Copper electroplating baths containing compounds of reaction products of amines, polyacrylamides and sultones

Patent metadata

Field	Value
Publication number	US-11761107-B2
Application number	US-202016745400-A
Country	US
Kind code	B2
Filing date	Jan 17, 2020
Priority date	Oct 8, 2015
Publication date	Sep 19, 2023
Grant date	Sep 19, 2023

Abstract

Copper electroplating baths include reaction products of amines, polyacrylamides and sultones. The reaction products function as levelers and enable copper electroplating baths which have high throwing power and provide copper deposits with reduced nodules.

First claim

What is claimed is:

1. A compound comprising a reaction product of one or more compounds having the formula:

wherein R 24 -R 27 are independently chosen from hydrogen, (C 1 -C 3 )alkyl, hydroxyl, and acetate moiety, an amine and an acrylamide, wherein the amine has a formula:

wherein R′ is hydrogen; R comprises H 2 N—(CH 2 ) m —, HO—(CH 2 ) m —, Q-(CH 2 ) m —, a moiety having a structure:

a moiety having a structure:

or a moiety having a structure:

where R 1 -R 14 are independently chosen from hydrogen and (C 1 -C 3 )alkyl; m is an integer from 2-12, n is an integer from 2-10, p is an integer from 1-10, q is an integer from 2-10 and r, s and t are numbers from 1 to 10; Q is a 5-6 membered heterocyclic ring having one or two nitrogen atoms in the ring or Q is a benzene sulfonamide moiety; and the acrylamide has a formula:

wherein R″ is a moiety having a structure:

a moiety having a structure:

a moiety having a structure:

or a substituted or unsubstituted triazinane ring or a piperizine ring, wherein R 15 comprises hydrogen or hydroxyl; u is an integer from 1 to 2 and v, x and y are independently integers of 1 to 10; R 16 and R 17 are independently chosen from hydrogen and carbonyl moiety, and with the proviso that when R 16 and R 17 are carbonyl moieties, the carbonyl moieties form a covalent bond with the carbons of the vinyl groups of formula (VI) displacing a hydrogen to form the covalent bond with the carbons of the vinyl groups to form a five membered heterocyclic ring.

2. The compound of claim 1 , wherein the amine has a formula:

wherein R′ is hydrogen and R is H 2 N—(CH 2 ) m — and m is an integer of 2-3.

Assignees

• Dow Global Technologies Llc
• Rohm & Haas Elect Mat

Inventors

• Lu Weijing
• Duan Lingli
• Niazimbetova Zukhra
• Chen Chen
• Rzeznik Maria

Classifications

• C25D3/38 Primary

  of copper · CPC title

• C25D3/58

  containing more than 50% by weight of copper · CPC title

• C25D7/12

  Semiconductors · CPC title

• C25D7/123

  Semiconductors first coated with a seed layer or a conductive layer · CPC title

• H05K3/423

  characterised by electroplating method · CPC title