Processing water supply system

Patent metadata

Field	Value
Publication number	US-11754353-B2
Application number	US-202117323303-A
Country	US
Kind code	B2
Filing date	May 18, 2021
Priority date	Jun 3, 2020
Publication date	Sep 12, 2023
Grant date	Sep 12, 2023

Abstract

A processing water supply system for supplying processing water to a processing apparatus includes a first heat exchanger that cools the processing water by heat of vaporization of a cooling medium, a second heat exchanger that cools the cooling medium compressed to reach a high temperature, a cooling water receiving route that receives the cooling water from cooling water supply equipment to the second heat exchanger, a cooling water drain route that drains the cooling water heat-exchanged by the second heat exchanger to reach a high temperature to drain equipment, and a bypass route that is disposed between the cooling water receiving route and the cooling water drain route and adjusts the cooling water reaching the high temperature at the second heat exchanger to a temperature permissible by the drain equipment.

First claim

What is claimed is:

1. A processing water supply system for supplying processing water to a processing apparatus, the processing water supply system comprising:
a first heat exchanger that cools the processing water by heat of vaporization of a cooling medium;
a compressor which compresses the cooling medium;
a second heat exchanger that cools the cooling medium;
a cooling water receiving route that is connected to the second heat exchanger and receives cooling water from cooling water supply equipment to the second heat exchanger;
a cooling water drain route that is connected to the second heat exchanger and discharges the cooling water heat-exchanged in the second heat exchanger to drain equipment;
a bypass route that is disposed between the cooling water receiving route and the cooling water drain route, wherein the bypass route supplies a portion of the cooling water to the cooling water drain route without passing through the second heat exchanger when the cooling water heat-exchanged in the second heat exchanger exceeds a preset temperature, wherein a remainder of the cooling water flows through the second heat exchanger; and
a flow rate adjusting valve disposed between an inlet and an outlet of the bypass route, wherein the flow rate adjusting valve adjusts the flow rate of the cooling water through the bypass route.

2. The processing water supply system according to claim 1 , further comprising:
a thermometer disposed in the cooling water drain route between the bypass route and the drain equipment; and
wherein the flow rate adjusting valve adjusts the flow rate of the cooling water through the bypass route based on the temperature detected by the thermometer such that a value of the thermometer becomes a temperature permissible by the drain equipment.

3. The processing water supply system according to claim 1 , wherein the compressor increases the pressure and temperature of the cooling medium.

Assignees

• Disco Corp

Inventors

• Matsumoto Tadaomi
• Saito Masaru

Classifications

• H10P72/0602

  Temperature monitoring · CPC title

• H10P72/0434

  mainly by convection · CPC title

• H10P72/0428

  Apparatus for mechanical treatment or grinding or cutting · CPC title

• H10P72/0402 Primary

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• F28F27/02 Primary

  for controlling the distribution of heat-exchange media between different channels ({static flow control means in header boxes F28F9/026}; arrangements of guide plates or guide vanes F28F9/22, F28F25/12) · CPC title