device includes a cooling portion in which a cooling medium flow passage is formed, and an electrical component portion that has a heat generating component and is capable of being cooled by the cooling portion,
the electrical component portion is attached to the cooling portion so that heat from the electrical component portion be transferable,
the electrical component portion is provided with a circuit board that has the heat generating component mounted thereon and is fixed to the cooling portion, and a mold portion that at least partially covers the circuit board and the heat generating component,
the heat is transferable toward the cooling portion via the mold portion,
the cooling medium flow passage is formed inside of a cooling pipe casted into the cooling portion,
the cooling pipe has an exposed portion which is partially exposed from the cooling portion to the electrical component portion side, and
the mold portion is in contact with the exposed portion.

2. The vacuum pump according to claim 1 , wherein a penetrating portion that penetrates the circuit board and which the mold portion enters is formed in the circuit board, and the heat is transferrable toward the cooling portion via the mold portion and the penetrating portion.

3. The vacuum pump according to claim 2 , wherein the cooling portion faces the mold portion entering the penetrating portion, at a position opposite to a side of the circuit board on which the heat generating component is mounted.

4. A control device of a vacuum pump, comprising:
a cooling portion in which a cooling medium flow passage is formed; and
an electrical component portion that has a heat generating component and is capable of being cooled by the cooling portion,
wherein the electrical component portion is attached to the cooling portion so that heat from the electrical component portion be transferable,
the electrical component portion is provided with a circuit board that has the heat generating component mounted thereon and is fixed to the cooling portion, and a mold portion that at least partially covers the circuit board and the heat generating component,
the heat is transferable toward the cooling portion via the mold portion the cooling medium flow passage is formed inside of a cooling pipe casted into the cooling portion,

the cooling pipe has an exposed portion which is partially exposed from the cooling portion to the electrical component portion side, and
the mold portion is in contact with the exposed portion.

Assignees

• Edwards Japan Ltd

Inventors

• Sun Yanbin
• SAEGUSA Kengo

Classifications

• F04D29/5813 Primary

  Cooling the control unit · CPC title

• F28D9/0081

  the conduits for one heat-exchange medium being formed by a single plate-like element (F28D9/0012 takes precedence); the conduits for one heat-exchange medium being integrated in one single plate-like element (F28D9/0012 takes precedence) · CPC title

• F04D19/042

  Turbomolecular vacuum pumps · CPC title

• F04D25/068 Primary

  Mechanical details of the pump control unit (pump control details F04D27/00) · CPC title

• F04B37/14 Primary

  to obtain high vacuum · CPC title