Multiple Surface LED Light
US-2015345775-A1 · Dec 3, 2015 · US
Method and apparatus for gas delivery
US9200367B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9200367-B2 |
| Application number | US-201113191008-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 26, 2011 |
| Priority date | Apr 29, 2011 |
| Publication date | Dec 1, 2015 |
| Grant date | Dec 1, 2015 |
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Abstract
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Methods and apparatus for gas delivery are disclosed herein. In some embodiments, a gas delivery system includes an ampoule for storing a precursor in solid or liquid form, a first conduit coupled to the ampoule and having a first end coupled to a first gas source to draw a vapor of the precursor from the ampoule into the first conduit, a second conduit coupled to the first conduit at a first junction located downstream of the ampoule and having a first end coupled to a second gas source and a second end coupled to a process chamber, and a heat source configured to heat the ampoule and at least a first portion of the first conduit from the ampoule to the second conduit and to heat only a second portion of the second conduit, wherein the second portion of the second conduit includes the first junction.
First claim
Opening claim text (preview).
The invention claimed is: 1. A gas delivery system, comprising: an ampoule for storing a precursor in solid or liquid form; a first conduit coupled to the ampoule and having a first end coupled to a first gas source to draw a vapor of the precursor from the ampoule into the first conduit; a second conduit coupled to the first conduit at a first junction located downstream of the ampoule and having a first end coupled to a second gas source and a second end coupled to a proces…
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Cross-Sectional Technologies · mapped topic
Cross-Sectional Technologies · mapped topic
Cross-Sectional Technologies · mapped topic
Cross-Sectional Technologies · mapped topic
Cross-Sectional Technologies · mapped topic
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- What does patent US9200367B2 cover?
- Methods and apparatus for gas delivery are disclosed herein. In some embodiments, a gas delivery system includes an ampoule for storing a precursor in solid or liquid form, a first conduit coupled to the ampoule and having a first end coupled to a first gas source to draw a vapor of the precursor from the ampoule into the first conduit, a second conduit coupled to the first conduit at a first j…
- Who is the assignee on this patent?
- Ye Zhiyuan, Kim Yihwan, Applied Materials Inc
- What technology area does this patent fall under?
- Primary CPC classification C23C16/4481. Mapped technology areas include Chemistry & Metallurgy.
- When was this patent published?
- Publication date Tue Dec 01 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).