Substrate processing apparatus and method

Patent metadata

Field	Value
Publication number	US-11804388-B2
Application number	US-202117324265-A
Country	US
Kind code	B2
Filing date	May 19, 2021
Priority date	Sep 11, 2018
Publication date	Oct 31, 2023
Grant date	Oct 31, 2023

Abstract

A substrate processing apparatus, comprising a substrate support ( 32 ) provided with a support surface ( 34 ) for supporting a substrate or a substrate carrier ( 24 ) thereon and a support heater ( 50 ) constructed and arranged to heat the support surface ( 34 ). The apparatus comprises a heat shield constructed and arranged to cover and shield the substrate support ( 32 ) when no substrate or substrate carrier ( 24 ) is on the support surface.

First claim

The invention claimed is:

1. A substrate processing apparatus, comprising:
a substrate support provided with a support surface for supporting a substrate or a substrate carrier thereon, a heat shield, and a support heater disposed below the support surface, the support heater constructed and arranged to heat the support surface, wherein:
the heat shield is configured to selectively cover the substrate support when the substrate support is separated from the carrier;
the heat shield at least partially forms a chamber constructed and arranged to store the substrate support therein; and
the heat shield is separately and independently movable relative to the support surface of the substrate support,
wherein the substrate support comprises an upper plate, a cylindrical side plate and a bottom plate, which plates are interconnected to define a generally cylindrical container,
wherein an outer surface of the upper plate defines the support surface of the substrate support, and
wherein the container defines a body that extends between the upper plate and the bottom plate, which body accommodates at least part of the support heater.

2. The apparatus according to claim 1 , wherein the apparatus comprises a recess that can be closed with the heat shield to form the chamber constructed and arranged to store the substrate support therein.

3. The apparatus according to claim 1 , wherein the chamber is substantially airtight.

4. The apparatus according to claim 1 , wherein the shield comprises thermally insulating material thermally insulating the substrate support.

5. The apparatus according to 1 , wherein the shield comprises an upper shield and a cylindrical side shield, which shields are interconnected to define a generally cylindrical chamber to cover and shield the substrate support when no substrate or substrate carrier is on the support surface.

6. The apparatus according to claim 1 , wherein the apparatus comprises an actuator constructed and arranged to move at least one of the heat shield and the substrate support with respect to each other so as to move the cover to shield the substrate support when no substrate or substrate carrier is on the support surface.

7. The apparatus according to claim 6 , wherein the apparatus comprises an elevator constructed and arranged to move the substrate support in a vertical direction.

8. The apparatus according to claim 1 , wherein the body of the cylindrical container further accommodates thermally insulating material, wherein a heat generating portion of the heater is disposed adjacent the upper plate, and wherein the thermally insulating material is disposed below the heat generating portion of the support heater.

9. The apparatus according to claim 8 , wherein the heat generating portion rests on the thermally insulating material.

10. The apparatus according claim 1 , further comprising a reaction chamber defining a reaction space and an opening via which the support assembly is at least partly receivable in said reaction chamber, such that a substrate or substrate carrier supported thereon is receivable in the reaction space.

11. The apparatus according to claim 10 , wherein:
the apparatus is a vertical thermal furnace;
the reaction chamber is at least partly formed by a bell jar-shaped reaction tube; and
wherein the substrate support is at least partly receivable in said reaction tube via the opening at the lower end thereof, such that the support assembly, in a received state, substantially closes off said opening of the reaction tube.

12. The apparatus according to claim 1 , further comprising a substrate carrier connected to the support surface of the substrate support and that is configured to hold at least one substrate.

13. A substrate processing apparatus, comprising:
a substrate support provided with a support surface for supporting a substrate or a substrate carrier thereon, a heat shield, and a support heater disposed below the support surface, the support heater constructed and arranged to heat the support surface, wherein:
the heat shield is configured to selectively cover the substrate support when the substrate support is separated from the substrate carrier or the substrate; and
the heat shield is separately and independently movable relative to the support surface of the substrate support,
wherein the substrate support comprises an upper plate, a cylindrical side plate and a bottom plate,
wherein an outer surface of the upper plate defines the support surface of the substrate support, and
wherein a container defines a body that extends between the upper plate and the bottom plate, which body accommodates at least part of the support heater.

14. The apparatus according to claim 13 , wherein the apparatus comprises a recess that can be closed with the heat shield to form a chamber constructed and arranged to store the substrate support therein.

15. The apparatus according to claim 14 , wherein the chamber is substantially airtight.

16. The apparatus according to claim 13 , wherein the shield comprises thermally insulating material.

17. The apparatus according to claim 13 , wherein the apparatus comprises an actuator constructed and arranged to move at least one of the heat shield and the substrate support with respect to each other.

18. The apparatus according to claim 13 , wherein the apparatus comprises an elevator constructed and arranged to move the substrate support in a vertical direction.

Assignees

• Asm Ip Holding Bv

Inventors

• Oosterlaken Theodorus

Classifications

• H10P72/12

  Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements · CPC title

• H10P72/0434 Primary

  mainly by convection · CPC title

• H10P72/3312

  Vertical transfer of a batch of workpieces · CPC title

• H10P72/0432

  mainly by conduction · CPC title

• H10P72/7624

  characterised by the mechanical construction of the susceptor, stage or support · CPC title