Heat treatment apparatus

Patent metadata

Field	Value
Publication number	US-11569098-B2
Application number	US-201916398547-A
Country	US
Kind code	B2
Filing date	Apr 30, 2019
Priority date	May 2, 2018
Publication date	Jan 31, 2023
Grant date	Jan 31, 2023

Abstract

A heat treatment apparatus includes: a processing container extended in a vertical direction; and a heater provided to surround the processing container. The heater includes: a first insulator of a cylindrical shape that has a ceiling surface and an opening at a lower end; a heat generator provided along a circumferential direction on an inner circumferential side of the first insulating member; and a second insulator arranged along the circumferential direction of the first insulating member at a position adjacent to the heat generating elements.

First claim

What is claimed is:

1. A heat treatment apparatus comprising:
a processing container extended in a vertical direction; and
a heater provided to surround the processing container,
wherein the heater includes:
a first insulator of a cylindrical shape that has a ceiling surface and an opening at a lower end,
a heat generator provided along a circumferential direction on an inner circumferential side of the first insulator, and
a second insulator extending from the inner circumferential side of the first insulator toward the processing container and arranged along the circumferential direction of the first insulator at a position adjacent to the heat generator, and

wherein a first gap is formed between the processing container and the second insulator in a plan view when viewed from the lower end of the first insulator.

2. The heat treatment apparatus according to claim 1 , wherein the heat generator is provided to be wound spirally, and the second insulator is arranged between adjacent heat generators.

3. The heat treatment apparatus according to claim 2 , wherein the second insulator is provided on a side of the opening of the first insulator.

4. The heat treatment apparatus according to claim 3 , wherein the second insulator protrudes to be closer to the processing container than the heat generator.

5. The heat treatment apparatus according to claim 4 , wherein the second insulator is divided into a plurality of portions.

6. The heat treatment apparatus according to claim 5 , wherein each divided portion of the second insulator has an arc shape when viewed from a longitudinal direction of the processing container.

7. The heat treatment apparatus according to claim 6 , wherein the second insulator has a quadrangular-shaped cross-section in the longitudinal direction of the processing container.

8. The heat treatment apparatus according to claim 7 , wherein the second insulator has a rectangular-shaped cross-section in the longitudinal direction of the processing container, and a rounded corner on a side of the processing container.

9. The heat treatment apparatus according to claim 8 , wherein the second insulator has a triangular-shaped cross-section in the longitudinal direction of the processing container.

10. The heat treatment apparatus according to claim 9 , wherein the heat generator is divided into a plurality of portions in the longitudinal direction of the processing container.

11. The heat treatment apparatus according to claim 1 , wherein the second insulator is provided on a side of the opening of the first insulator.

12. The heat treatment apparatus according to claim 1 , wherein the second insulator protrudes to be closer to the processing container than the heat generator.

13. The heat treatment apparatus according to claim 1 , wherein the second insulator is divided into a plurality of portions.

14. The heat treatment apparatus according to claim 1 , wherein each divided portion of the second insulator has an arc shape when viewed from a longitudinal direction of the processing container.

15. The heat treatment apparatus according to claim 1 , wherein the second insulator has a quadrangular-shaped cross-section in the longitudinal direction of the processing container.

16. The heat treatment apparatus according to claim 1 , wherein the second insulator has a rectangular-shaped cross-section in the longitudinal direction of the processing container, and a rounded corner on a side of the processing container.

17. The heat treatment apparatus according to claim 1 , wherein the second insulator has a triangular-shaped cross-section in the longitudinal direction of the processing container.

18. The heat treatment apparatus according to claim 1 , wherein the heat generator is divided into a plurality of portions in the longitudinal direction of the processing container.

19. The heat treatment apparatus according to claim 1 , wherein the second insulator is divided in the circumferential direction into a plurality of divided portions to form second gaps therebetween, and
at least two of the second gaps adjacent to each other in the vertical direction do not overlap each other in the vertical direction.

20. The heat treatment apparatus according to claim 19 , wherein a length of a divided portion of the second insulator in the circumferential direction is greater than a length of the second gap in the circumferential direction.

Assignees

• Tokyo Electron Ltd

Inventors

• Yamaguchi Tatsuya
• Kikuchi Yasuaki

Classifications

• H10P72/0434 Primary

  mainly by convection · CPC title

• F26B23/06

  resistance heating · CPC title

• H01L21/67109 Primary

  Electricity · mapped topic

• H10P72/0402 Primary

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• H10P72/0432 Primary

  mainly by conduction · CPC title