Hermetic housing comprising a getter, optoelectronic component or MEMS device incorporating such a hermetic housing and associated production method

Patent metadata

Field	Value
Publication number	US-11305983-B2
Application number	US-201917279006-A
Country	US
Kind code	B2
Filing date	Sep 27, 2019
Priority date	Nov 8, 2018
Publication date	Apr 19, 2022
Grant date	Apr 19, 2022

Abstract

A hermetic housing is disclosed (10a) for an optoelectronic component (11) or a MEMS device configured to form an enclosure (12) within which a low pressure or vacuum prevails. The hermetic housing includes: an optical window (14) transparent for at least one wavelength of interest (λ); and a layer of a getter material (15a) configured to capture gases present in said enclosure and deposited on the optical window opposite the enclosure. This layer of getter material has a thickness (e_t), greater than 60 nanometers, and a porosity (P) in the range from 10 to 70% to satisfy the following relation: (1−P)*e_t<λ/2πk with λ corresponding to the at least one wavelength of interest, and k corresponding to the extinction coefficient of the material of the layer of getter material for the at least one wavelength of interest of the optical window.

First claim

The invention claimed is:

1. A hermetic housing for an optoelectronic component or a MEMS device configured to form an enclosure within which a low pressure or vacuum prevails, said hermetic housing comprising:
an optical window transparent for at least one wavelength of interest of said optoelectronic component or of the MEMS device; and
a layer of a getter material configured to capture gases present in said enclosure and deposited on said optical window opposite said enclosure;

wherein the layer of getter material has a thickness (e t ) greater than 60 nanometers and a porosity (P) in the range from 10% to 70%; the thickness (e t ) and the porosity (P) being configured to satisfy the following relation:

(

1
-
P

)

*

e
t

<

λ

2
⁢

⁢
π
⁢

⁢
k

with λ corresponding to said at least one wavelength of interest of the optical window, and k corresponding to the extinction coefficient of the material of the layer of getter material for said at least one wavelength of interest of the optical window.

2. Hermetic housing according to claim 1 , wherein the layer of getter material has a base topped with a structuring pattern, the thickness of said base being greater than 60 nanometers.

3. Hermetic housing according to claim 1 , wherein the layer of getter material is made of zirconium (Zr), of titanium (Ti), of vanadium (V), of hafnium (Hf), of niobium (Nb), of tantalum (Ta), of cobalt (Co), of yttrium (Y), of barium (Ba), of iron (Fe), or of an alloy of these materials.

4. Hermetic housing according to claim 3 , wherein the layer of getter material is further formed with rare earths or aluminum (Al), or nickel (Ni).

5. Optoelectronic component or MEMS device comprising a hermetic housing according to claim 1 .

6. Method of manufacturing an optoelectronic component or a MEMS device according to claim 5 , said method comprising a step of deposition by evaporation or sputtering of a layer of a getter material formed under incidence of said optical window with respect to a flux (F) generated by an evaporation or sputtering element of said layer of getter material.

7. Manufacturing method according to claim 6 , wherein said deposition step is carried out while said optical window is rotating with respect to said evaporation or sputtering element.

8. Manufacturing method according to claim 6 , wherein said deposition step is carried out with an incidence angle (θ) in the range from 40 to 80° between said optical window and the normal (N) to the flux (F) generated by said evaporation or sputtering element.

Assignees

• Lynred
• Univ Paris Saclay
• Centre Nat Rech Scient
• Univ Paris Saclay Centre National De La Recherche
• Scient Cnrs

Inventors

• Lemettre Sylvain
• Bunel David
• Moulin Johan
• Bosseboeuf Alain

Classifications

• B81C1/00285

  using materials for controlling the level of pressure, contaminants or moisture inside of the package, e.g. getters · CPC title

• B81B2201/0207

  Bolometers · CPC title

• B81B2201/047

  Optical MEMS not provided for in B81B2201/042 - B81B2201/045 · CPC title

• B81B7/0067

  for controlling the passage of optical signals through the package · CPC title

• B81B7/0038 Primary

  using materials for controlling the level of pressure, contaminants or moisture inside of the package, e.g. getters · CPC title