High temperature RF connection with integral thermal choke

Patent metadata

Field	Value
Publication number	US-11469084-B2
Application number	US-201715696068-A
Country	US
Kind code	B2
Filing date	Sep 5, 2017
Priority date	Sep 5, 2017
Publication date	Oct 11, 2022
Grant date	Oct 11, 2022

Abstract

A thermal choke rod connecting a radio frequency source to a substrate support of a plasma processing system includes a tubular member having a first connector for connecting to an RF rod coupled to the substrate support and a second connector for connecting to an RF strap that couples to the RF source. A tubular segment extends between the first and second connectors. The first connector has a conically-shaped end region that tapers away from the inner surface thereof to an outer surface in a direction toward the tubular segment, and slits that extend for a prescribed distance from a terminal end of the first connector. The outer surface of the tubular segment has a threaded region for threaded engagement with an annular cap that fits over the first connector and reduces an inner diameter of the first connector upon contact with the conically-shaped end region of the first connector.

First claim

What is claimed is:

1. A thermal choke rod for use in connecting a radio frequency (RF) source to a substrate support of a plasma processing system, comprising:
a tubular member having a first connector for connecting to an RF rod in the plasma processing system, wherein the tubular member is coupled to the substrate support and a second connector for connecting to an RF strap that couples to the RF source, and a tubular segment extending between the first and second connectors, the tubular segment having an inner diameter, the first connector having an inner surface that is a continuation of an inner surface of the tubular segment, the first connector having a conically-shaped end region that tapers away from the inner surface of the first connector to an outer surface of the first connector in a direction toward the tubular segment, the first connector having a central opening defined by a terminal edge circumscribing the central opening at a terminal end of the first connector, wherein the central opening is configured to receive the RF rod, the first connector having a plurality of slits formed through a wall thickness of the first connector, the plurality of slits defining slit openings extending through the terminal end and through the terminal edge, the plurality of slit openings extending a prescribed distance from the terminal edge to define a plurality of axial fingers, an outer surface of the tubular segment having a threaded region proximate to the first connector for threaded engagement with an annular cap configured to fit over the first connector and reduce an inner diameter of the first connector upon contact with the conically-shaped end region of the first connector.

2. The thermal choke rod of claim 1 , wherein the annular cap has an inner threaded region for threaded engagement with the threaded region proximate to the first connector, and an inner tapered wall that is configured to mate with the conically-shaped end region of the first connector, and wherein the conically-shaped end region of the first connection has a surface that is disposed at an angle of about 10 degrees to about 30 degrees relative to a horizontal reference line, and a surface of the inner tapered wall of the annular cap is disposed at an angle of about 10 degrees to about 30 degrees relative to a horizontal reference line.

3. The thermal choke rod of claim 1 , wherein the second connector has an inner threaded region and the thermal choke rod further includes a threaded mechanical fastener that is configured to connect the RF strap to the second connector of the thermal choke rod.

4. The thermal choke rod of claim 3 , wherein the threaded mechanical fastener is either a bolt or a machine screw.

5. The thermal choke rod of claim 1 , wherein the thermal choke rod comprises a base material having a low thermal conductivity, and the base material is plated with a highly electrically conductive material.

6. The thermal choke rod of claim 5 , wherein the base material having a low thermal conductivity comprises stainless steel or a nickel-chromium-based superalloy, and the highly electrically conductive material plated on the base material comprises gold.

7. A thermal choke rod for use in connecting a radio frequency (RF) source to a substrate support of a plasma processing system, comprising,
a tubular member having a first connector for connecting to an RF rod in the plasma processing system, wherein the tubular member is coupled to the substrate support and a second connector for connecting to an RF strap that couples to the RF source, and a tubular segment extending between the first and second connectors, the tubular segment having an inner diameter, the first connector having an inner surface that is a continuation of an inner surface of the tubular segment, the inner surface of the first connector extending from the inner surface of the tubular segment to a terminal end of the first connector, the first connector having a conically-shaped end region that tapers away from the inner surface of the first connector to an outer surface of the first connector in a direction toward the tubular segment, the first connector having a central opening defined by a terminal edge circumscribing the central opening at a terminal end of the first connector, wherein the central opening is configured to receive the RF rod, the first connector having a plurality of slits formed through a wall thickness of the first connector, the plurality of slits defining slit openings extending through the terminal end and through the terminal edge, the plurality of slit openings extending a prescribed distance from the terminal edge of the first connector to define a plurality of axial fingers, an outer surface of the tubular segment having a threaded region proximate to the first connector for threaded engagement with an annular cap configured to fit over the first connector and reduce an inner diameter of the first connector upon contact with the conically-shaped end region of the first connector.

8. The thermal choke rod of claim 7 , wherein the annular cap has an inner threaded region for threaded engagement with the threaded region proximate to the first connector, and an inner tapered wall that is configured to mate with the conically-shaped end region of the first connector, and wherein the conically-shaped region of the first connector has a surface that is disposed at an angle of about 10 degrees to about 30 degrees relative to a horizontal reference line, and a surface of the inner tapered wall of the annular cap is disposed at an angle of about 10 degrees to about 30 degrees relative to a horizontal reference line.

9. The thermal choke rod of claim 7 , wherein the second connector has an inner threaded region and the thermal choke rod further includes a threaded mechanical fastener that is configured to connect the RF strap to the second connector of the thermal choke rod.

10. The thermal choke rod of claim 9 , wherein the threaded mechanical fastener is either a bolt or a machine screw.

11. The thermal choke rod of claim 7 , wherein the thermal choke rod comprises a base material having a low thermal conductivity, and the base material is plated with a highly electrically conductive material.

12. The thermal choke rod of claim 11 , wherein the base material having a low thermal conductivity comprises stainless steel or a nickel-chromium-based superalloy, and the highly electrically conductive material plated on the base material comprises gold.

13. The thermal choke rod of claim 7 , wherein the plurality of slits formed through the wall thickness of the first connector extend for 10% to 60% of a length of the first connector.

14. The thermal choke rod of claim 7 , wherein the plurality of slits formed through the wall thickness of the first connector extend for 20% to 40% of a length of the first connector.

15. A thermal choke rod for use in connecting a radio frequency (RF) source to a substrate support of a plasma processing system, comprising,
a tubular member having a first connector for connecting to an RF rod in the plasma processing system, wherein the tubular member is coupled to the substrate support and a second connector for connecting to an RF strap that couples to the RF source, the first connector having a first wall thickness, and a tubular segment extending between the first and second connectors, the tubular segment having a second wall thickness, the second wall thickness being greater than the first wall thickness, the tubular segment having an inner diameter, the first connector having an inner surface that is a continuation of an inner surface of

Assignees

• Lam Res Corp

Inventors

• Thomas Timothy S
• Burkhart Vince
• Hollingsworth Joel
• French David
• Slevin Damien

Classifications

• H01J37/32082

  Radio frequency generated discharge (H01J37/32357, H01J37/32366, H01J37/32394 and H01J37/32403 take precedence) · CPC title

• H01J37/32715

  Workpiece holder · CPC title

• H01J37/32724

  Temperature · CPC title

• C23C16/505 Primary

  using radio frequency discharges · CPC title

• C23C16/46

  characterised by the method used for heating the substrate (C23C16/48, C23C16/50 take precedence) · CPC title