Drying process for high aspect ratio features

Patent metadata

Field	Value
Publication number	US-11424137-B2
Application number	US-201916417124-A
Country	US
Kind code	B2
Filing date	May 20, 2019
Priority date	Oct 4, 2015
Publication date	Aug 23, 2022
Grant date	Aug 23, 2022

Abstract

Embodiments described herein generally relate to a processing chamber incorporating a small thermal mass which enable efficient temperature cycling for supercritical drying processes. The chamber generally includes a body, a liner, and an insulation element which enables the liner to exhibit a small thermal mass relative to the body. The chamber is also configured with suitable apparatus for generating and/or maintaining supercritical fluid within a processing volume of the chamber.

First claim

What is claimed is:

1. A substrate processing method, comprising:
disposing a substrate in a device side down orientation on a substrate support in a processing chamber with a processing volume, wherein the substrate support is coupled to a door of the processing chamber, the processing chamber including:
a liner disposed within the processing chamber adjacent the processing volume; and
an insulation element disposed within the processing chamber and extending along a major axis of the processing volume, wherein the liner is in contact with the insulation element such that the liner is encased by the insulation element and separates the insulation element from the processing volume;

tilting the processing chamber with respect to gravity;
introducing a solvent to the processing volume in an amount to at least partially submerge the substrate;
moving a baffle plate from a raised position to a processing position adjacent to a non-device side of the substrate, wherein a device side of the substrate faces away from the baffle plate;
delivering liquid CO 2 to the processing volume and mixing the liquid CO 2 with the solvent;
delivering additional liquid CO 2 to the processing volume in an amount such that the entire processing volume is exchanged at least one time;
providing supercritical CO 2 to the processing volume; and
exposing the substrate to the supercritical CO 2.

2. The method of claim 1 , further comprising surrounding the substrate support with the liner having a thickness between about 2 mm and about 5 mm.

3. The method of claim 1 , wherein the solvent is selected from the group consisting of acetone, isopropyl alcohol, ethanol, methanol, N-methyl-2-pyrrolidone, N-methylformamide, 1,3-dimethyl-2-imidazolidinone, dimethylacetamide, and dimethyl sulfoxide.

4. The method of claim 1 , further comprising:
directing acoustic energy from a megasonic plate onto the non-device side of the substrate.

5. The method of claim 4 , further comprising:
exposing the substrate to a plasma process to remove contaminants from the substrate and release line stiction of device structures formed on the substrate.

6. A substrate processing method, comprising:
transferring a substrate in a device side down orientation on a substrate support into a processing chamber with a processing volume, wherein the substrate support is coupled to a door of the processing chamber, the processing chamber including:
a liner disposed within the processing chamber adjacent the processing volume; and
an insulation element disposed within the processing chamber and extending along a major axis of the processing volume, wherein the liner is in contact with the insulation element such that the liner is encased by the insulation element and separates the insulation element from the processing volume;

tilting the processing chamber with respect to gravity;
introducing a solvent to the processing volume in an amount to at least partially submerge the substrate;
positioning a baffle plate adjacent to a non-device side of the substrate, wherein a device side of the substrate faces away from the baffle plate;
providing supercritical CO 2 to the processing volume; and
exposing the substrate to the supercritical CO 2.

7. The method of claim 6 , wherein the baffle plate is moved toward the substrate support prior to providing the supercritical CO 2.

8. The method of claim 1 , further comprising providing a liquid comprising CO 2 to the processing chamber.

9. The method of claim 6 , further comprising surrounding the substrate support with the liner having a thickness between about 2 mm and about 5 mm.

10. The method of claim 9 , further comprising insulating the liner from the processing chamber.

11. The method of claim 6 , wherein the solvent is selected from the group consisting of acetone, isopropyl alcohol, ethanol, methanol, N-methyl-2- pyrrolidone, N-methylformamide, 1,3-dimethyl-2-imidazolidinone, dimethylacetamide, and dimethyl sulfoxide.

12. The method of claim 11 , wherein the providing supercritical CO 2 to the processing chamber further comprises:
cycling a temperature within the processing chamber between about 20 ° C. and about 50 ° C. in less than about 5 minutes.

13. A substrate processing method, comprising:
transferring a substrate from a substrate cassette to a wet cleaning chamber via a dry robot;
exposing a substrate to a de-ionized water cleaning process;
transferring the substrate to a solvent exchange chamber via a wet robot;
displacing residual de-ionized water from the substrate;
transferring the substrate to a supercritical fluid chamber with a chamber volume;
exposing the substrate to a supercritical fluid cleaning and drying process, the supercritical fluid cleaning and drying process comprising:
disposing a substrate in a device side down orientation on a substrate support in a processing chamber with a processing volume, wherein the substrate support is coupled to a door of the processing chamber, the processing chamber including:
a liner disposed within the processing chamber adjacent the processing volume; and
an insulation element disposed within the processing chamber and extending along a major axis of the processing volume, wherein the liner is

in contact with the insulation element such that the liner is encased by the insulation element and separates the insulation element from the processing volume;
tilting the processing chamber with respect to gravity;
introducing a solvent to the processing volume in an amount to at least partially submerge the substrate;
positioning a baffle plate adjacent to a non-device side of the substrate;

wherein a device side of the substrate faces away from the baffle plate;
providing supercritical fluid to the processing volume; and
exposing the substrate to the supercritical fluid;

transferring the substrate to a post processing chamber via the wet robot; and
exposing the substrate to a plasma process to remove contaminants from the substrate and release line stiction of device structures formed on the substrate.

14. The method of claim 13 , wherein the baffle plate is moved toward the substrate support prior to providing the supercritical fluid.

15. The method of claim 13 , further comprising providing a liquid comprising CO 2 to the processing chamber.

16. The method of claim 13 , wherein the providing supercritical fluid to the processing chamber further comprises:
cycling a temperature within the processing chamber between about 20 ° C. and about 50 ° C. in less than about 1 minute.

17. The method of claim 13 , further comprising surrounding the substrate support with the liner having a thickness between about 2 mm and about 5 mm.

18. The method of claim 17 , further comprising insulating the liner from the processing chamber.

19. The method of claim 13 , wherein the wet cleaning chamber is a horizontal spinning chamber.

20. The method of claim 19 , further comprising:
directing acoustic energy from a megasonic plate onto a non-device surface of the substrate disposed in the horizontal spinning chamber.

Assignees

• Applied Materials Inc

Inventors

• Gouk Roman
• Chen Han-Wen
• Verhaverbeke Steven
• Delmas Jean

Classifications

• H10P72/3306

  Horizontal transfer of a single workpiece · CPC title

• H10P72/0411

  for wet cleaning or washing · CPC title

• H10P72/33

  into and out of processing chamber · CPC title

• H10P72/7626

  characterised by the construction of the shaft · CPC title

• H10P72/0462

  characterised by the construction of the processing chambers, e.g. modular processing chambers · CPC title