Symmetric VHF source for a plasma reactor

Patent metadata

Field	Value
Publication number	US-11043361-B2
Application number	US-201715793802-A
Country	US
Kind code	B2
Filing date	Oct 25, 2017
Priority date	Aug 20, 2010
Publication date	Jun 22, 2021
Grant date	Jun 22, 2021

Abstract

The disclosure pertains to a capacitively coupled plasma source in which VHF power is applied through an impedance-matching coaxial resonator having a symmetrical power distribution.

First claim

What is claimed is:

1. A plasma reactor comprising:
a vacuum chamber enclosure and a center electrode;
a coaxial resonator comprising:
(a) a hollow inner conductive cylinder coaxial with said center electrode and having a bottom edge contacting said center electrode;
(b) a hollow outer conductive cylinder coaxial with and surrounding said inner conductive cylinder and having a bottom edge insulated from said center electrode, said inner and outer conductive cylinders having respective circular top edges;
(c) an annular conductor plate surrounding and extending radially outward from a top edge of said inner conductive cylinder to extend between and electrically contact said respective circular top edges of said inner and outer conductive cylinders;
(d) a hollow center conductive cylinder coaxial with said inner and outer conductive cylinders and located between said inner and outer conductive cylinders, and having a bottom edge contacting said center electrode such that said inner conductive cylinder and center conductive cylinder are commonly electrically connected to said center electrode, said center conductive cylinder having a top edge facing and spaced from said annular conductor plate by an axial gap length; and

a VHF power generator coupled to said hollow center conductive cylinder.

2. The reactor of claim 1 further comprising a connection between said outer conductive cylinder and ground.

3. The reactor of claim 1 wherein a sum of the axial lengths of said inner and outer conductive cylinders and a radial length of said annular conductor plate is at least approximately equal to an integral fraction of a wavelength of the frequency of said VHF power generator.

4. The reactor of claim 3 wherein said integral fraction is one-half.

5. The reactor of claim 3 wherein said axial gap length is selected to optimize resonance of said coaxial resonator at the frequency of said VHF power generator.

6. The reactor of claim 1 wherein said center conductive cylinder has a radius that is a geometric mean of the radii of said inner and outer conductive cylinders.

7. The reactor of claim 1 wherein said center electrode comprises a gas distribution plate comprising plural interior gas passages and plural exterior gas ejection orifices on a bottom surface thereof, said reactor further comprising:
a process gas source;
hollow gas lines coupled between said process gas source and said gas distribution plate, said gas lines extending through the interior of said inner conductive cylinder.

8. The reactor of claim 1 wherein said center conductive cylinder is spaced and isolated along its axial length above its bottom edge from said inner conductive cylinder and outer conductive cylinder by radial gaps.

9. The reactor of claim 1 wherein said center conductive cylinder is electrically connected to said inner conductive cylinder only through the center electrode.

10. The reactor of claim 1 wherein said center electrode spans the enclosure from said inner conductive cylinder to said center conductive cylinder.

11. The reactor of claim 1 wherein said annular conductor plate extends in a plane perpendicular to said inner conductive cylinder and said outer conductive cylinder.

12. A plasma reactor comprising:
a vacuum chamber enclosure and a center electrode;
a coaxial resonator comprising:
(a) a hollow inner conductive cylinder coaxial with said center electrode and having a bottom edge contacting said center electrode;
(b) a hollow outer conductive cylinder coaxial with and surrounding said inner conductive cylinder and having a bottom edge insulated from said center electrode, said inner and outer conductive cylinders having respective circular top edges;
(c) an annular conductor extending between and electrically contacting said respective circular top edges of said inner and outer conductive cylinders;
(d) a hollow center conductive cylinder coaxial with said inner and outer conductive cylinders and located between said inner and outer conductive cylinders, and having a bottom edge contacting said center electrode such that said inner conductive cylinder and center conductive cylinder are commonly electrically connected to said center electrode, said center conductive cylinder having a top edge facing and spaced from said annular conductor by an axial gap length; and

a VHF power generator coupled to said hollow center conductive cylinder, wherein said VHF power generator is coupled to said hollow center conductive cylinder by a power coupler extending from said VHF power generator to said hollow center conductive cylinder, wherein said power coupler comprises:
an axial center conductor connected at a first end to said VHF power generator and extending through an interior of said hollow inner conductive cylinder to a second end thereof at a selected axial location;
plural respective openings through said inner cylindrical conductor and coinciding with a circular plane at said selected axial location;
plural respective spoke conductors extending radially from said second end of said axial center conductor through said plural respective openings and terminating at and contacting said center conductive cylinder.

13. The reactor of claim 12 wherein said selected axial location corresponds to an impedance presented to said power coupler matching an output impedance of said VHF power generator.

14. The reactor of claim 12 wherein said power coupler further comprises:
an axial grounded outer conductor coaxial with and surrounding said axial center conductor of said power coupler;
plural respective grounded spoke outer conductors coaxial with and around respective ones of said plural spoke conductors, and terminating at said inner conductive cylinder, said axial grounded outer conductor and said plural grounded spoke outer conductors being joined together near said second end of said axial center conductor.

15. The reactor of claim 12 wherein said power coupler further comprises:
an axial grounded outer conductor coaxial with and surrounding said axial center conductor of said power coupler;
a grounded conductive plane extending parallel to and facing said plural spoke conductors.

16. The reactor of claim 12 wherein said plural respective spoke conductors are symmetrically distributed.

17. A plasma reactor comprising:
a vacuum chamber enclosure comprising a ceiling and a cylindrical side wall, said ceiling comprising a center electrode and a dielectric support ring around said center electrode;
a workpiece support having a support surface facing said ceiling;
a coaxial resonator comprising:
a hollow inner conductive cylinder coaxial with said center electrode and having a bottom edge contacting said center electrode;
a hollow outer conductive cylinder coaxial with said cylindrical side wall and having a bottom edge on said dielectric support ring;
an annular conductor extending between and electrically contacting respective circular top edges of said inner and outer conductive cylinders;
a hollow center conductive cylinder coaxial with said inner and outer conductive cylinders and located between said inner and outer conductive cylinders, and having a bottom edge contacting said center electrode, said center conductive cylinder having a top edge facing an spaced from said annular conductor by an axial gap length;

a VHF power generator;
a power coupler extending from said VHF power generator to said hollow center conductive cylinder, and comprising:
an axial center conductor connected at a first end to said VHF power generator and extending through a

Assignees

• Applied Materials Inc

Inventors

• Ramaswamy Kartik
• Markovsky Igor
• Chen Zhigang
• Carducci James D
• Collins Kenneth S
• Rauf Shahid
• Misra Nipun
• Dorf Leonid
• Ye Zheng John

Classifications

• H01J37/3266

  Magnetic control means · CPC title

• H01J37/32018

  Glow discharge · CPC title

• H01J37/32541

  Shape · CPC title

• H01J37/32577

  Electrical connecting means · CPC title

• H01J37/32082

  Radio frequency generated discharge (H01J37/32357, H01J37/32366, H01J37/32394 and H01J37/32403 take precedence) · CPC title