Selective aluminum oxide film deposition

Patent metadata

Field	Value
Publication number	US-11450525-B2
Application number	US-201816131931-A
Country	US
Kind code	B2
Filing date	Sep 14, 2018
Priority date	Sep 14, 2018
Publication date	Sep 20, 2022
Grant date	Sep 20, 2022

Abstract

Methods of depositing films are described. Specifically, methods of depositing metal oxide films are described. A metal oxide film is selectively deposited on a metal layer relative to a dielectric layer by exposing a substrate to an organometallic precursor followed by exposure to an oxidant.

First claim

What is claimed is:

1. A method of depositing a film, the method comprising:
positioning a substrate having a metal layer and a dielectric layer in a processing chamber;
exposing the substrate, in the absence of trimethylaluminum (TMA), to an organometallic precursor to selectively deposit a metal film on the metal layer relative to the dielectric layer, the metal film comprising aluminum, the organometallic precursor comprising greater than 95% tri-tertbutylaluminum (TTBA) and less than 5% of one or more of bis(2-methyl-2-propanyl)-(2-methyl-1-propanyl)aluminum), (2-methyl-2-propanyl)bis(2-methyl-1-propanyl)aluminum), and tris(2-methyl-1-propanyl)aluminum);
purging the processing chamber of the organometallic precursor,
exposing the substrate to an oxidant to react with the metal film to form a metal oxide film on the metal layer, the metal oxide film comprising aluminum oxide; and
purging the processing chamber of the oxidant,
wherein the metal oxide film is deposited on the metal layer relative to the dielectric layer in a ratio greater than or equal to 5:1.

2. The method of claim 1 , wherein the dielectric layer comprises one or more of oxides, carbon doped oxides, porous silicon dioxide (SiO 2 ), silicon oxide (SiO), silicon nitride (SiN), carbides, oxycarbides, nitrides, oxynitrides, oxycarbonitrides, carbonitrides, polymers, phosphosilicate glass, fluorosilicate (SiOF) glass, or organosilicate glass (SiOCH).

3. The method of claim 1 , wherein the dielectric layer is substantially free of the metal oxide film.

4. The method of claim 1 , wherein the metal layer comprises one or more of cobalt (Co), tungsten (W), ruthenium (Ru), copper (Cu), nickel (Ni), manganese (Mn), silver (Ag), gold (Au), platinum (Pt), iron (Fe), molybdenum (Mo), or rhodium (Rh).

5. The method of claim 1 , wherein the substrate is maintained at a temperature in a range of from 100° C. to 500° C.

6. The method of claim 1 , wherein the pressure of the processing chamber is in a range of from 0.5 Torr to 10 Torr.

7. The method of claim 1 , wherein the oxidant comprises one or more of water, oxygen, tert-butyl alcohol, 3-butene-2-ol, 2-methyl-3-butene-2-ol, 2-phenyl-2-propanol, or R—OH where R comprises CF 3 or C 1-20 alkyl, C 1-20 aryl, C 1-20 alkenyl, or C 1-20 alkynyl.

8. The method of claim 1 , further comprising repeating the method to provide a metal oxide film having a thickness of from 0.5 to 10 nm.

9. The method of claim 1 , wherein purging the processing chamber of the organometallic precursor or the oxidant comprises flowing a purge gas over the substrate.

10. The method of claim 9 , wherein the purge gas is selected from one or more of Ar, N 2 , He, H 2 , or H 2 -containing gas.

11. A method of depositing a film, the method comprising selectively forming a metal oxide film in a process cycle comprising sequential exposure of a substrate, in the absence of trimethylaluminum (TMA), having a metal layer and a dielectric layer thereon to an organometallic precursor, purge gas, an oxidant, and purge gas, the metal oxide film comprising aluminum, the organometallic precursor comprising greater than 95% tri-tertbutylaluminum (TTBA) and less than 5% of one or more of bis (2-methyl-2-propanyl)-(2-methyl-1-propanyl)aluminum), (2-methyl-2-propanyl)bis(2-methyl-1-propanyl) aluminum), and tris (2-methyl-1-propanyl)aluminum); and
repeating the process cycle to selectively form a metal oxide film on the metal layer, the metal oxide film having a thickness of from 0.5 nm to 10 nm, and the dielectric layer substantially free of the metal oxide film.

12. The method of claim 11 , wherein the metal layer comprises one or more of cobalt (Co), tungsten (W), ruthenium (Ru), copper (Cu), nickel (Ni), manganese (Mn), silver (Ag), gold (Au), platinum (Pt), iron (Fe), molybdenum (Mo), or rhodium (Rh).

13. The method of claim 11 , wherein the oxidant comprises one or more of oxygen, tert-butyl alcohol, 3-butene-2-ol, 2-methyl-3-butene-2-ol, 2-phenyl-2-propanol, or R—OH where R comprises CF 3 or C 1-20 alkyl, C 1-20 aryl, C 1-20 alkenyl, or C 1-20 alkynyl.

14. A method of depositing a thin film, the method comprising:
selectively forming an aluminum oxide film in a process cycle comprising sequential exposure of a substrate, in the absence of trimethylaluminum (TMA), having a metal layer adjacent to a dielectric layer to an aluminum precursor, purge gas, oxidant, and purge gas, the aluminum precursor comprising greater than 95% tri-tertbutylaluminum (TTBA) and less than 5% of one or more of bis(2-methyl-2-propanyl)-(2-methyl-1-propanyl)aluminum), (2-methyl-2-propanyl)bis(2-methyl-1-propanyl)aluminum), and tris(2-methyl-1-propanyl)aluminum); and
repeating the process cycle to selectively form the aluminum oxide film on the metal layer, the aluminum oxide film having a thickness of from 2 nm to 10 nm, and the dielectric layer substantially free of aluminum oxide.

Assignees

• Applied Materials Inc

Inventors

• Wu Liqi
• Nguyen Hung
• Bhuyan Bhaskar Jyoti
• Saly Mark
• Liu Feng Q
• Thompson David

Classifications

• H10P14/69391

  the material containing aluminium, e.g. Al2O3 · CPC title

• H10P14/6314

  of a metallic layer · CPC title

• H10P14/668

  the materials being characterised by the deposition precursor materials · CPC title

• H10P14/6339 Primary

  deposition by cyclic CVD, e.g. ALD, ALE or pulsed CVD · CPC title

• H10P14/61

  using masks · CPC title