Refillable ampoule with purge capability

Patent metadata

Field	Value
Publication number	US-9347616-B2
Application number	US-201214119402-A
Country	US
Kind code	B2
Filing date	May 24, 2012
Priority date	May 28, 2011
Publication date	May 24, 2016
Grant date	May 24, 2016

Abstract

A fluid delivery system adapted to isolate an ampoule and/or process line during purge, including an inlet control valve connecting a source of pressurized gas to a refillable ampoule, an outlet control valve connecting the refillable ampoule to a location of use, a process control valve connecting a process line to the refillable ampoule, a process isolation valve, and a purge supply valve, e.g., a three-way purge supply valve, arranged between the process isolation valve and the process control valve. A method of purging a fluid delivery system is also disclosed, including closing a process isolation valve, connecting a process line to a refillable ampoule, supplying a purge gas through a purge supply valve, e.g., a three-way purge supply valve, and cycling open and close at least once a process control valve coupled to the process line. A manifold for use in refilling an ampoule and purging a fluid supply system is also described.

First claim

What is claimed is:

1. A fluid delivery system adapted to isolate an ampoule and/or process line during purge, the system comprising:
an inlet control valve arranged to connect a source of pressurized gas to a refillable ampoule;
an outlet control valve arranged to connect the refillable ampoule to a location of use;
a process control valve arranged to connect a process line from a bulk delivery system to the refillable ampoule for refilling thereof;
a process isolation valve coupled to the process line; and
a purge supply valve coupled to the process line between the process isolation valve and the process control valve, with the purge supply valve, process isolation valve, and process control valve being in line with one another in the process line.

2. The system of claim 1 , further comprising a bypass valve arranged to connect the inlet control valve and the outlet control valve.

3. The system of claim 1 , wherein the inlet control valve comprises a plurality of inlet control valves.

4. The system of claim 1 , wherein the process control valve comprises a plurality of process control valves.

5. The system of claim 4 , wherein at least one of the plurality of process control valves is a three-way process control valve.

6. The system of claim 1 , wherein the outlet control valve comprises a plurality of outlet control valves.

7. The system of claim 1 , further comprising a vacuum source valve arranged to connect a vacuum source to the refillable ampoule.

8. The system of claim 1 , further comprising a chemical outlet valve arranged to connect the outlet control valve to the location of use.

9. The system of claim 1 , wherein the location of use comprises a semiconductor manufacturing location.

10. The system of claim 1 , wherein the outlet control valve is coupled to an outlet line for delivering fluid from the refillable ampoule to the location of use, and wherein the process control valve comprises a three-way process control valve connecting the process line to the fluid outlet line for bypassing the refillable ampoule during purge.

11. The system of claim 1 , wherein the purge supply valve comprises a three-way purge supply valve.

Assignees

• Chism Richard D
• Krell Andy
• Entegris Inc

Inventors

• Chism Richard D
• Krell Andy

Classifications

• H10P72/0402 Primary

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• F17C2205/0335

  Check-valves or non-return valves · CPC title

• C23C16/4408

  by purging residual gases from the reaction chamber or gas lines · CPC title

• C23C16/44

  characterised by the method of coating (C23C16/04 takes precedence) · CPC title

• Y10T137/877

  With flow control means for branched passages · CPC title