Coil structure and plasma processing apparatus
US-12412731-B2 · Sep 9, 2025 · US
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Niu chen patents
Niu chen is listed as an inventor on 5 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Niu chen |
| Total patents | 5 |
| First publication | Dec 2, 2021 |
| Latest publication | Sep 9, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Coil structure and plasma processing apparatus
US-2023260751-A1 · Aug 17, 2023 · US
Upper electrode mechanism, current control method for radio frequency coil, and semiconductor processing apparatus
US-2023197407-A1 · Jun 22, 2023 · US
Induction coil assembly and reaction chamber
US-11626268-B2 · Apr 11, 2023 · US
Induction coil assembly and reaction chamber
US-2021375587-A1 · Dec 2, 2021 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Beijing Naura Microelectronics Equipment Co Ltd | 5 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/3211 | 5 |
| H01J37/32 | 3 |
| H01J2237/3343 | 3 |
| H01J37/321 | 3 |
| H01J2237/334 | 3 |