Vacuum pump

Patent metadata

Field	Value
Publication number	US-10001126-B2
Application number	US-201013381254-A
Country	US
Kind code	B2
Filing date	Jun 14, 2010
Priority date	Aug 21, 2009
Publication date	Jun 19, 2018
Grant date	Jun 19, 2018

Abstract

To provide a vacuum pump capable of performing temperature control using one or more heating devices or cooling devices fewer than the number of temperature sensors arranged in the pump. One temperature sensor is arranged for each target in the pump, while only one set consisting of a heater and a magnetic valve is arranged. One set consisting of a heater and a magnetic valve is controlled based on output signals from a plurality of temperature sensors, based on the priorities set for the temperature sensors. As stated above, by setting priorities for the temperature sensors, the temperature of a target provided with a temperature sensor given a higher priority is settled within a control range by performing quick ON/OFF control, and then the temperature of a target provided with a temperature sensor given a lower priority is settled within the control range.

First claim

The invention claimed is:

1. A vacuum pump for exhausting gas from a target device, comprising:
a plurality of temperature sensors arranged in different places in the vacuum pump;
one or more cooling units and one or more heating units, wherein the number of cooling units is less than the number of temperature sensors, and wherein the number of heating units is less than the number of temperature sensors; and
a temperature controller for controlling the one or more cooling units and the one or more heating units based on a plurality of temperature signals outputted from the temperature sensors to first settle a first temperature signal of the plurality of the temperature signals outputted from the plurality of temperature sensors within a first predetermined acceptable range by ON/OFF control of the cooling units or the heating units, then, after the first temperature signal is settled, to settle a second temperature signal of the plurality of the temperature signals outputted from the plurality of temperature sensors within a second predetermined acceptable range by ON/OFF control of the cooling units or the heating units, wherein the temperature controller causes the first temperature signal to be settled with a higher priority than the second temperature signal,
wherein the temperature controller causes a first place of the different places in which a first temperature sensor outputs the first temperature signal and a second place of the different places in which a second temperature sensor outputs the second temperature signal to be cooled or heated such that the temperature controller causes the first place and the second place to be cooled at the same time, or the first place and the second place to be heated at the same time.

2. The vacuum pump of claim 1 ,
wherein the temperature controller selects, from the temperature signals, a to-be-controlled temperature signal, which is a temperature signal having a temperature signal value out of at least one of the first predetermined acceptable range or the second predetermined acceptable range, and the temperature controller controls the one or more cooling units and the one or more heating units based on the to-be-controlled temperature signal.

3. The vacuum pump of claim 2 ,
wherein the temperature controller selects the to-be-controlled temperature signal from a plurality of temperature signals included in the temperature signals and having temperature signal values out of the at least one of the first predetermined acceptable range or the second predetermined acceptable range, and the temperature controller controls the one or more cooling units and the one or more heating units based on the to-be-controlled temperature signal.

4. The vacuum pump of any one of claims 1 to 3 ,
wherein the temperature controller derives a plurality of control commands based on a plurality of temperature signals included in the temperature signals and having temperature signal values out of the at least one of the first predetermined acceptable range or the second predetermined acceptable range, and the temperature controller controls the one or more cooling units and the one or more heating units based on a synthesized result of the control commands.

5. A method comprising:
receiving, by a temperature controller, a plurality of temperature signals outputted by a plurality of temperature sensors arranged in different places in a vacuum pump;
controlling, by the temperature controller, one or more cooling units and one or more heating units in the vacuum pump based on the plurality of temperature signals, wherein the number of cooling units is less than the number of temperature sensors, and wherein the number of heating units is less than the number of temperature sensors, wherein the controlling comprises:
first settling a first temperature signal of the plurality of the temperature signals outputted from the plurality of temperature sensors within a first predetermined acceptable range by ON/OFF control of the cooling units or the heating units, and
then, after the first temperature signal is settled, settling a second temperature signal of the plurality of the temperature signals outputted from the plurality of temperature sensors within a second predetermined acceptable range by ON/OFF control of the cooling units or the heating units, wherein the temperature controller causes the first temperature signal to be settled with a higher priority than the second temperature signal; and

causing, by the temperature controller, a first place of the different places in which a first temperature sensor outputs the first temperature signal and a second place of the different places in which a second temperature sensor outputs the second temperature signal to be cooled or heated such that the temperature controller causes the first place and the second place to be cooled at the same time, or the first place and the second place to be heated at the same time.

Assignees

• Miwata Tooru
• Ishii Keiichi
• Machida Katsuhide
• Ohtachi Yoshinobu
• Maejima Yasushi
• Takaada Tsutomu
• Edwards Japan Ltd

Inventors

• Miwata Tooru
• Ishii Keiichi
• Machida Katsuhide
• Ohtachi Yoshinobu
• Maejima Yasushi
• Takaada Tsutomu

Classifications

• F05D2270/303

  Temperature · CPC title

• F04D19/042 Primary

  Turbomolecular vacuum pumps · CPC title

• F04D29/584

  cooling or heating the machine (F04D29/5846, F04D29/5853 take precedence) · CPC title

• F04D27/001

  Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring · CPC title