Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system
US-12586757-B2 · Mar 24, 2026 · US
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French David patents
French David is listed as an inventor on 51 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | French David |
| Total patents | 51 |
| First publication | Dec 3, 2015 |
| Latest publication | Mar 24, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Process module chamber providing symmetric rf return path
US-2026058096-A1 · Feb 26, 2026 · US
Apparatus and method for modulating spatial distribution of plasma and ion energy using frequency-dependent transmission line
US-2025379033-A1 · Dec 11, 2025 · US
Parasitic plasma suppressor
US-2025372357-A1 · Dec 4, 2025 · US
Process module chamber providing symmetric RF return path
US-12482636-B2 · Nov 25, 2025 · US
Radio frequency system protection based on temperature inference
US-2025285847-A1 · Sep 11, 2025 · US
Filter box for a substrate processing system
US-12347648-B2 · Jul 1, 2025 · US
Spatially tunable inductively coupled plasma antenna
US-2025210305-A1 · Jun 26, 2025 · US
Rf tuning systems including tuning circuits having impedances for setting and adjusting parameters of electrodes in electrostatic chucks
US-2025118535-A1 · Apr 10, 2025 · US
High temperature RF connection with integral thermal choke
US-12243725-B2 · Mar 4, 2025 · US
Recent patents
Latest publications not already listed above.
RF tuning systems including tuning circuits having impedances for setting and adjusting parameters of electrodes in electrostatic chucks
US-12217939-B2 · Feb 4, 2025 · US
Method and apparatus for radio frequency grid design in an esc to reduce film asymmetry
US-2025038034-A1 · Jan 30, 2025 · US
Process module chamber providing symmetric rf return path
US-2024371604-A1 · Nov 7, 2024 · US
Rf signal parameter measurement in an integrated circuit fabrication chamber
US-2024272210-A1 · Aug 15, 2024 · US
Depositing a carbon hardmask by high power pulsed low frequency rf
US-2024234091-A9 · Jul 11, 2024 · US
Rf signal parameter measurement in an integrated circuit fabrication chamber
US-2024203711-A1 · Jun 20, 2024 · US
RF signal parameter measurement in an integrated circuit fabrication chamber
US-11994542-B2 · May 28, 2024 · US
Depositing a carbon hardmask by high power pulsed low frequency rf
US-2024136153-A1 · Apr 25, 2024 · US
Control of wafer bow in multiple stations
US-2024055285-A1 · Feb 15, 2024 · US
Depositing a carbon hardmask by high power pulsed low frequency RF
US-11837441-B2 · Dec 5, 2023 · US
Control of wafer bow in multiple stations
US-11823928-B2 · Nov 21, 2023 · US
High temperature pedestal with extended electrostatic chuck electrode
US-2023369091-A1 · Nov 16, 2023 · US
Modular recipe controlled calibration (mrcc) apparatus used to balance plasma in multiple station system
US-2023245853-A1 · Aug 3, 2023 · US
Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system
US-11594397-B2 · Feb 28, 2023 · US
High temperature rf connection with integral thermal choke
US-2022415620-A1 · Dec 29, 2022 · US
Frequency based impedance adjustment in tuning circuits
US-2022375719-A1 · Nov 24, 2022 · US
High temperature RF connection with integral thermal choke
US-11469084-B2 · Oct 11, 2022 · US
Filter box for a substrate processing system
US-2022319810-A1 · Oct 6, 2022 · US
High selectivity, low stress, and low hydrogen diamond-like carbon hardmasks by high power pulsed low frequency rf
US-2022216037-A1 · Jul 7, 2022 · US
Systems and Methods of Anomalous Pattern Discovery and Mitigation
US-2022100857-A1 · Mar 31, 2022 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Lam Res Corp | 42 |
| Univ Brigham Young | 8 |
| Elasticsearch Bv | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/32183 | 25 |
| H01J37/32715 | 19 |
| H01J37/32174 | 18 |
| H10P14/6336 | 17 |
| H01J37/32577 | 16 |