Surface analysis device

Patent metadata

Field	Value
Publication number	US-11499989-B2
Application number	US-201917283886-A
Country	US
Kind code	B2
Filing date	Oct 11, 2019
Priority date	Oct 16, 2018
Publication date	Nov 15, 2022
Grant date	Nov 15, 2022

Abstract

A surface analysis device is provided with a sample stage for placing a sample thereon, a cantilever to be arranged to face the sample stage, and a cantilever drive unit for driving the cantilever. The drive mechanism is configured, when taking out the sample stage, to shift the sample stage relative to a measurement unit so that the measurement unit and the sample stage separate from each other in a first direction in which the cantilever and the sample stage face each other, and then slidably move the stage in a direction intersecting with the first direction.

First claim

The invention claimed is:

1. A surface analysis device for analyzing a sample surface, comprising:
a sample stage configured to place a sample thereon;
a measurement unit including a cantilever to be arranged to face the sample stage and a cantilever drive unit for driving the cantilever; and
a drive mechanism configured to relatively displace the measurement unit and the sample stage,
wherein the drive mechanism is configured, when taking out the sample stage, to shift the sample stage relative to the measurement unit so that the measurement unit and the sample stage separate from each other in a first direction in which the cantilever and the sample stage face each other, and then slidably move the sample stage in a second direction intersecting with the first direction,
wherein the drive mechanism includes a sample stage holding unit for holding the sample stage and a moving mechanism for moving the sample stage between a measurement position and a sample take-out position,
wherein the first direction is a vertical direction,
wherein the moving mechanism is configured to lift and lower the sample stage holding unit so that the sample stage is lifted and lowered between the measurement position and a retracted position positioned lower than the measurement position and slidably move the sample stage holding unit so that the sample stage is moved between the sample take-out position and the retracted position,
wherein the surface analysis device further comprises a housing configured to accommodate the sample stage, the sample stage holding unit, and the moving mechanism in a state in which the sample stage is positioned at the measurement position, and
wherein when the sample stage holding unit is slidably moved so that the sample stage is moved from the retracted position to the sample take-out position, the sample stage is exposed to an outside from an inside of the housing.

2. The surface analysis device as recited in claim 1 ,
wherein the moving mechanism includes a support for supporting the sample stage holding unit, a slide mechanism for slidably moving the support along a slide direction in which the sample stage holding unit is slidably moved, and a lifting and lowering mechanism for lifting and lowering the sample stage holding unit relative to the support,
wherein the support is movably provided in a predetermined slide section including a first section and a second section, the first section and the second section being continuous,
wherein the sample stage holding unit is lifted and lowered with respect to the support by the lifting and lowering mechanism in conjunction with a slide movement of the support in the first section, and
wherein the sample stage holding unit is slidably moved along the slide direction together with the support in accordance with a slide movement of the support in the second section.

3. The surface analysis device as recited in claim 2 ,
wherein the lifting and lowering mechanism includes a connecting member for connecting the support and the sample stage holding unit, and a lifting and lowering guide for guiding a movement of the sample stage holding unit in a lifting and lowering direction,
wherein one end side of the connecting member is pivotally supported by the support so that the connecting member is rotatable about a first rotation axis perpendicular to the slide direction and the lifting and lowering direction,
wherein the other end side of the connecting member is pivotally supported by the sample stage holding unit so that the connecting member is rotatable about a second rotation axis parallel to the first rotation axis,
wherein the lifting and lowing guide restricts a movement of the sample stage holding unit in a retracting direction from the sample take-out position toward the retracted position when the support is moved in the first section, and
wherein the support is slidably moved in the first section in a regulated state in which the movement of the sample stage holding unit in the retracting direction by the lifting and lowering guide to rotate the connecting member about the first rotation axis and the second rotation axis, thereby lifting and lowering the sample stage holding unit relative to the support.

4. The surface analysis device as recited in claim 3 ,
wherein the lifting and lowing guide includes a roller rotatable about a rotation shaft parallel to the first rotation axis, and
wherein the sample stage holding unit comes into contact with the roller to cause the regulated state, and the roller rotates in the regulated state to guide lifting and lowering of the sample stage holding unit.

5. The surface analysis device as recited in claim 2 ,
wherein the lifting and lowering mechanism includes a plate unit arranged above the sample stage holding unit so as not to interfere with the sample stage,
wherein the support is arranged below the sample stage holding unit,
wherein when the sample stage holding unit comes into contact with the plate unit, lifting of the sample stage holding unit is regulated, and
wherein when the sample stage holding unit comes into contact with the support, lowering of the sample stage holding unit is regulated.

6. The surface analysis device as recited in claim 2 , further comprising:
a detection device configured to detect a position of the support,
wherein the detection device includes a light-emitting unit and a light-receiving unit for receiving light emitted from the light-emitting unit,
wherein the slide mechanism includes a light-shielding member that is slidably moved in accordance with the slide movement of the support, and
wherein the detection device detects a position of the support when the light emitted from the light-emitting unit toward the light-receiving unit is shielded by the light-shielding member.

7. The surface analysis device according to claim 1 ,
wherein a part of the housing is configured to be slidable,
wherein the sample stage holding unit includes an engaging portion capable of being releasably engaged with the part of the housing,
wherein the engaging portion is in a non-engaged state in which the engaging portion is not engaged with the part of the housing in a state in which the sample stage holding unit is lifted so that the sample stage is positioned at the measurement position, and is in an engaged state in which the engaging portion is engaged with the part of the housing in a state in which the sample stage holding unit is lowered so that the sample stage is positioned at the retracted position, and
wherein in the engaged state, when the sample stage holding unit is slidably moved so that the sample stage is moved from the retracted position to the sample take-out position, the part of the housing is slidably moved integrally with the sample stage holding unit to expose the sample stage to an outside from an inside of the housing.

Assignees

• Shimadzu Corp

Inventors

• Kobayashi Kanji
• Hirade Masato

Classifications

• G01Q70/02

  Probe holders · CPC title

• G01Q30/20 Primary

  Sample handling devices or methods · CPC title

• G01Q10/02

  Coarse scanning or positioning · CPC title