Flexible electric probe

Patent metadata

Field	Value
Publication number	US-11340261-B2
Application number	US-201816483153-A
Country	US
Kind code	B2
Filing date	Feb 2, 2018
Priority date	Feb 2, 2017
Publication date	May 24, 2022
Grant date	May 24, 2022

Abstract

A flexible electric probe can include: a flexible substrate; and probe line conductors on the flexible substrate, the probe line conductors being essentially parallel to each other and having separations of about 5-50 microns. The flexible electric probe can further include connection conductors on the flexible substrate, the connection conductors and the probe line conductors electrically connected to each other, the probe line conductors positioned in first and second offset patterns with regard to the connection conductors.

First claim

What is claimed is:

1. A flexible electric probe comprising:
a flexible substrate; and
probe line conductors on the flexible substrate, the probe line conductors being essentially parallel to each other and having separations of about 5-50 microns, wherein the probe line conductors include at least first, second, third, and fourth probe line conductors, the flexible electric probe configured to use the first through fourth probe line conductors as a four-point probe by injecting current in the first probe line conductor and removing current through the second probe line conductor, and by measuring voltage using the third and fourth probe line conductors.

2. The flexible electric probe of claim 1 , further comprising connection conductors on the flexible substrate, the connection conductors and the probe line conductors electrically connected to each other, the probe line conductors positioned in first and second offset patterns with regard to the connection conductors.

3. The flexible electric probe of claim 2 , wherein the first offset pattern comprises that each probe line conductor of the probe line conductors is offset lengthwise with regard to an adjacent probe line conductor of the probe line conductors.

4. The flexible electric probe of claim 2 , wherein at least one probe line conductor of the probe line conductors has a corresponding connection conductor of the connection conductors terminating at each of respective ends of the at least one probe line conductor.

5. The flexible electric probe of claim 1 , wherein the flexible substrate comprises a polyimide material.

6. The flexible electric probe of claim 1 , wherein the separations are about 20-30 microns.

7. A flexible electric probe comprising:
a flexible substrate;
probe line conductors on the flexible substrate, the probe line conductors being essentially parallel to each other and having separations of about 5-50 microns; and
connection conductors on the flexible substrate, the connection conductors and the probe line conductors electrically connected to each other, the probe line conductors positioned in first and second offset patterns with regard to the connection conductors, wherein the connection conductors are positioned on a first side of the flexible substrate, wherein the probe line conductors are positioned on a second side of the flexible substrate, and wherein the connection conductors and the probe line conductors are connected to each other through vias formed in the flexible substrate.

8. The flexible electric probe of claim 7 , wherein the vias are positioned on alternating sides of the probe line conductors.

9. The flexible electric probe of claim 7 , wherein an intermediate probe line conductor of the probe line conductors is positioned between two probe line conductors of the probe line conductors that terminate at adjacent vias, and wherein the first offset pattern comprises that the intermediate probe line conductor is offset with regard to the two probe line conductors.

10. The flexible electric probe of claim 7 , wherein the second offset pattern comprises that each of the probe line conductors terminates at a corresponding via of the vias using a respective termination location of multiple types of termination locations.

11. The flexible electric probe of claim 10 , wherein the types of termination locations include: a first side of the via, a center of the via, and a second side of the via opposite the first side, and wherein the second offset pattern comprises that a first set of the vias use the termination locations of the first side of the via and the center of the via.

12. The flexible electric probe of claim 11 , wherein the second offset pattern further comprises that a second set of the vias use the termination locations of the center of the via and the second side of the via.

13. The flexible electric probe of claim 7 , wherein the probe line conductors include a first set of probe line conductors, and wherein the flexible electric probe further comprises multiple sets of probe line conductors on the second side of the flexible substrate.

14. The flexible electric probe of claim 13 , wherein each set of probe line conductors of the multiple sets of probe line conductors comprises four probe line conductors.

15. An apparatus comprising:
a fixture; and
a flexible electric probe mounted on the fixture, the flexible electric probe comprising:
a flexible substrate;
probe line conductors on the flexible substrate including at least a first probe line conductor, the probe line conductors being essentially parallel to each other and having separations of about 5-50 microns; and
connection conductors including at least a first connection conductor, the connection conductors and the probe line conductors electrically connected to each other, the first connection conductor electrically connected to the first probe line conductor, the first connection conductor having a greater width than the first probe line conductor, wherein the first probe line conductor terminates at a side of the first connection conductor, the probe line conductors positioned in first and second offset patterns with regard to the connection conductors,
wherein the second offset pattern comprises at least that the first probe line conductor terminates at the side of the first connection conductor,
wherein the connection conductors are positioned on a first side of the flexible substrate, wherein the probe line conductors are positioned on a second side of the flexible substrate, and
wherein the connection conductors and the probe line conductors are connected to each other through vias formed in the flexible substrate.

16. The apparatus of claim 15 , wherein at least one probe line conductor of the probe line conductors has a corresponding connection conductor of the connection conductors terminating at each of respective ends of the at least one probe line conductor.

17. The apparatus of claim 15 , further comprising a force gauge that provides a force feedback loop in the apparatus.

18. The apparatus of claim 15 , wherein the fixture includes a rounded surface on which at least part of the flexible electric probe is mounted.

19. The apparatus of claim 18 , wherein the fixture has a D shape including a plane surface between rounded surfaces, and wherein the flexible electric probe is mounted on the rounded surfaces and on the plane surface, such that at least the probe line conductors are aligned with the plane surface.

20. The apparatus of claim 18 , wherein the fixture comprises an annular fixture, and wherein the flexible electric probe is mounted on a periphery of the annular fixture.

21. The apparatus of claim 20 , further comprising a shaft through the annular fixture.

22. The apparatus of claim 20 , wherein the flexible electric probe extends essentially around the periphery, and wherein the probe line conductors extend essentially around the periphery.

23. The apparatus of claim 20 , the apparatus comprising multiple flexible electric probes including the flexible electric probe, the multiple flexible electric probes positioned on the periphery.

24. An apparatus comprising:
a fixture;
a flexible electric probe mounted on the fixture, the flexible electric probe comprising:
a flexible substrate; and
probe line conductors on the flexible substrate, the probe line conductors being essentially parallel to each other and having separations of about 5-50 microns; an

Assignees

• Brigham Young Univ Byu
• Univ Brigham Young

Inventors

• Mazzeo Brian A
• Vogel John
• Wheeler Dean
• Hardy Emilee
• Clement Derek

Classifications

• G01R1/0735 Primary

  arranged on a flexible frame or film · CPC title