Method of purifying target material for an EUV light source
US-11317501-B2 · Apr 26, 2022 · US
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Vaschenko Georgiy patents
Vaschenko Georgiy is listed as an inventor on 5 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Vaschenko Georgiy |
| Total patents | 5 |
| First publication | Jul 4, 2017 |
| Latest publication | Apr 26, 2022 |
Notable patents
Publications ranked by popularity score, then publication date.
Method and apparatus for purifying target material for euv light source
US-2020015343-A1 · Jan 9, 2020 · US
Method and apparatus for purifying target material for EUV light source
US-10455680-B2 · Oct 22, 2019 · US
Method and apparatus for purifying target material for euv light source
US-2017247778-A1 · Aug 31, 2017 · US
Method of and apparatus for supply and recovery of target material
US-9699876-B2 · Jul 4, 2017 · US
Recent patents
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Asml Netherlands Bv | 6 |
Top CPC classifications
Most common classification codes across this inventor's patents.