Vacuum pump

Patent metadata

Field	Value
Publication number	US-2016195098-A1
Application number	US-201414912434-A
Country	US
Kind code	A1
Filing date	Jun 6, 2014
Priority date	Aug 30, 2013
Publication date	Jul 7, 2016
Grant date	—

Abstract

The present disclosure provides a vacuum pump with which size and weight reduction, improvement of workability, and cost reduction can be realized. Electrical connection between a pump main body that has a rotor supported by a magnetic bearing and a control unit that controls the drive of the pump main body is established by a flexible printed wiring board configured by printing an electric circuit on a surface of a sheet-like insulating substrate.

First claim

1 . A vacuum pump, comprising:
a pump main body with a rotor; and a control unit for controlling a drive of the pump main body, electrical connection in the pump main body, electrical connection in the control unit, or electrical connection between the pump main body and the control unit, in the vacuum pump, being connected by a cable, wherein at least a part of the cable is configured with a flexible printed wiring board obtained by forming a wiring pattern on a surface of a sheet-like insulating substrate.

2 . The vacuum pump according to claim 1 , wherein the control unit is attached to the pump main body.

3 . The vacuum pump according to claim 1 , wherein the flexible printed wiring board has a connector attached to at least one end side thereof.

4 . The vacuum pump according to claim 3 , wherein the connector has a plurality of pins, to be connected to the flexible printed wiring board.

5 . The vacuum pump according to claim 4 , wherein the plurality of pins are arranged in symmetric positions with respect to a center of a direction in which the flexible printed wiring board extends, and the connector is provided with an indication means for indicating a direction of attaching the flexible printed wiring board.

6 . The vacuum pump according to claim 1 , wherein the flexible printed wiring board has a plurality of holes and a plurality of terminals surrounding the plurality of holes and connected to the wiring pattern.

7 . The vacuum pump according to claim 1 , wherein the flexible printed wiring board is provided with an indication means for indicating a direction of attaching the flexible printed wiring board.

8 . The vacuum pump according to claim 2 , wherein the flexible printed wiring board has a connector attached to at least one end side thereof.

9 . The vacuum pump according to claim 8 , wherein the connector has a plurality of pins, to be connected to the flexible printed wiring board.

10 . The vacuum pump according to claim 2 , wherein the flexible printed wiring board has a plurality of holes and a plurality of terminals surrounding the plurality of holes and connected to the wiring pattern.

11 . The vacuum pump according to claim 3 , wherein the flexible printed wiring board has a plurality of holes and a plurality of terminals surrounding the plurality of holes and connected to the wiring pattern.

12 . The vacuum pump according to claim 8 , wherein the flexible printed wiring board has a plurality of holes and a plurality of terminals surrounding the plurality of holes and connected to the wiring pattern.

13 . The vacuum pump according to claim 4 , wherein the flexible printed wiring board has a plurality of holes and a plurality of terminals surrounding the plurality of holes and connected to the wiring pattern.

14 . The vacuum pump according to claim 2 , wherein the flexible printed wiring board is provided with an indication means for indicating a direction of attaching the flexible printed wiring board.

15 . The vacuum pump according to claim 3 , wherein the flexible printed wiring board is provided with an indication means for indicating a direction of attaching the flexible printed wiring board.

16 . The vacuum pump according to claim 8 , wherein the flexible printed wiring board is provided with an indication means for indicating a direction of attaching the flexible printed wiring board.

17 . The vacuum pump according to claim 4 , wherein the flexible printed wiring board is provided with an indication means for indicating a direction of attaching the flexible printed wiring board.

18 . The vacuum pump according to claim 6 , wherein the flexible printed wiring board is provided with an indication means for indicating a direction of attaching the flexible printed wiring board.

19 . The vacuum pump according to claim 10 , wherein the flexible printed wiring board is provided with an indication means for indicating a direction of attaching the flexible printed wiring board.

20 . The vacuum pump according to claim 11 , wherein the flexible printed wiring board is provided with an indication means for indicating a direction of attaching the flexible printed wiring board.

Assignees

• Edwards Japan Ltd

Inventors

• Omori Hideki

Classifications

• F16C2360/45

  Turbo-molecular pumps · CPC title

• F04D25/0693 Primary

  Details or arrangements of the wiring · CPC title

• H02K11/33

  Drive circuits, e.g. power electronics (H02K11/38 takes precedence) · CPC title

• F04D19/048

  comprising magnetic bearings · CPC title

• F04D19/042 Primary

  Turbomolecular vacuum pumps · CPC title