Antenna member and apparatus and method for treating substrate
US-2023411117-A1 · Dec 21, 2023 · US
with electric discharge tube
with electric discharge tube · Cooperative Patent Classification (CPC)
Electric circuits, power, telecommunications, and semiconductors.
Related technology areas
Mapped technology topics for this CPC code.
| Metric | Value |
|---|---|
| CPC code | H01Q1/26 |
| Official title | with electric discharge tube |
| Display label | with electric discharge tube |
| Total patents | 73 |
Filing trend
Year-over-year patent counts classified under this CPC code.
Filing activity over the last five years is rapidly declining.
| Year | Patents |
|---|---|
| 2016 | 3 |
| 2017 | 6 |
| 2018 | 2 |
| 2019 | 11 |
| 2020 | 14 |
| 2021 | 13 |
| 2022 | 7 |
| 2023 | 6 |
| 2024 | 7 |
| 2025 | 3 |
| 2026 | 1 |
Representative patents
Representative publications under this CPC code from precomputed stats, or recent filings when stats are unavailable.
Plasma processing apparatus
US-2023260752-A1 · Aug 17, 2023 · US
Antenna assembly and plasma processing equipment including same
US-2023197409-A1 · Jun 22, 2023 · US
Induction coil assembly and reaction chamber
US-11626268-B2 · Apr 11, 2023 · US
High-frequency power circuit, plasma treatment apparatus, and plasma treatment method
US-2022377870-A1 · Nov 24, 2022 · US
Dipole antenna fed by planar balun
US-11509054-B2 · Nov 22, 2022 · US
Thermal break for high-frequency antennae
US-11488796-B2 · Nov 1, 2022 · US
Plasma density monitor, plasma processing apparatus, and plasma processing method
US-11410835-B2 · Aug 9, 2022 · US
Substrate treating apparatus
US-2022208513-A1 · Jun 30, 2022 · US
Band antenna emp filter apparatus having hemp protection capability
US-2022209735-A1 · Jun 30, 2022 · US
Electric field sensor, surface wave plasma source, and surface wave plasma processing apparatus
US-11244810-B2 · Feb 8, 2022 · US
Induction coil assembly and reaction chamber
US-2021375587-A1 · Dec 2, 2021 · US
Radio-frequency antenna and plasma processing device
US-2021327683-A1 · Oct 21, 2021 · US
Dipole antenna fed by planar balun
US-2021280977-A1 · Sep 9, 2021 · US
Method for separately biasing power amplifier for additional power control
US-11043753-B2 · Jun 22, 2021 · US
Compact high density plasma source
US-2021183619-A1 · Jun 17, 2021 · US
Wideband laser-induced plasma filament antenna with modulated conductivity
US-11024950-B2 · Jun 1, 2021 · US
Plasma processing apparatus and plasma processing method
US-2021134560-A1 · May 6, 2021 · US
Control method and plasma processing apparatus
US-2021125814-A1 · Apr 29, 2021 · US
Antenna and plasma deposition apparatus
US-10991549-B2 · Apr 27, 2021 · US
Frequently asked questions
Answers are generated from the same data shown on this page.
- What is CPC H01Q1/26?
- CPC H01Q1/26 is the Cooperative Patent Classification code for “with electric discharge tube.”
- How many patents are filed under CPC H01Q1/26 (with electric discharge tube)?
- Our database includes 73 publications tagged with this CPC code.
- Is patent activity under CPC H01Q1/26 growing?
- Publication counts under this code: 7 in 2024 vs 3 in 2025 (latest complete years).