3D nanochannel interleaved devices

Patent metadata

Field	Value
Publication number	US-11779918-B2
Application number	US-201916704878-A
Country	US
Kind code	B2
Filing date	Dec 5, 2019
Priority date	Dec 5, 2019
Publication date	Oct 10, 2023
Grant date	Oct 10, 2023

Abstract

3D nanochannel interleaved devices for molecular manipulation are provided. In one aspect, a method of forming a device includes: forming a pattern on a substrate of alternating mandrels and spacers alongside the mandrels; selectively removing the mandrels from a front portion of the pattern forming gaps between the spacers; selectively removing the spacers from a back portion of the pattern forming gaps between the mandrels; filling i) the gaps between the spacers with a conductor to form first electrodes and ii) the gaps between the mandrels with the conductor to form second electrodes; and etching the mandrels and the spacers in a central portion of the pattern to form a channel (e.g., a nanochannel) between the first electrodes and the second electrodes, wherein the first electrodes and the second electrodes are offset from one another across the channel, i.e., interleaved. A device formed by the method is also provided.

First claim

What is claimed is:

1. A device, comprising:
a channel;
spacers on a first side of the channel;
first electrodes disposed in between the spacers on the first side of the channel;
mandrels on a second side of the channel; and
second electrodes disposed in between the mandrels on the second side of the channel, wherein the first electrodes and the second electrodes are interleaved such that, instead of being directly opposite one another, the first electrodes and the second electrodes are offset from one another across the channel, wherein the channel comprises an opening between the first electrodes and the spacers on the first side of the channel, and the second electrodes and the mandrels on the second side of the channel.

2. The device of claim 1 , wherein the mandrels comprise an oxide material, and wherein the spacers comprise a nitride material.

3. The device of claim 1 , wherein the first electrodes and the second electrodes comprise a conductor selected from the group consisting of: copper (Cu), tungsten (W), cobalt (Co), ruthenium (Ru), and combinations thereof.

4. The device of claim 1 , wherein the mandrels have a width of from about 5 nm to about 10 nm, and a pitch of from about 10 nm to about 20 nm.

5. The device of claim 1 , wherein the spacers have a width of from about 5 nm to about 10 nm.

6. The device of claim 1 , wherein the channel comprises a nanochannel having a width of from about 2 nm to about 10 nm.

7. The device of claim 1 , wherein the channel comprises a fluidic passage.

Assignees

• IBM

Inventors

• Clevenger Lawrence A
• Cheng Kangguo
• Canaperi Donald
• Fetterolf Shawn Peter

Classifications

• B01L3/502707 Primary

  characterised by the manufacture of the container or its components · CPC title

• B01L3/502715

  characterised by interfacing components, e.g. fluidic, electrical, optical or mechanical interfaces · CPC title

• B82B1/001

  Devices without movable or flexible elements · CPC title

• B82B3/0019

  without movable or flexible elements · CPC title

• B01L2200/12

  Specific details about manufacturing devices · CPC title