Assembly for use in semiconductor photolithography and method of manufacturing same

Patent metadata

Field	Value
Publication number	US-11415893-B2
Application number	US-201816760357-A
Country	US
Kind code	B2
Filing date	Oct 5, 2018
Priority date	Oct 30, 2017
Publication date	Aug 16, 2022
Grant date	Aug 16, 2022

Abstract

An optical assembly and a method of making an optical assembly in which additive manufacturing techniques are used to form a support structure either directly on an optical element or on a carrier that is subsequently bonded to an optical element.

First claim

What is claimed is:

1. An article of manufacture comprising:
an optical component of a lithography apparatus, wherein the optical component has an optical surface; and
a mounting structure configured to support the optical component at the optical surface, the mounting structure comprising:
a transitional interface portion having a lattice structure formed on the optical surface of the optical component, and
a mechanical attachment region coupled to the transitional interface portion and arranged such that the optical component and the mechanical attachment region sandwich the transitional interface portion in a stacked manner and such that the mechanical attachment region does not extend closer to the optical surface than the transitional interface portion,
wherein the mounting structure and the transitional interface portion are configured to permit light to pass through them to impinge the optical surface of the optical component.

2. The article of claim 1 , wherein the optical component comprises an optical element comprising glass.

3. The article of claim 1 , wherein the optical component comprises an optical element comprising metal.

4. The article of claim 1 , wherein the optical component comprises an optical element comprising a ceramic material.

5. The article of claim 1 , wherein the optical component comprises an optical element comprising a composite material.

6. The article of claim 1 , wherein the optical component has an adhesion layer and the mounting structure is formed on the adhesion layer.

7. The article of claim 6 , wherein the adhesion layer has characteristics of a sputtered adhesion layer.

8. The article of claim 1 , wherein the mounting structure comprises a metallic material.

9. The article of claim 1 , wherein the mounting structure comprises a first metallic material and a second metallic material, and further comprises a first region comprising a higher concentration of first metallic material than the second metallic material, and a second region comprising a higher concentration of second metallic material than the first metallic material.

10. The article of claim 1 , wherein the mounting structure comprises a first nonmetallic material and a second metallic material and further comprises a first region comprising a higher concentration of first nonmetallic material than second metallic material and a second region comprising a higher concentration of second nonmetallic material than first metallic material.

11. The article of claim 10 , wherein the first nonmetallic material comprises a glass material.

12. The article of claim 1 , wherein the lattice structure comprises at least one flexure.

13. An article of manufacture comprising:
an optical element with an optical surface; and
a mounting structure configured to support the optical element at the optical surface, comprising:
a transitional interface portion having a lattice structure formed on the optical surface of the optical element, at a brazing interface, and
a mechanical attachment region coupled to the transitional interface portion and arranged such that the optical element and the mechanical attachment region sandwich the transitional interface portion in a stacked manner and such that the mechanical attachment region does not extend closer to the optical surface than the transitional interface portion,
wherein the mounting structure and the transitional interface portion are configured to permit light to pass through them to impinge the optical surface of the optical element.

14. The article of claim 13 , wherein the optical element has an adhesion layer and the mounting structure is adhered to the adhesion layer.

15. The article of claim 14 , wherein the adhesion layer has characteristics of a sputtered adhesion layer.

16. The article of claim 13 , wherein the lattice structure comprises at least one flexure.

17. An article of manufacture comprising:
a carrier with an optical element optically connected thereto, wherein the optical element has an optical surface; and
a mounting structure comprising:
a transitional interface portion having a lattice structure, and wherein the lattice structure is formed on the carrier and coupled to the optical surface, and
a mechanical attachment region coupled to the transitional interface portion and arranged such that the optical element and the mechanical attachment region sandwich the transitional interface portion in a stacked manner and such that the mechanical attachment region does not extend closer to the optical surface than the transitional interface portion,
wherein the mounting structure and the transitional interface portion are configured to permit light to pass through them to impinge the optical surface of the optical element.

18. The article of claim 17 , wherein the carrier comprises glass.

19. The article of claim 17 , wherein the carrier comprises a glass ceramic composite material.

20. The article of claim 17 , wherein the carrier comprises a ceramic material.

Assignees

• Asml Holding Nv

Inventors

• Roux Stephen
• Reed Christopher William

Classifications

• G03F7/7015 Primary

  Details of optical elements · CPC title

• G03F7/70141

  Illumination system adjustment, e.g. adjustments during exposure or alignment during assembly of illumination system · CPC title

• G03F7/70825

  Mounting of individual elements, e.g. mounts, holders or supports (workpiece or mask holders G03F7/707) · CPC title

• G02B7/181

  with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation · CPC title