Vacuum pump, and control device of vacuum pump

Patent metadata

Field	Value
Publication number	US-11415151-B2
Application number	US-201916967889-A
Country	US
Kind code	B2
Filing date	Feb 8, 2019
Priority date	Feb 16, 2018
Publication date	Aug 16, 2022
Grant date	Aug 16, 2022

Abstract

To provide a vacuum pump capable of efficiently cooling electrical equipment. The vacuum pump includes a pump main body and an electrical equipment case disposed outside the pump main body, wherein the electrical equipment case includes a cooling jacket which has an inner surface and an outer surface in a vertical portion and in which a cooling medium flow passage is formed, and a plurality of electrical equipment that have circuit components and can be cooled by the cooling jacket. The inner surface and the outer surface are formed facing different directions, and the electrical equipment portions are attached respectively to the inner surface and the outer surface so that heat can be transferred.

First claim

What is claimed is:

1. A vacuum pump, comprising:
a pump main body; and
a control device disposed outside the pump main body, wherein
the control device includes a casing, a cooling portion which has a plurality of cooling surfaces and in which a cooling medium flow passage is formed, and a plurality of electrical component portions that have heat generating components and is capable of being cooled by the cooling portion,
the cooling portion has a T-shaped cross section, and
the plurality of cooling surfaces are formed facing different directions inside of the casing, and the plurality of electrical component portions are attached to the plurality of cooling surfaces respectively so that heat can be transferred and so that at least a portion of the cooling medium flow passage is between the plurality of electrical component portions.

2. The vacuum pump according to claim 1 , wherein
the plurality of electrical component portions have a circuit board that has the heat generating components mounted thereon and is fixed to the plurality of cooling surface, and
at least one of the plurality of electrical component portions is provided with a mold portion that covers the circuit board and the heat generating components at least partially.

3. The vacuum pump according to claim 1 , wherein the control device is divided into a plurality of housing spaces by the cooling portion, and each of the housing spaces includes at least one of the plurality of electrical component portions.

4. A control device of a vacuum pump, comprising:
a casing;
a cooling portion which has a plurality of cooling surfaces and in which a cooling medium flow passage is formed, wherein a portion of the cooling portion has a concave shape that matches an exterior shape of a side of the vacuum pump; and
a plurality of electrical component portions that have heat generating components and can be cooled by the cooling portion, wherein
the cooling portion has a T-shaped cross section, and
the plurality of cooling surfaces are formed facing different directions inside of the casing, and the plurality of electrical component portions are attached to the plurality of cooling surfaces respectively so that heat can be transferred and so that at least a portion of the cooling medium flow passage is between the plurality of electrical component portions.

Assignees

• Edwards Japan Ltd

Inventors

• Sun Yanbin

Classifications

• F04D25/068

  Mechanical details of the pump control unit (pump control details F04D27/00) · CPC title

• F28D9/0081

  the conduits for one heat-exchange medium being formed by a single plate-like element (F28D9/0012 takes precedence); the conduits for one heat-exchange medium being integrated in one single plate-like element (F28D9/0012 takes precedence) · CPC title

• F04D29/5813 Primary

  Cooling the control unit · CPC title

• F04D19/04

  specially adapted to the production of a high vacuum, e.g. molecular pumps · CPC title

• F04B37/16

  Means for nullifying unswept space · CPC title