Method and device for connecting an optical element to a frame

Patent metadata

Field	Value
Publication number	US-9604299-B2
Application number	US-201414199044-A
Country	US
Kind code	B2
Filing date	Mar 6, 2014
Priority date	Oct 24, 2006
Publication date	Mar 28, 2017
Grant date	Mar 28, 2017

Abstract

A method and a device for the material-fit connection of an optical element to a frame are disclosed.

First claim

What is claimed is:

1. A method, comprising:
providing an optical element within a frame, a metal layer being disposed between the optical element and the frame;
melting only one component selected from the group consisting of the metal layer and the frame; and
subsequently solidifying the component to connect the optical element with the frame,
wherein, after solidifying the component, the optical element is not in direct contact with the frame, and
wherein the component is the metal layer,
wherein:
the metal layer comprises an inner surface and an outer surface;
the outer surface is between the inner surface and the frame;
the method comprises melting the outer surface of the metal layer; and
the inner surface of the metal layer is unmelted when the outer surface of the metal layer is melted.

2. The method of claim 1 , wherein the metal layer has a diameter of about 0.1-1.5 mm.

3. The method of claim 1 , wherein the metal layer has a thickness of about 0.3-2 mm.

4. The method of claim 1 , comprising using a laser to melt the component.

5. The method of claim 1 , wherein the metal layer is on an optically inactive surface of the optical element.

6. The method of claim 1 , wherein the optical element and the frame are in mechanical contact with one another via at least three connection positions through non-molten regions of the metal layer during each instant of the melting and subsequent solidification of the metal layer.

7. The method of claim 1 , wherein the optical element and the frame are in mechanical contact with one another via at least three connection positions that extend through regions of the molten metal during each instant of melting the metal.

8. A method, comprising:
providing an optical element within a frame, a material being between the optical element and the frame, the material comprising a metal; and
connecting the optical element with the frame by melting the material and subsequently solidifying the material,
wherein the material comprises an admixture to increase a mechanical stability of the connection of the optical element with the frame, and the admixture comprises at least one material selected from the group consisting of an oxide, a nitride, a boride and a carbide, and
wherein:
the material comprises an inner surface and an outer surface;
the outer surface is between the inner surface and the frame;
the method comprises melting the outer surface of the material; and
the inner surface of the material is unmelted when the outer surface of the material is melted.

9. The method of claim 8 , wherein the admixture comprises a dispersoid.

10. The method of claim 8 , wherein the admixture comprises a dispersoid comprising a zerodur powder.

11. The method of claim 8 , wherein, after solidifying the material, the admixture comprises an intermetallic phase.

12. The method of claim 11 , wherein the intermetallic phase comprises phosphorus.

13. The method of claim 8 , wherein the admixture comprises at least one material selected from the group consisting of microfibers and nanotubes.

14. The method of claim 8 , wherein the metal comprises a metal selected from the group consisting of tin, bismuth, antimony, indium, gold, silver and palladium.

15. The method of claim 8 , wherein the material comprises a solder.

16. The method of claim 8 , wherein the optical element and the frame are in mechanical contact with one another via at least three connection positions through non-molten regions of the material during each instant of the local melting and subsequent solidification of the material.

17. The method of claim 8 , wherein, after solidifying the material, the optical element is not in direct contact with the frame.

18. The method of claim 8 , wherein the optical element and the frame are in mechanical contact with one another via at least three connection positions that extend through regions of the molten metal during each instant of melting the metal.

19. A method, comprising:
providing an optical element within a frame, a metal layer being between the optical element and the frame;
using a laser to melt the metal layer and the frame; and
subsequently solidifying the metal layer and the frame to connect the optical element with the frame,
wherein:
the optical element and the frame are in mechanical contact with one another via at least three connection positions through non-molten regions of the metal layer and the frame during each instant of the local melting and subsequent solidification of the material; and
after solidifying the metal layer and the frame, the optical element is not in direct contact with the frame; and

wherein:
the metal layer comprises an inner surface and an outer surface;
the outer surface is between the inner surface and the frame;
the method comprises melting the outer surface of the metal layer; and
the inner surface of the metal layer is unmelted when the outer surface of the material is melted.

20. The method of claim 19 , wherein the metal layer comprises a flux-free material.

21. The method of claim 19 , wherein melting and solidifying are performed without forming an oxide.

22. The method of claim 19 , wherein the optical element and the frame are in mechanical contact with one another via at least three connection positions that extend through regions of the molten metal during each instant of melting the metal.

Assignees

• Zeiss Carl Smt Gmbh

Inventors

• Schoeppach Armin
• Rau Johnannes
• Fedosenko Gennady
• Gorkhover Leonid
• Klose Gerd
• Wiesner Stefan
• Trefz Hans-Joachim
• Widmann Michael
• Bingel Ulrich
• Ekstein Claudia
• Albrecht Guenter

Classifications

• G03F7/70825

  Mounting of individual elements, e.g. mounts, holders or supports (workpiece or mask holders G03F7/707) · CPC title

• Y10T156/10

  Methods of surface bonding and/or assembly therefor · CPC title

• G02B7/025

  using glue · CPC title

• B23K1/0008

  specially adapted for particular articles or work · CPC title

• G02B7/02

  for lenses {(supports for magnifying lenses G02B25/002)} · CPC title