Symmetric VHF source for a plasma reactor

Patent metadata

Field	Value
Publication number	US-11587766-B2
Application number	US-202117353668-A
Country	US
Kind code	B2
Filing date	Jun 21, 2021
Priority date	Aug 20, 2010
Publication date	Feb 21, 2023
Grant date	Feb 21, 2023

Abstract

The disclosure pertains to a capacitively coupled plasma source in which VHF power is applied through an impedance-matching coaxial resonator having a symmetrical power distribution.

First claim

What is claimed is:

1. A plasma reactor comprising:
a vacuum chamber enclosure having a ceiling with an electrode;
a coaxial resonator positioned above the vacuum chamber and coupled to the electrode, the coaxial resonator including
a hollow center conductive cylinder;
a cylindrical conductive shell including
a hollow inner conductive cylinder coaxial with and surround by the hollow center conductive cylinder,
a hollow outer conductive cylinder coaxial with and surrounding the hollow center conductive cylinder,
an annular conductor plate extending radially extending between and electrically connecting respective top edges of the inner and outer conductive cylinder, wherein a top edge of the hollow center conductive cylinder is spaced from the annular conductor plate by an axial gap length; and

a power coupler to connect the coaxial resonator to a VHF generator, the power coupler including one or more spoke conductors, each spoke conductor of the one or more spoke conductors including
an inner conductor line that extends through an aperture in the cylindrical conductive shell to connect to the center conductive cylinder, and
an outer conductor coaxially with and surrounding a portion of the inner conductor line outside cylindrical conductive shell, the outer conductor extending to and connected to cylindrical conductive shell.

2. The reactor of claim 1 , wherein the power coupler includes an axial conductor and a plurality of spoke conductors coupled to the axial conductor.

3. The reactor of claim 2 , wherein the plurality of spoke conductors are evenly spaced around the axial conductor.

4. The reactor of claim 2 , wherein the axial conductor includes a common conductor line and a common outer conductor coaxial with and surrounding the common conductor line, wherein each inner conductor line connects to the common conductor line and each outer conductor connects to the common outer conductor.

5. The reactor of claim 4 , wherein the common conductor line is coupled to a VHF power generator and the common outer conductor is coupled to ground.

6. The reactor of claim 2 , wherein the axial conductor is coaxial with the center conductive cylinder.

7. The reactor of claim 2 , wherein the plurality of spoke conductors extend radially outward from the axial conductor.

8. The reactor of claim 7 , wherein portions of the plurality of spoke conductors that extend radially outward from the axial conductor are coplanar.

9. The reactor of claim 2 , wherein apertures in the cylindrical conductive shell for inner conductor lines of the plurality spoke conductors are coplanar.

10. The reactor of claim 1 , wherein the cylindrical conductive shell is coupled to ground.

11. The reactor of claim 1 , wherein the hollow center conductive cylinder is coupled to a VHF power generator.

12. The reactor of claim 1 , wherein a sum of axial lengths of the inner and outer conductive cylinders and a radial length of the annular conductor is at least approximately equal to an integral fraction of a wavelength of the frequency of the VHF generator.

13. The reactor of claim 12 , wherein said integral fraction is one-half.

14. The reactor of claim 12 , wherein said axial gap length is selected to optimize resonance of said coaxial resonator at the frequency of the VHF generator.

15. The reactor of claim 1 , wherein the center conductive cylinder has a radius that is a geometric mean of radii of the inner and outer conductive cylinders.

Assignees

• Applied Materials Inc

Inventors

• Ramaswamy Kartik
• Markovsky Igor
• Chen Zhigang
• Carducci James D
• Collins Kenneth S
• Rauf Shahid
• Misra Nipun
• Dorf Leonid
• Ye Zheng John

Classifications

• H01J37/32018

  Glow discharge · CPC title

• H01J37/32577

  Electrical connecting means · CPC title

• H01J37/32834

  Exhausting · CPC title

• H01J37/32082

  Radio frequency generated discharge (H01J37/32357, H01J37/32366, H01J37/32394 and H01J37/32403 take precedence) · CPC title

• H01J37/32587

  Triode systems · CPC title