System and method for edge ring wear compensation

Patent metadata

Field	Value
Publication number	US-11538713-B2
Application number	US-201816769681-A
Country	US
Kind code	B2
Filing date	Nov 30, 2018
Priority date	Dec 5, 2017
Publication date	Dec 27, 2022
Grant date	Dec 27, 2022

Abstract

A controller for adjusting a height of an edge ring in a substrate processing system includes an edge ring wear calculation module configured to receive at least one input indicative of one or more erosion rates of the edge ring, calculate at least one erosion rate of the edge ring based on the at least one input, and calculate an amount of erosion of the edge ring based on the at least one erosion rate. An actuator control module is configured to adjust the height of the edge ring based on the amount of erosion as calculated by the edge ring wear calculation module.

First claim

What is claimed is:

1. A controller for adjusting a height of an edge ring arranged around an outer portion of a substrate support in a substrate processing system, the controller comprising:
an edge wear calculation module; and
an actuator control module,
wherein the edge ring wear calculation module is configured to
receive, from a user interface, at least one input indicative of one or more erosion rates of the edge ring, wherein the at least one input includes a plurality of erosion rates for respective usage periods of the substrate processing system,
determine at least one erosion rate of the edge ring using the plurality of erosion rates for the respective usage periods,
monitor an overall usage of the edge ring and store the overall usage of the edge ring in a memory, and
calculate an amount of erosion of the edge ring based on the determined at least one erosion rate and the overall usage of the edge ring, and

wherein the actuator control module is configured to adjust the height of the edge ring based on the amount of erosion as calculated by the edge ring wear calculation module to compensate for the calculated amount of erosion.

2. The controller of claim 1 , wherein the at least one input includes an erosion rate as input by a user.

3. The controller of claim 1 , wherein the at least one input includes information indicating a type and duration of processing performed in the substrate processing system.

4. The controller of claim 1 , wherein the at least one input includes calibration data indicating at least one of the height, a thickness, and a position of the edge ring.

5. The controller of claim 1 , wherein, to determine the at least one erosion rate, the edge ring wear calculation module is configured to calculate the plurality of erosion rates in the respective usage periods of the substrate processing system.

6. The controller of claim 5 , wherein, to calculate the amount of erosion of the edge ring, the edge ring wear calculation module is configured to calculate the amount of erosion based on the plurality of erosion rates as calculated in the respective usage periods.

7. The controller of claim 5 , wherein each of the plurality of erosion rates is different for the respective usage periods.

8. The controller of claim 5 , wherein the edge ring wear calculation module is configured to calculate the plurality of erosion rates using a lookup table that indexes erosion rates to usage periods.

9. The controller of claim 5 , wherein the edge ring wear calculation module is configured to calculate the plurality of erosion rates using a model.

10. A system comprising the controller of claim 1 and further comprising the user interface.

11. The system of claim 10 , wherein the user interface is configured to receive, as the at least one input, the plurality of erosion rates.

12. The system of claim 10 , wherein the user interface includes a display configured to display the amount of erosion as calculated by the edge ring wear calculation module.

Assignees

• Lam Res Corp

Inventors

• Kamp Tom A
• Leal-Verdugo Carlos

Classifications

• H10P72/0616

  Monitoring of warpages, curvatures, damages, defects or the like · CPC title

• H10P72/7606 Primary

  characterised by edge clamping, e.g. clamping ring · CPC title

• H01J37/32642

  Focus rings · CPC title

• H01J37/32623

  Mechanical discharge control means · CPC title

• H01J37/32926

  Software, data control or modelling · CPC title