Induction coil assembly and reaction chamber

Patent metadata

Field	Value
Publication number	US-11626268-B2
Application number	US-201917286742-A
Country	US
Kind code	B2
Filing date	Sep 27, 2019
Priority date	Oct 30, 2018
Publication date	Apr 11, 2023
Grant date	Apr 11, 2023

Abstract

The present disclosure provides an induction coil assembly and a reaction chamber. The induction coil assembly includes an induction coil arranged over a dielectric window of the reaction chamber. Two ends of the induction coil include a power input end and a ground end, respectively. A vertical spacing between the two ends of the induction coil and the dielectric window is greater than a vertical spacing between a portion between the two ends of the induction coil and the dielectric window. The induction coil and the reaction chamber provided by the present disclosure may reduce the capacitive coupling of the two ends of the induction coil by ensuring that the coupling strength of an RF magnetic field satisfies the requirement to reduce sputtering on the dielectric window and improve process results.

First claim

What is claimed is:

1. An induction coil assembly, comprising:
an induction coil arranged over of a dielectric window of a reaction chamber, two ends of the induction coil including a power input end and a ground end, respectively, wherein:
the induction coil includes a plurality of spiral coil segments;
a spiral radius of each the plurality of spiral coil segments decreases gradually from a first end of the induction coil to a second end of the induction coil; and
a vertical distance between each end of the two ends of the induction coil and the dielectric window is greater than a vertical distance between a portion between the two ends of the induction coil and the dielectric window.

2. The induction coil assembly according to claim 1 , wherein:
the induction coil includes a first coil segment and a second coil segment connected in series that have a three-dimensional spiral structure;
a spiral radius of the first coil segment decreases gradually from the first end of the induction coil to a series connection point of the first coil segment and the second coil segment;
a spiral radius of the second coil segment decreases gradually from the series connection point of the first coil segment and the second coil segment to the second end of the induction coil;
a vertical distance between the first coil segment and the dielectric window decreases gradually from the first end of the induction coil to the series connection point of the first coil segment and the second coil segment; and
a vertical distance between the second coil segment and the dielectric window decreases gradually from the second end of the induction coil to the series connection point.

3. The induction coil assembly according to claim 2 , wherein lengths of the first coil segment and the second coil segment are both three-quarter turn or an integer multiple of the three-quarter turn.

4. The induction coil assembly according to claim 2 , wherein:
the first end of the induction coil close to the first coil segment is the power input end; and
the second end of the induction coil close to the second segment is the ground end.

5. The induction coil assembly according to claim 1 , wherein the induction coil includes:
a first coil segment having a three-dimensional spiral structure;
a second coil segment having a planner spiral structure; and
a third coil segment having a three-dimensional spiral structure;
wherein:
the first coil segment, the second coil segment, and the third coil segment are connected in series from the first end of the induction coil to the second end of the induction coil;
a spiral radius of the first coil segment decreases gradually from the first end of the induction coil to a first series connection point of the first coil segment and the second coil segment;
a spiral radius of the second coil segment decreases gradually from the first series connection point to a second series connection point of the second coil segment and the third coil segment;
a spiral radius of the third coil segment decreases gradually from the second series connection point to the second end of the induction coil;
a vertical distance between the first coil segment and the dielectric window decreases gradually from the first end of the induction coil to the first series connection point;
a vertical distance between the third coil segment and the dielectric window decreases gradually from the second end of the induction coil to the second series connection point; and
vertical distances between positions of the second coil segment and the dielectric window are same.

6. The induction coil assembly according to claim 5 , wherein lengths of the first coil segment, the second coil segment, and the third coil segment are all half turn or an integer multiple of the half turn.

7. The induction coil assembly according to claim 5 , wherein:
the first end of the induction coil close to the first coil segment is the power input end; and
the second end of the induction coil close to the third coil segment is the ground end.

8. The induction coil assembly according to claim 1 , wherein vertical distances between the two ends of the induction coil and the dielectric window are same.

9. The induction coil assembly according to claim 1 , wherein the vertical distance between each end of the two ends of the induction coil and a lower surface of the dielectric window range from 10 to 50 mm.

10. The induction coil assembly according to claim 1 , wherein:
the coil assembly includes one induction coil; or
the coil assembly includes two induction coils, being arranged coaxially, sleeved with each other, and centrosymmetric about axes of the induction coils.

11. The induction coil assembly according to claim 1 , wherein a cross-sectional shape of the induction coil includes a rectangle, a circle, a triangle, a trapezoid, or a diamond shape.

12. A reaction chamber, comprising:
a dielectric window; and
an induction coil assembly including:
an induction coil arranged over the dielectric window, wherein:
two ends of the induction coil include a power input end and a ground end, respectively;
the power input end is electrically connected to an RF power supply, and the ground end is electrically connected to ground;
the induction coil includes a plurality of spiral coil segments;
a spiral radius of each the plurality of spiral coil segments decreases gradually from a first end of the induction coil to a second end of the induction coil; and
a vertical distance between each end of the two ends of the induction coil and the dielectric window is greater than a vertical distance between a portion between the two ends of the induction coil and the dielectric window.

13. The reaction chamber according to claim 12 , further comprising a capacitor connected between the ground end and the ground.

14. The reaction chamber according to claim 13 , wherein the capacitor ranges from C1 to C2:

C
⁢

⁢
1

=

1

ω
2

⁢
L

;
and

C2
=

4

ω
2

⁢
L

;

wherein ω denotes an angular frequency, and L denotes an inductance of the induction coil.

15. The reaction chamber according to claim 13 , wherein:
the reaction chamber includes one induction coil assembly; or
the reaction chamber includes a plurality of induction coil assemblies and the plurality of induction coil assemblies are distributed on a plurality of circumferences with different radiuses and centered on an axis of the dielectric window;
power input ends of the plurality of induction coil assemblies are each electrically connected to the same RF power supply; and
the reaction chamber includes a plurality of capacitors, ground ends of the plurality of

Assignees

• Beijing Naura Microelectronics Equipment Co Ltd

Inventors

• Niu chen
• Wei Gang
• Su Hengyi
• Yang Jing

Classifications

• H01J37/32

  Gas-filled discharge tubes (heating by discharge H05B) · CPC title

• H01J37/3211 Primary

  Antennas, e.g. particular shapes of coils · CPC title

• H05H1/2465

  the plasma being activated by inductive coupling, e.g. using coiled electrodes · CPC title

• H01J37/32458

  Vessel · CPC title

• H01Q1/26

  with electric discharge tube · CPC title