Method for forming a planar, closed loop magnetic structure
US-10600566-B2 · Mar 24, 2020 · US
US11342115B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11342115-B2 |
| Application number | US-201916560132-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 4, 2019 |
| Priority date | Oct 13, 2016 |
| Publication date | May 24, 2022 |
| Grant date | May 24, 2022 |
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A planar magnetic structure includes a closed loop structure having a plurality of core segments divided into at least two sets. A coil is formed about one or more core segments. A first antiferromagnetic layer is formed on a first set of core segments, and a second antiferromagnetic layer is formed on a second set of core segments. The first and second antiferromagnetic layers include different blocking temperatures and have an easy axis pinning a magnetic moment in two different directions, wherein when current flows through the coil, the magnetic moments rotate to form a closed magnetic loop in the closed loop structure.
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What is claimed is: 1. A planar magnetic structure, comprising: a closed loop structure having a plurality of core segments divided into at least two sets; a coil formed about at least one core segment; and a first antiferromagnetic layer formed on a first set of core segments and a second antiferromagnetic layer formed on a second set of core segments, the first and second antiferromagnetic layers including different blocking temperatures and having an easy axis pinning a magnetic moment in at least two different directions, wherein when a current flows through the coil, the magnetic moments rotate to form a closed magnetic loop in the closed loop structure. 2. The magnetic structure as recited in claim 1 , wherein the at least two different directions are orthogonal to one another. 3. The magnetic structure as recited in claim 1 , wherein the magnetic moments rotate to follow a contour of the closed loop structure when the current flows through the coil. 4. The magnetic structure as recited in claim 1 , wherein the coil includes a single coil wound about at least two core segments. 5. The magnetic structure as recited in claim 1 , wherein the coil includes two coils wound about two core segments to form coupled inductors. 6. The magnetic structure as recited in claim 1 , wherein the closed loop structure includes ferromagnetic material in contact with the first and second antiferromagnetic layers. 7. The magnetic structure as recited in claim 1 , wherein the closed loop structure includes a uniaxial anisotropy in each core segment and includes a high permeability direction around the closed loop structure when the coil is energized. 8. The magnetic structure as recited in claim 1 , wherein the first and second sets of the at least two core segments are arranged with two core segments of each set oriented in parallel with each other and the coil formed on one set of the core segments. 9. A planar magnetic structure, comprising: a first antiferromagnetic layer at a first blocking temperature for a closed magnetic loop to define a first pin direction for first magnetic moments on first opposing core segments of the closed magnetic loop; a second antiferromagnetic layer at a second blocking temperature lower than the first blocking temperature for the closed magnetic loop to define a second pin direction different from the first pin direction for second magnetic moments on second opposing core segments of the closed magnetic loop, wherein the second opposing surfaces are orientated perpendicular to the first opposing surfaces; and a coil around each of the first and second opposing core segments of the closed magnetic loop such that when the coil is energized the first and second magnetic moments rotate to follow a contour of the closed magnetic loop. 10. The magnetic structure as recited in claim 9 , wherein the first and second pin directions are orthogonal to one another. 11. The magnetic structure as recited in claim 9 , wherein the coil includes a single coil wound about at least two core segments of the first and second opposing core segments. 12. The magnetic structure as recited in claim 9 , wherein the coil includes two separate coils wound about two core segments to form coupled inductors. 13. The magnetic structure as recited in claim 9 , wherein the first and second antiferromagnetic layers are formed in contact with a ferromagnetic material that forms a core of the closed magnetic loop. 14. The magnetic structure as recited in claim 9 , wherein the closed magnetic loop includes a uniaxial anisotropy in each core segment of the first and second opposing core segments and includes a high permeability direction around the closed magnetic loop structure when the coil is energized. 15. The magnetic structure as recited in claim 9 , wherein the closed magnetic loop includes four sides with the first and second opposing core segments including a same antiferromagnetic material. 16. The magnetic structure as recited in claim 9 , wherein the closed magnetic loop is formed on a substrate and the coil is formed using vias and metal lines formed by semiconductor patterning processes. 17. A planar magnetic structure, comprising: a planar, closed loop ferromagnetic core having four sides; a first antiferromagnetic layer on two opposing sides of the ferromagnetic core having a first blocking temperature to define a first pin direction for first magnetic moments; a second antiferromagnetic layer on two other opposing sides of the ferromagnetic core having a second blocking temperature, which is lower than the first blocking temperature to define a second pin direction for second magnetic moments; and a coil around at least one core segment of the closed loop ferromagnetic core such that when the coil is energized the first and second magnetic moments rotate to follow a contour of the closed loop ferromagnetic core. 18. The magnetic structure as recited in claim 17 , wherein the coil includes a single coil wound about at least two core segments. 19. The magnetic structure as recited in claim 17 , wherein the coil includes two separate coils wound about two core segments to form coupled inductors. 20. The magnetic structure as recited in claim 19 , wherein the closed magnetic loop includes uniaxial anisotropy in each of the two core segments and includes a high permeability direction around the closed loop ferromagnetic core when the coil is energized.
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