Piezoelectric material, piezoelectric element, and electronic equipment

Patent metadata

Field	Value
Publication number	US-11489462-B2
Application number	US-202016775523-A
Country	US
Kind code	B2
Filing date	Jan 29, 2020
Priority date	Aug 4, 2017
Publication date	Nov 1, 2022
Grant date	Nov 1, 2022

Abstract

Provided is a lead-free piezoelectric material reduced in dielectric loss tangent, and achieving both a large piezoelectric constant and a large mechanical quality factor. A piezoelectric material according to at least one embodiment of the present disclosure is a piezoelectric material including a main component formed of a perovskite-type metal oxide represented by the general formula (1): Na x+s(1−y) (Bi w Ba 1−s−w ) 1−y Nb y Ti 1−y O 3 (where 0.84≤x≤0.92, 0.84≤y≤0.92, 0.002≤(w+s)(1−y)≤0.035, and 0.9≤w/s≤1.1), and a Mn component, wherein the content of the Mn is 0.01 mol % or more and 1.00 mol % or less with respect to the perovskite-type metal oxide.

First claim

What is claimed is:

1. A piezoelectric material comprising:
a perovskite-type metal oxide represented by the following general formula (1):
Na x+s(1−y) (Bi w Ba 1−s−w ) 1−y Nb y Ti 1−y O 3   General Formula (1)

where 0.84≤x≤0.92, 0.84≤y≤0.92, 0.002≤(w+s)(1−y)≤0.035, and 0.9≤w/s≤1.1; and
Mn,
wherein a content of the Mn is 0.01 mol % or more and 1.00 mol % or less with respect to the perovskite-type metal oxide.

2. The piezoelectric material according to claim 1 , wherein a unit cell of the perovskite-type metal oxide has a structure containing at least two oxygen octahedra.

3. The piezoelectric material according to claim 1 , wherein, when a largest peak intensity in a 2θ range of from 44° to 48° in a case in which the piezoelectric material is powdered and subjected to X-ray diffraction measurement of 2θ-θ with Cu—Kα rays at room temperature is represented by I1 and a next largest peak intensity therein is represented by I2, a largest peak is located on a wide-angle side and a relationship of 1.1≤I1/I2≤1.3 is satisfied.

4. The piezoelectric material according to claim 1 , wherein the piezoelectric material has a Curie temperature of 200° C. or more.

5. The piezoelectric material according to claim 1 , wherein a content of each of Pb, K, Mg, and Cu is 1,000 ppm or less.

6. A manufacturing method for a piezoelectric material comprising firing mixed raw material powder including sodium niobate, barium titanate, and sodium bismuth titanate each having a perovskite-type structure to obtain a sintered body,
the mixed raw material powder being prepared so that:
the piezoelectric material includes:
a perovskite-type metal oxide represented by the following general formula (1):
Na x+s(1−y) (Bi w Ba 1−s−w ) 1−y Nb y Ti 1−y O 3   General Formula (1)

where 0.84≤x≤0.92, 0.84≤y≤0.92, 0.002≤(w+s)(1−y)≤0.035, and 0.9≤w/s≤1.1; and
Mn; and
a content of the Mn is 0.01 mol % or more and 1.00 mol % or less with respect to the perovskite-type metal oxide.

7. A piezoelectric element comprising:
an electrode; and
a piezoelectric material portion,
wherein a piezoelectric material for forming the piezoelectric material portion is the piezoelectric material of claim 1 .

8. The piezoelectric element according to claim 7 , wherein the electrode and the piezoelectric material portion are stacked alternately.

9. A liquid ejection head comprising at least:
a liquid chamber including a vibration unit including the piezoelectric element of claim 7 ; and
an ejection port communicating to the liquid chamber.

10. A liquid ejection apparatus comprising:
a stage configured to receive an object; and
the liquid ejection head of claim 9 .

11. An oscillatory wave motor comprising at least:
a vibration body including the piezoelectric element of claim 7 ; and
a moving body to be brought into contact with the vibration body.

12. An optical equipment comprising a drive unit including the oscillatory wave motor of claim 11 .

13. A vibration device comprising a vibration body including a diaphragm including the piezoelectric element of claim 7 .

14. A dust removing apparatus comprising the vibration device of claim 13 .

15. An image pickup apparatus comprising at least:
the dust removing apparatus of claim 14 ; and
an image pickup element unit,
wherein the diaphragm of the dust removing apparatus is arranged on a light receiving surface of the image pickup element unit.

16. An electronic equipment comprising the piezoelectric element of claim 7 .

Assignees

• Canon Kk
• Fuji Chemical Kk

Inventors

• Oshima Kanako
• Ueda Miki
• Matsuda Takanori
• Kubota Makoto
• Yabuta Hisato
• Uchida Fumio
• Imai Hiroki
• Maeda Kenji
• Shimizu Chiemi

Classifications

• H04N23/811

  by dust removal, e.g. from surfaces of the image sensor or processing of the image signal output by the electronic image sensor · CPC title

• B41J2/14233

  of film type, deformed by bending and disposed on a diaphragm · CPC title

• C04B2235/3298

  Bismuth oxides, bismuthates or oxide forming salts thereof, e.g. zinc bismuthate · CPC title

• C04B2235/768

  Perovskite structure ABO3 · CPC title

• C04B2235/3201

  Alkali metal oxides or oxide-forming salts thereof · CPC title