Optical assembly having a thermally conductive component

Patent metadata

Field	Value
Publication number	US-10509336-B2
Application number	US-201715604837-A
Country	US
Kind code	B2
Filing date	May 25, 2017
Priority date	Dec 3, 2014
Publication date	Dec 17, 2019
Grant date	Dec 17, 2019

Abstract

An optical assembly includes: an optical element, which is transmissive or reflective to radiation at a used wavelength and has an optically used region; and a thermally conductive component, which is arranged outside the optically used region of the optical element. The thermally conductive component can include a material having a thermal conductivity of more than 500 W m −1 K −1 . Additionally or alternatively, the product of the thickness of the thermally conductive component in millimeters and the thermal conductivity of the material of the thermally conductive component is at least 1 W mm m −1 K −1 .

First claim

What is claimed is:

1. An optical assembly, comprising:
an optical element that is transmissive or reflective to radiation at a used wavelength, the optical element having an optically used region; and
a thermally conductive component arranged outside the optically used region of the optical element,
wherein at least one of the following holds:
the thermally conductive component comprises a material with a thermal conductivity of more than 500 W m −1 K −1 ; and
a product of a thickness of the thermally conductive component in millimeters and the thermal conductivity of the material is greater than 1 W mm m −1 K −1 , and

wherein at least one of the following holds:
the material comprises carbon nanotubes;
the material comprises a woven fabric;
the thermally conductive component is connected to the optical element at a connection having a heat transfer coefficient of less than 1000 W m −2 K −1 ; and
the thermally conductive component is connected to the optical element via a material having a thermal conductivity of less than 1 W m −1 K −1 .

2. The optical assembly of claim 1 , wherein the material has a thermal conductivity of more than 500 W m −1 K −1 .

3. The optical assembly of claim 1 , wherein the material has a thermal conductivity of more than 1000 W m −1 K −1 .

4. The optical assembly of claim 1 , wherein the material has a thermal conductivity of more than 1700 W m −1 K −1 .

5. The optical assembly of claim 1 , wherein the material has a thermal conductivity of more than 2000 W m −1 K −1 .

6. The optical assembly of claim 1 , wherein the product of a thickness of the thermally conductive component in millimeters and the thermal conductivity of the material is greater than 1 W mm m −1 K −1 .

7. The optical assembly of claim 1 , wherein the product of a thickness of the thermally conductive component in millimeters and the thermal conductivity of the material is greater than 10 W mm m −1 K −1 .

8. The optical assembly of claim 1 , wherein the product of a thickness of the thermally conductive component in millimeters and the thermal conductivity of the material is greater than 50 W mm m −1 K −1 .

9. The optical assembly of claim 1 , wherein the material comprises polycrystalline diamond and/or monocrystalline diamond.

10. The optical assembly of claim 1 , wherein the material comprises carbon nanotubes.

11. The optical assembly of claim 1 , wherein the material comprises a CVD material.

12. The optical assembly of claim 1 , wherein the thickness of the thermally conductive component is less than 500 μm.

13. The optical assembly of claim 1 , wherein the material comprises a metal.

14. The optical assembly of claim 13 , wherein the material comprises an electroformed material.

15. The optical assembly of claim 1 , wherein the material comprises a woven fabric.

16. The optical assembly of claim 1 , wherein the material comprises a woven fabric, and the woven fabric comprises a metallic material and/or a carbon compound.

17. The optical assembly of claim 1 , wherein the thermally conductive component is connected to the optical element.

18. The optical assembly of claim 1 , wherein the thermally conductive component is connected to the optical element over at least one surface area at at least one isolated point.

19. The optical assembly of claim 1 , wherein the thermally conductive component is connected to the optical element at a connection having a heat transfer coefficient of less than 1000 W m −2 K −1 .

20. The optical assembly of claim 19 , wherein the material comprises a member selected from the group consisting of carbon nanotubes and a woven fabric.

21. The optical assembly of claim 1 , wherein the thermally conductive component is connected to the optical element via a material having a thermal conductivity of less than 1 W m −1 K −1 .

22. The optical assembly of claim 21 , wherein the material comprises a member selected from the group consisting of carbon nanotubes and a woven fabric.

23. The optical assembly of claim 1 , wherein the thermally conductive component is connected to the optical element via a friction-locked connection.

24. The optical assembly of claim 1 , wherein the thermally conductive component is arranged at a distance from the optical element.

25. The optical assembly of claim 1 , wherein the thermally conductive component is arranged at a distance from the optical element, and the distance is between 100 μm and 1000 μm.

26. The optical assembly of claim 1 , wherein the optical element is selected from the group consisting of a lens, a mirror, a plane-parallel plate and a microstructured element.

27. The optical assembly of claim 1 , wherein the optical element comprises a material selected from the group consisting of quartz glass, crystalline quartz, a fluoride crystal, titanium-doped quartz glass, a glass ceramic, and a metal.

28. The optical assembly of claim 1 , further comprising a heat source, wherein at least one side of the thermally conductive component is connected to the heat source.

29. The optical assembly of claim 28 , wherein the heat source is a component configured so that current flows therethrough.

30. The optical assembly of claim 1 , further comprising a heat sink, wherein at least one side of the thermally conductive component is connected to the heat sink.

31. The optical assembly of claim 30 , wherein the heat sink is a cooler configured so that a gas or a liquid flow therethrough.

32. The optical assembly of claim 1 , further comprising a light source configured to emit radiation, wherein the optical assembly is configured so that, during use of the optical assembly, at least part of the thermally conductive component absorbs the radiation emitted by the light source.

33. The optical assembly of claim 1 , further comprising an immersion fluid, wherein the optical assembly is configured so that, during use of the optical assembly, at least part of the thermally conductive component is in contact with the immersion fluid.

34. The optical assembly of claim 1 , wherein
the thermal conductivity of the material is more than 500 W m −1 K −1 ; and
the product of a thickness of the thermally conductive component in millimeters and the thermal conductivity of the material is greater than 1 W mm m −1 K −1 .

Assignees

• Zeiss Carl Smt Gmbh

Inventors

• Kaller Julian
• Sorg Franz
• Winter Ralf
• Weissenrieder Karl-Stefan

Classifications

• G02B7/181

  with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation · CPC title

• G03F7/70891

  Temperature · CPC title

• G03F7/70341

  Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply (chemical composition of immersion liquids G03F7/2041) · CPC title

• G02B7/1815

  with cooling or heating systems (cooling arrangements for laser mirrors H01S3/0401) · CPC title

• G02B7/028 Primary

  with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation · CPC title