Polishing apparatus and polishing method

Patent metadata

Field	Value
Publication number	US-11511386-B2
Application number	US-201916513251-A
Country	US
Kind code	B2
Filing date	Jul 16, 2019
Priority date	Jul 20, 2018
Publication date	Nov 29, 2022
Grant date	Nov 29, 2022

Abstract

A polishing apparatus capable of forming a step-shaped recess having a right-angled cross section in an edge portion of a substrate, such as a wafer, is disclosed. The polishing apparatus includes: a substrate rotating device configured to rotate the substrate about a rotation axis; a first roller having a first circumferential surface configured to press a polishing tape against the edge portion of the substrate; and a second roller having a second circumferential surface in contact with the first circumferential surface. The second roller has a tape stopper surface that restricts movement of the polishing tape in a direction away from the rotation axis. The tape stopper surface is located radially outward of the first circumferential surface.

First claim

What is claimed is:

1. A polishing apparatus for forming a step-shaped recess in an edge portion of a substrate, comprising:
a substrate rotating device configured to rotate the substrate about a rotation axis; a first rotatable roller having a first circumferential surface configured to press a polishing tape against the edge portion of the substrate; and a second rotatable roller having a second circumferential surface in contact with the first circumferential surface, the second rotatable roller having a tape stopper surface that restricts movement of the polishing tape in a direction away from the rotation axis, the tape stopper surface being located radially outward of the first circumferential surface.

2. The polishing apparatus according to claim 1 , wherein the first rotatable roller and the second rotatable roller are rotatable about a first axis and a second axis, respectively, extending toward the rotation axis.

3. The polishing apparatus according to claim 1 , further comprising a third roller concentrically fixed to the second rotatable roller, the third roller having a third circumferential surface with a diameter smaller than a diameter of the second circumferential surface, the tape stopper surface being connected to the third circumferential surface.

4. The polishing apparatus according to claim 3 , wherein an axial length of the third roller is smaller than a distance between an inner end surface of the first rotatable roller and the tape stopper surface.

5. The polishing apparatus according to claim 1 , wherein a distance between an inner end surface of the first rotatable roller and the tape stopper surface is equal to or smaller than a width of the polishing tape.

6. The polishing apparatus according to claim 1 , further comprising a tape-stopper-surface detection system configured to detect a position of the tape stopper surface.

7. The polishing apparatus according to claim 6 , wherein the tape-stopper-surface detection system is configured to emit an alarm when an amount of change in the position of the tape stopper surface exceeds a preset threshold value.

8. The polishing apparatus according to claim 6 , further comprising: a roller moving mechanism configured to move the first rotatable roller and the second rotatable roller in a direction toward the rotation axis and in a direction away from the rotation axis, wherein the tape-stopper-surface detection system is configured to instruct the roller moving mechanism to move the first rotatable roller and the second rotatable roller toward the rotation axis by a distance corresponding to the amount of change in the position of the tape stopper surface.

9. The polishing apparatus according to claim 1 , further comprising: a roller moving mechanism configured to move the first rotatable roller and the second rotatable roller in a direction toward the rotation axis and in a direction away from the rotation axis; a tape-width measuring sensor configured to measure a width of the polishing tape; and an arithmetic device configured to instruct the roller moving mechanism to move the first rotatable roller and the second rotatable roller in a direction as to cancel a change in a measured width of the polishing tape.

10. A polishing method of forming a step-shaped recess in an edge portion of a substrate, comprising:
rotating the substrate about a rotation axis; and pressing a polishing tape against the edge portion of the substrate by a first circumferential surface of a first rotating roller while restricting movement of the polishing tape in a direction away from the rotation axis by a tape stopper surface of a second rotating roller, the second rotating roller having a second circumferential surface in contact with the first circumferential surface, the tape stopper surface being located radially outward of the first circumferential surface.

11. The polishing method according to claim 10 , further comprising emitting an alarm when an amount of change in a position of the tape stopper surface exceeds a preset threshold value.

12. The polishing method according to claim 10 , further comprising moving the first rotating roller and the second rotating roller toward the rotation axis by a distance corresponding to an amount of change in a position of the tape stopper surface.

13. The polishing method according to claim 10 , further comprising: measuring a width of the polishing tape; and moving the first rotating roller and the second rotating roller in a direction as to cancel a change in a measured width of the polishing tape.

Assignees

• Ebara Corp

Inventors

• Seki Masaya
• Nakanishi Masayuki
• Kashiwagi Makoto

Classifications

• B24B49/10

  involving electrical means (B24B49/02, B24B49/08 take precedence) · CPC title

• B24B21/06

  involving members with limited contact area pressing the belt against the work, e.g. shoes sweeping across the whole area to be ground (B24B21/12 takes precedence) · CPC title

• B24B21/14

  Contact wheels; Contact rollers; Belt supporting rolls · CPC title

• B24C3/08

  essentially adapted for abrasive blasting of travelling stock or travelling workpieces · CPC title

• B24B21/20

  for controlling or adjusting the tracking or the tension of the grinding belt · CPC title