Mixer and vaporization apparatus

Patent metadata

Field	Value
Publication number	US-11291966-B2
Application number	US-201816217423-A
Country	US
Kind code	B2
Filing date	Dec 12, 2018
Priority date	Dec 14, 2017
Publication date	Apr 5, 2022
Grant date	Apr 5, 2022

Abstract

A mixer is adapted to include: a flow path forming member formed with an internal flow path; and an insertion member inserted into the internal flow path, in which: the inner circumferential surface forming the internal flow path in the flow path forming member or the outer circumferential surface of the insertion member is formed with a first groove and a second groove merging with the first groove and branching from the first groove, and the inner circumferential surface and the outer circumferential surface are fitted to each other; and the first groove and the second groove are formed as a mixing flow path for, between the flow path forming member and the insertion member, branching and merging fluid flowing from one side of the internal flow path and guiding the fluid to the other side of the internal flow path.

First claim

The invention claimed is:

1. A vaporization apparatus that vaporizes fluid to produce vaporized gas, the vaporization apparatus comprising:
a depressurization flow path configured to depressurize and atomize a gas-liquid mixture introduced therein;
a mixer, arranged downstream of the depressurization flow path, comprising:
a flow path forming member formed with an internal flow path; and
an insertion member inserted into the internal flow path, wherein

an inner circumferential surface forming the internal flow path in the flow path forming member or an outer circumferential surface of the insertion member is formed with a first groove and a second groove merging with the first groove and branching from the first groove, and the inner circumferential surface and the outer circumferential surface are fitted to each other;
the first groove and the second groove are formed as a mixing flow path for, between the flow path forming member and the insertion member, branching and merging the fluid flowing from one side of the internal flow path and guiding the fluid to the other side of the internal flow path;
a direction of the gas-liquid mixture traveling through the depressurization flow path and into the mixer is axial with respect to the insertion member;
the insertion member has a guide surface on its upstream side which gradually tapers towards an upstream direction; and
an upstream side opening of the first groove and an upstream side opening of the second groove respectively overlap each other.

2. The vaporization apparatus according to claim 1 , wherein:
multiple first grooves are formed in the outer circumferential surface of the insertion member from an outer edge of one end part of the insertion member to an outer edge of the other end part of the insertion member;
multiple second grooves are formed in the outer circumferential surface of the insertion member from the outer edge of the one end part of the insertion member to the outer edge of the other end part of the insertion member; and
multiple branching points or multiple merging points between the first grooves and the second grooves are provided.

3. The vaporization apparatus according to claim 2 , wherein
the first grooves and the second grooves are of a spiral shape, and a winding direction of the first grooves and a winding direction of the second grooves are opposite to each other.

4. The vaporization apparatus according to claim 1 , wherein
the flow path forming member includes a first heater containing space containing a first heater for heating the fluid.

5. The vaporization apparatus according to claim 4 , wherein
the insertion member includes a second heater containing space containing a second heater for heating the fluid.

6. The vaporization apparatus according to claim 5 , wherein:
the flow path forming member is formed in a block body shape, and includes a first through-hole that communicates between a first port formed in a first wall surface and a second port formed in a second wall surface on a side opposite to the first wall surface, the insertion member being inserted into the first through-hole, and a second through-hole that communicates between a third port formed in a wall surface different from the second wall surface and the first through-hole;
the second port is blocked with the second heater inserted into the second heater containing space through the second port; and
one of the first port and the third port is formed as an inflow port for the fluid, and also the other is formed as an outflow port for the fluid.

7. The vaporization apparatus according to claim 6 , wherein
at a connection point between the first through-hole and the second through-hole, the fluid flows along a tangential direction of an inner circumferential surface forming the first through-hole.

8. The vaporization apparatus according to claim 1 , wherein
multiple guide grooves each communicating with a respective one of the first groove and the second groove are formed in the guide surface.

9. The vaporization apparatus according to claim 1 , wherein
cross-sections of the first groove and the second groove are formed in a partially circular shape.

10. The vaporization apparatus according to claim 1 , wherein
the guide surface of the insertion member is formed by a first conical part and a second conical part which respectively have different inclination angles.

11. The vaporization apparatus according to claim 1 , wherein
the flow path forming member comprises a pair of heaters for heating the fluid, the heaters arranged such that a longitudinal direction of the heaters extends along an axial direction of the insertion member.

Assignees

• Horiba Stec Co Ltd

Inventors

• Terasaka Masanori
• Oba Hidenori

Classifications

• B01F25/44164

  Crossing sets of grooves forming a labyrinth formed on opposed surfaces, e.g. on planar surfaces or on cylinders or cones · CPC title

• B01F2025/919

  characterised by the disposition of the feed and discharge openings · CPC title

• B01F2025/911

  Axial flow · CPC title

• C23C16/45512 Primary

  Premixing before introduction in the reaction chamber · CPC title

• B01F25/31

  in conduits or tubes through which the main component flows · CPC title