Systems and methods for automated video analysis detection techniques for substrate process

Patent metadata

Field	Value
Publication number	US-11276157-B2
Application number	US-202017037094-A
Country	US
Kind code	B2
Filing date	Sep 29, 2020
Priority date	Nov 14, 2019
Publication date	Mar 15, 2022
Grant date	Mar 15, 2022

Abstract

Camera images are utilized to provide information regarding characteristics of in a fluid dispense system. Camera images may be utilized to identify the movement of the hardware of a fluid dispense system. The movement of the hardware may be utilized to determine the beginning of a fluid dispense based upon a correlation between the hardware movement and a dispense time provided in a dispense recipe. The beginning of the fluid dispense may be detected by performing an image analysis on the camera images to detect the presence of the fluid in the camera image. The image analysis may involve an intensity analysis of the detected camera image. In another embodiment, the camera image is utilized to detect the edges of the fluid formed on substrate. The edges may be detected as a puddle formed prior to spinning the substrate and/or may be detected as the puddle spreads during spinning.

First claim

What is claimed is:

1. A method of monitoring one or more characteristics of a fluid dispense system, the method comprising:
providing a substrate within the fluid dispense system;
using a camera to obtain a plurality of camera images within the fluid dispense system; and
determining a beginning of a dispense of fluid utilizing the plurality of camera images, the determining based on determining differences in intensities between the plurality of camera images, wherein determining the differences in the intensities comprises
determining, in a first image of the plurality of camera images, a first ratio of intensities of a first color spectrum to a second color spectrum different from the first color spectrum,
determining, in a second image of the plurality of camera images, a second ratio of intensities of the first color spectrum to the second color spectrum, and
comparing the first ratio with the second ratio.

2. The method of claim 1 , wherein the first color spectrum comprises a red color spectrum, a blue color spectrum, or a green color spectrum, and the second color spectrum comprises the red color spectrum, the blue color spectrum, or the green color spectrum.

3. The method of claim 1 , wherein the determining is performed by identifying in at least one of the plurality of camera images a presence of the fluid.

4. The method of claim 3 , wherein the presence of the fluid is detected based on the determined differences in the intensities.

5. The method of claim 4 , wherein the differences in the intensities is performed upon a predetermined set of pixels of the plurality of camera images.

6. The method of claim 4 , wherein determining the differences in the intensities further comprises
determining, in the first image of the plurality of camera images, a third ratio of intensities of the first color spectrum to a third color spectrum different from the first and the second color spectrums,
determining, in the second image of the plurality of camera images, a fourth ratio of intensities of the first color spectrum to the third color spectrum, and
comparing the third ratio with the fourth ratio.

7. The method of claim 1 , wherein the determining is performed by analyzing movement of a hardware apparatus of the fluid dispense system.

8. The method of claim 7 , wherein the determining is further performed by analyzing intensity changes over time within the plurality of camera images.

9. The method of claim 7 , wherein the determining is further performed by identifying in at least one of the plurality of camera images a presence of the fluid based on an intensity analysis of the plurality of camera images.

10. The method of claim 1 , wherein the fluid dispense system comprises an arm, a nozzle holder, and/or a nozzle.

11. The method of claim 1 , wherein the plurality of camera images are provided from a video obtained by the camera.

12. A method of monitoring one or more characteristics of a fluid dispense system, the method comprising:
using a camera to obtain a plurality of camera images of a substrate disposed within the fluid dispense system, the camera being located at a camera angle to the substrate;
dispensing fluid onto the substrate with the fluid dispense system, the dispensing beginning by forming an initial puddle comprising the fluid on the substrate; and
determining an edge of the fluid on the substrate from the plurality of camera images, the determining comprising
determining an outer edge of the puddle by analyzing intensity changes across the substrate over time,
fitting a shape based on the camera angle, and
updating the shape to track an outward movement of the edge of the fluid as the initial puddle expands across a surface of the substrate, wherein determining the outer edge of the puddle by analyzing intensity changes across the substrate over time comprises
determining, in a first image of the plurality of camera images, a first ratio of intensities of a first color spectrum to a second color spectrum different from the first color spectrum,
determining, in a second image of the plurality of camera images, a second ratio of intensities of the first color spectrum to the second color spectrum, and
comparing the first ratio with the second ratio.

13. The method of claim 12 , wherein determining the outer edge of the puddle by analyzing intensity changes across the substrate over time further comprises
determining, in the first image of the plurality of camera images, a third ratio of intensities of the first color spectrum to a third color spectrum different from the first and the second color spectrums,
determining, in the second image of the plurality of camera images, a fourth ratio of intensities of the first color spectrum to the third color spectrum, and
comparing the third ratio with the fourth ratio.

14. The method of claim 12 , wherein the first color spectrum comprises a red color spectrum, a blue color spectrum, or a green color spectrum, and the second color spectrum comprises the red color spectrum, the blue color spectrum, or the green color spectrum.

15. The method of claim 12 , wherein the differences is performed upon a predetermined set of pixels of the plurality of camera images.

16. The method of claim 12 , wherein the plurality of camera images are provided from a video obtained by the camera.

17. A method of monitoring one or more characteristics of a fluid dispense system, the method comprising:
spinning a spin chuck holding a substrate while dispensing fluid onto the substrate;
using a camera to obtain a plurality of camera images of the spinning substrate; and
determining a spin speed of the spin chuck while dispensing the fluid utilizing the plurality of camera images, the determining based on determining differences in intensities of an area of pixels between the plurality of camera images.

18. The method of claim 17 , wherein determining the differences in the intensities comprises
determining, in a first image of the plurality of camera images, a first ratio of intensities of a first color spectrum to a second color spectrum different from the first color spectrum,
determining, in a second image of the plurality of camera images, a second ratio of intensities of the first color spectrum to the second color spectrum, and
comparing the first ratio with the second ratio.

19. The method of claim 18 , wherein determining the differences in the intensities further comprises
determining, in the first image of the plurality of camera images, a third ratio of intensities of the first color spectrum to a third color spectrum different from the first and the second color spectrums,
determining, in the second image of the plurality of camera images, a fourth ratio of intensities of the first color spectrum to the third color spectrum, and
comparing the third ratio with the fourth ratio.

Assignees

• Tokyo Electron Ltd

Inventors

• Estrella Joel
• Carcasi Michael
• Hooge Joshua

Classifications

• G06T2207/30164

  Workpiece; Machine component · CPC title

• G06T2207/10016

  Video; Image sequence · CPC title

• G06T7/97

  Determining parameters from multiple pictures (depth or shape recovery from multiple images G06T7/55; stereo camera calibration G06T7/85) · CPC title

• G06T7/90

  Determination of colour characteristics · CPC title

• G06T7/20

  Analysis of motion (motion estimation for coding, decoding, compressing or decompressing digital video signals H04N19/43, H04N19/51) · CPC title