Methods to fabricate dual pore devices

Patent metadata

Field	Value
Publication number	US-11536708-B2
Application number	US-202016738629-A
Country	US
Kind code	B2
Filing date	Jan 9, 2020
Priority date	Jan 9, 2020
Publication date	Dec 27, 2022
Grant date	Dec 27, 2022

Abstract

Embodiments of the present disclosure provide dual pore sensors and methods for producing these dual pore sensors. The method includes forming a film stack, where the film stack contains two silicon layers and two membrane layers, and then etching the film stack to produce a channel extending therethrough and having two reservoirs and two nanopores. The method also includes depositing a oxide layer on inner surfaces of the reservoirs and nanopores, depositing a dielectric layer on the oxide layer, and forming a metal contact extending through a portion of the stack. The method further includes etching the dielectric layers to form wells, etching the first silicon layer to reveal the protective oxide layer deposited on the inner surfaces of a reservoir, and etching the protective oxide layer deposited on the inner surfaces of the reservoirs and the nanopores.

First claim

The invention claimed is:

1. A method of forming a dual pore sensor, comprising:
forming a film stack, wherein the film stack comprises:
a first silicon layer,
a first membrane layer disposed on the first silicon layer,
a second silicon layer disposed on the first membrane layer, and
a second membrane layer disposed on the second silicon layer;

etching the film stack to produce:
a first reservoir in the first silicon layer,
a first nanopore in the first membrane layer,
a second reservoir in the second silicon layer,
a second nanopore in the second membrane layer, and
a channel in fluid communication with the first and second reservoirs and the first and second nanopores;

depositing a protective oxide layer on the second membrane layer and inner surfaces of the first and second reservoirs and inner surfaces of the first and second nanopores;
depositing a dielectric layer on the protective oxide layer disposed on the second membrane layer and covering the second nanopore;
forming a metal contact which extends through the dielectric layer, the protective oxide layer, and the second membrane layer, and at least partially into the second silicon layer;
etching at least a portion of the dielectric layer to form a well above the second nanopore;
etching at least a portion of the first silicon layer to reveal at least a portion of the protective oxide layer deposited on the inner surfaces of the first reservoir; and
etching the protective oxide layer deposited on the inner surfaces of the first and second reservoirs and the inner surfaces of the first and second nanopores.

2. The method of claim 1 , wherein the protective oxide layer comprises silicon oxide, a metal oxide, a metal silicate, or any combination thereof.

3. The method of claim 2 , wherein the protective oxide layer is deposited by atomic layer deposition.

4. The method of claim 1 , wherein each of the first nanopore and the second nanopore independently has a diameter in a range from about 0.5 nm to about 50 nm.

5. The method of claim 1 , wherein the dielectric layer comprises a tetraethyl orthosilicate oxide, a silane oxide, a polyimide, or any combination thereof.

6. The method of claim 1 , wherein the dielectric layer has a thickness in a range from about 1 μm to about 5 μm.

7. The method of claim 1 , wherein forming the metal contact further comprises:
etching a contact hole through the dielectric layer, the protective oxide layer, and the second membrane layer, and partially into the second silicon layer; and
depositing a metal into the contact hole to form the metal contact comprising the metal.

8. The method of claim 1 , wherein the metal contact extends parallel or substantially parallel to the channel.

9. The method of claim 1 , wherein the portion of the dielectric layer is etched with a dry etch process to form the well above the second nanopore, and wherein the portion of the first silicon layer is etched with a wet etch process to reveal the portion of the protective oxide layer deposited on the inner surfaces of the first reservoir.

10. The method of claim 1 , wherein the protective oxide layer is etched by a wet etch process.

11. The method of claim 1 , further comprising depositing a spacer layer on at least the inner surfaces of the first and second nanopores after etching the protective oxide layer.

12. The method of claim 11 , wherein the spacer layer comprises silicon oxide, a silicon nitride, a silicon oxynitride, or any combination thereof.

13. The method of claim 11 , wherein the spacer layer is deposited by atomic layer deposition.

14. The method of claim 11 , further comprising etching at least a portion of the spacer layer from the inner surfaces of the first and second nanopores within the channel.

15. The method of claim 11 , further comprising etching at least a portion of the spacer layer from a lower surface of the first membrane or an upper surface of the second membrane.

16. A method of forming a dual pore sensor, comprising:
forming a film stack, wherein the film stack comprises:
a first silicon layer,
a first membrane layer disposed on the first silicon layer,
a second silicon layer disposed on the first membrane layer,
a second membrane layer disposed on the second silicon layer,
a first reservoir in the first silicon layer,
a first nanopore in the first membrane layer,
a second reservoir in the second silicon layer,
a second nanopore in the second membrane layer, and
a channel in fluid communication with the first and second reservoirs and the first and second nanopores;

depositing a protective oxide layer on the second membrane layer and inner surfaces of the first and second reservoirs and inner surfaces of the first and second nanopores;
depositing a dielectric layer on the protective oxide layer disposed on the second membrane layer and covering the second nanopore;
forming a metal contact which extends through the dielectric layer, the protective oxide layer, and the second membrane layer, and at least partially into the second silicon layer, wherein the metal contact comprises a metal;
etching at least a portion of the dielectric layer to form a well above the second nanopore;
etching at least a portion of the first silicon layer to reveal at least a portion of the protective oxide layer deposited on the inner surfaces of the first reservoir;
etching the protective oxide layer deposited on the inner surfaces of the first and second reservoirs and the inner surfaces of the first and second nanopores; and
depositing a spacer layer on at least the inner surfaces of the first and second nanopores.

17. The method of claim 16 , wherein the spacer layer comprises silicon oxide, a silicon nitride, a silicon oxynitride, or any combination thereof, and wherein the spacer layer is deposited by atomic layer deposition.

18. The method of claim 16 , further comprising etching at least a portion of the spacer layer from a lower surface of the first membrane or an upper surface of the second membrane.

19. The method of claim 16 , wherein each of the first nanopore and the second nanopore independently has a diameter in a range from about 1 nm to about 50 nm.

20. The method of claim 16 , wherein the dielectric layer has a thickness in a range from about 1 μm to about 5 μm.

Assignees

• Applied Materials Inc

Inventors

• Saly Mark J
• Woods Keenan Navarre
• Johnson Joseph R
• Bhuyan Bhaskar Jyoti
• Durand William J
• Chudzik Michael
• SREENIVASAN Raghav
• Quon Roger

Classifications

• B82Y15/00

  Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors · CPC title

• G01N33/48721 Primary

  Investigating individual macromolecules, e.g. by translocation through nanopores (Coulter counters in general G01N15/12; fabrication methods for nanoscale apertures B81B1/00; sequencing of nucleic acids C12Q1/68) · CPC title

• B82Y40/00

  Manufacture or treatment of nanostructures · CPC title

• C12Q1/6869

  Methods for sequencing · CPC title