Heterogeneous integration module comprising thermal management apparatus

Patent metadata

Field	Value
Publication number	US-11769710-B2
Application number	US-202016833034-A
Country	US
Kind code	B2
Filing date	Mar 27, 2020
Priority date	Mar 27, 2020
Publication date	Sep 26, 2023
Grant date	Sep 26, 2023

Abstract

Some examples described herein provide for a heterogeneous integration module (HIM) that includes a thermal management apparatus. In an example, an apparatus (e.g., a HIM) includes a wiring substrate, a first component, a second component, and a thermal management apparatus. The first component and the second component are communicatively coupled together via the wiring substrate. The thermal management apparatus is in thermal communication with the first component and the second component. The thermal management apparatus has a first thermal energy flow path for dissipating thermal energy generated by the first component and has a second thermal energy flow path for dissipating thermal energy generated by the second component. The first thermal energy flow path has a lower thermal resistivity than the second thermal energy flow path.

First claim

What is claimed is:

1. An apparatus comprising:
a wiring substrate;
a first component;
a second component, the first component and the second component being communicatively coupled together via the wiring substrate;
a stiffener configured to be mechanically attached to a package substrate; and
a thermal management apparatus in thermal communication with the first component and the second component, the thermal management apparatus comprises:
a monolithic main portion overlying the first component and the second component;
a first separate island attached to the main portion, and contacting a first thermal interface material disposed on the second component, the first separate island being spring-biased against the main portion, wherein the thermal management apparatus has a first thermal energy flow path for dissipating thermal energy generated by the first component and a second thermal energy flow path for dissipating thermal energy generated by the second component, the first thermal energy flow path having a lower thermal resistivity than the second thermal energy flow path; and
a flange portion extending perpendicularly from a support portion of the thermal management apparatus and away from the main portion, the flange portion coupled to the stiffener via a first fastener capturing a first spring and a second fastener capturing a second spring, wherein the stiffener is configured to apply a downward force between the first separate island and the second component.

2. The apparatus of claim 1 , wherein the first component is an optical device, photonic device, or a combination thereof, and the second component is an electrical device.

3. The apparatus of claim 1 , wherein:
a second thermal interface material is disposed on the first component; and
the thermal management apparatus is disposed on and contacting the second thermal interface material, and wherein:
the thermal management apparatus further comprises:
an integral island portion integrally formed with the main portion; and
a third thermal interface material disposed between the first separate island and the main portion;

the integral island portion contacts the second thermal interface material;
the first thermal energy flow path is through the integral island portion and the main portion;
and
the second thermal energy flow path is through the first separate island, the third thermal interface material, and the main portion.

4. The apparatus of claim 1 , wherein:
a second thermal interface material is disposed on the first component; and
the thermal management apparatus is disposed on and contacting the second thermal interface material, and wherein:
the thermal management apparatus further comprises:
a second separate island attached to the main portion, the second separate island being spring-biased against the main portion;
a third thermal interface material disposed between the second separate island and the main portion; and
a fourth thermal interface material disposed between the first separate island and the main portion;

the second separate island contacts the second thermal interface material;
the first thermal energy flow path is through the second separate island, the third thermal interface material, and the main portion; and
the second thermal energy flow path is through the first separate island, the fourth thermal interface material, and the main portion.

5. The apparatus of claim 1 further comprising a heat exchanger attached to the thermal management apparatus, the heat exchanger including a fluid pump, a compressor, or a combination thereof.

6. The apparatus of claim 1 further comprising:
the package substrate wherein the stiffener is mechanically attached to the package substrate, and
wherein:
the wiring substrate is an interposer;
the first component and the second component are each attached to the interposer;
the interposer is attached to the package substrate;
the stiffener is laterally around the interposer; and
the support portion extends perpendicularly from the main portion, and the flange portion extends away from the main portion;
the main portion is in thermal communication with the first component and the second component.

7. A system comprising:
a heterogeneous integration module comprising:
a wiring substrate;
a stiffener configured to be mechanically attached to a package substrate
a first component attached to the wiring substrate;
a second component attached to the wiring substrate, the first component and the second component being communicatively coupled together through the wiring substrate;
a first thermal interface material disposed on the first component;
a second thermal interface material disposed on the second component; and
a thermal management apparatus contacting the first thermal interface material and the second thermal interface material, the thermal management apparatus comprises:
a monolithic main portion overlying the first component and the second component;

a first separate island attached to the main portion, and contacting the second thermal interface material, the first separate island being spring-biased against the main portion, wherein the thermal management apparatus has a first thermal energy flow path from where the thermal management apparatus contacts the first thermal interface material and having a second thermal energy flow path from where the thermal management apparatus contacts the second thermal interface material, the first thermal energy flow path having a lower thermal resistivity than the second thermal energy flow path; and
a flange portion extending perpendicularly from a support portion of the thermal management apparatus and away from the main portion, the flange portion coupled to the stiffener via a first fastener capturing a first spring and a second fastener capturing a second spring, wherein the stiffener is configured to apply a downward force between the first separate island and the second component.

8. The system of claim 7 , wherein the first component is an optical device, a photonic device, or a combination thereof, and the second component is an electrical device.

9. The system of claim 7 , wherein:
the thermal management apparatus further comprises:
an integral island portion integrally formed with the main portion; and
a third thermal interface material disposed between the first separate island and the main portion;

the integral island portion contacts the first thermal interface material;
the first thermal energy flow path is through the integral island portion and the main portion; and
the second thermal energy flow path is through the first separate island, the third thermal interface material, and the main portion.

10. The system of claim 7 , wherein:
the thermal management apparatus further comprises:
a second separate island attached to the main portion, the second separate island being spring-biased against the main portion;
a third thermal interface material disposed between the second separate island and the main portion; and
a fourth thermal interface material disposed between the first separate island and the main portion;

the second separate island contacts the first thermal interface material;
the first thermal energy flow path is through the second separate island, the third thermal interface material, and the main portion;
the first separate island contacts the second thermal interface material; and
the second thermal energy flow path is through the first separate island, the fourth thermal interface material, and the main portion.

11. The system of claim 7 further comprising a printed circuit board, the heterogeneous in

Assignees

• Xilinx Inc

Inventors

• Refai-Ahmed Gamal
• Ramalingam Suresh
• Chang Ken
• Raj Mayank
• Xie Chuan
• Frans Yohan

Classifications

• H10W40/231

  characterised by their places of attachment or cooling paths · CPC title

• H10W90/00

  Package configurations · CPC title

• H10W40/22 Primary

  characterised by their shape, e.g. having conical or cylindrical projections · CPC title

• H10W40/47 Primary

  by flowing liquids, e.g. forced water cooling · CPC title

• H10W40/60

  Securing means for detachable heating or cooling arrangements, e.g. clamps · CPC title