Calibration method and terminal equipment of terahertz frequency band on-wafer S parameter

Patent metadata

Field	Value
Publication number	US-11385175-B2
Application number	US-202017123823-A
Country	US
Kind code	B2
Filing date	Dec 16, 2020
Priority date	Dec 17, 2019
Publication date	Jul 12, 2022
Grant date	Jul 12, 2022

Abstract

A calibration method includes: acquiring eight error models obtained after a preliminary calibration of a Terahertz frequency band system; based on the eight error models, determining a first mathematical model according to a first S parameter related to a first calibration piece, the first mathematical model comprising parallel crosstalk terms between probes, and determining a second mathematical model according to a second S parameter related to a second calibration piece, the second mathematical model comprising series crosstalk terms between the probes; determining a third mathematical model according to a third S parameter related to a measured piece; and solving and obtaining a Z parameter of the measured piece based on the first mathematical model, the second mathematical model and the third mathematical model, and acquiring an S parameter of the measured piece according to the Z parameter of the measured piece.

First claim

What is claimed is:

1. A calibration method of Terahertz frequency band on-wafer S parameter, comprising:
acquiring eight error models obtained after a preliminary calibration of a Terahertz frequency band system;
acquiring a first S parameter based on a first calibration piece on the basis of the eight error models, and determining a first mathematical model according to the first S parameter, the first mathematical model comprising parallel crosstalk terms between probes;
acquiring a second S parameter based on a second calibration piece on the basis of the eight error models, and determining a second mathematical model according to the second S parameter, the second mathematical model comprising series crosstalk terms between the probes;
acquiring a third S parameter based on a measured piece on the basis of the eight error models, and determining a third mathematical model according to the third S parameter, the third mathematical model comprising a Z parameter of the measured piece;
obtaining the Z parameter of the measured piece based on the first mathematical model, the second mathematical model and the third mathematical model; and
calibrating an S parameter of the measured piece according to the Z parameter of the measured piece; and
wherein acquiring the first S parameter based on the first calibration piece on the basis of the eight error models, and determining the first mathematical model according to the first S parameter comprises:
generating a first equivalent circuit model corresponding to the first calibration piece based on the first calibration piece;
acquiring the first S parameter of the first calibration piece according to the eight error models;
converting the first S parameter into a first Y parameter; and
determining the first mathematical model according to the first Y parameter and the first equivalent circuit model, wherein the first mathematical model is represented as Y Total OPN =Y PAD +Y P , Y Total OPN is the first Y parameter, Y PAD is a PAD (pad) parallel parasitic parameter, and Y p is the parallel crosstalk terms between the probes.

2. The calibration method according to claim 1 , wherein the first calibration piece is an open-open calibration piece, and the second calibration piece is a short-short calibration piece.

3. The calibration method according to claim 1 , wherein acquiring the second S parameter based on the second calibration piece on the basis of the eight error models, and determining the second mathematical model according to the second S parameter comprises:
generating a second equivalent circuit model corresponding to the second calibration piece based on the second calibration piece;
acquiring the second S parameter of the second calibration piece obtained by measurement according to the eight error models;
converting the second S parameter into a second Y parameter; and
determining the second mathematical model according to the second Y parameter and the second equivalent circuit model.

4. The calibration method according to claim 3 , wherein the first calibration piece is an open-open calibration piece, and the second calibration piece is a short-short calibration piece.

5. The calibration method according to claim 3 , wherein, the second mathematical model is represented as Y Total SHORT =Y PAD +Y P +(Z S +Z L ) −1 , wherein Y Total SHORT is the second Y parameter, Y PAD is the PAD parallel parasitic parameter, Y P is the parallel crosstalk terms between the probes, Z S is the series crosstalk terms between the probes, and Z L is a series parasitic parameter of a PAD intraconnection.

6. The calibration method according to claim 5 , wherein the first calibration piece is an open-open calibration piece, and the second calibration piece is a short-short calibration piece.

7. The calibration method according to claim 1 , wherein acquiring the third S parameter based on the measured piece on the basis of the eight error models, and determining the third mathematical model according to the third S parameter comprises:
generating a third equivalent circuit model corresponding to the measured piece based on the measured piece;
acquiring the third S parameter of the measured piece obtained by measurement according to the eight error models;
converting the third S parameter into a third Y parameter; and
determining the third mathematical model according to the third Y parameter and the third equivalent circuit model.

8. The calibration method according to claim 7 , wherein the first calibration piece is an open-open calibration piece, and the second calibration piece is a short-short calibration piece.

9. The calibration method according to claim 7 , wherein, the third mathematical model is represented as Y Total DUT =Y P +Y PAD +S+Z L +Z DUT ) −1 , wherein Y Total DUT is the third Y parameter, Y P is the parallel crosstalk terms between the probes, Y PAD is the PAD parallel parasitic parameter, Z S is the series crosstalk terms between the probes, Z L is a series parasitic parameter of a PAD intraconnection, and Z DUT is the Z parameter of the measured piece.

10. The calibration method according to claim 9 , wherein the first calibration piece is an open-open calibration piece, and the second calibration piece is a short-short calibration piece.

11. The calibration method according to claim 1 , wherein the first calibration piece is an open-open calibration piece, and the second calibration piece is a short-short calibration piece.

12. A terminal equipment comprising a non-transitory memory, a processor and a computer program stored in the memory and executable on the processor, wherein the processor, when executing the computer program, causes the terminal equipment to perform:
acquiring eight error models obtained after a preliminary calibration of a Terahertz frequency band system;
acquiring a first S parameter based on a first calibration piece on the basis of the eight error models, and determining a first mathematical model according to the first S parameter, the first mathematical model comprising parallel crosstalk terms between probes;
acquiring a second S parameter based on a second calibration piece on the basis of the eight error models, and determining a second mathematical model according to the second S parameter, the second mathematical model comprising series crosstalk terms between the probes;
acquiring a third S parameter based on a measured piece on the basis of the eight error models, and determining a third mathematical model according to the third S parameter, the third mathematical model comprising a Z parameter of the measured piece;
obtaining the Z parameter of the measured piece based on the first mathematical model, the second mathematical model and the third mathematical model, and
calibrating an S parameter of the measured piece according to the Z parameter of the measured piece; and
wherein acquiring the first S parameter based on the first calibration piece on the basis of the eight error models, and determining the first mathematical model according to the first S parameter comprises:
generating a first equivalent circuit model corresponding to the first calibration piece based on the first calibration piece;
acquiring the first S parameter of the first calibration piece according to the eight error models;
converting the first S parameter into a first Y parameter; and
determining the first mathematical model according to the first Y parameter and the first equivalent circuit model, wherein the first mathematical model is represented as Y Total OPN =Y PAD +Y p , Y Total OPN is the first Y parameter, Y PAD is a PAD (pad) parallel parasi

Assignees

• The 13Th Research Institute Of China Electronics Tech Group Corporation

Inventors

• Wang Yibang
• Wu Aihua
• Liang Faguo
• Liu Chen
• Luan Peng
• Huo Ye
• Sun Jing
• Li Yanli

Classifications

• G01N27/026

  Dielectric impedance spectroscopy (electrochemical impedance spectroscopy for measuring corrosion G01N17/02) · CPC title

• G01R31/2879

  related to electrical aspects, e.g. to voltage or current supply or stimuli or to electrical loads · CPC title

• G01N21/3586 Primary

  by Terahertz time domain spectroscopy [THz-TDS] · CPC title

• G01N21/3563

  for analysing solids; Preparation of samples therefor · CPC title

• G01N2021/3568

  applied to semiconductors, e.g. Silicon · CPC title