Arc suppression and pulsing in high power impulse magnetron sputtering (HIPIMS)

Patent metadata

Field	Value
Publication number	US-11211234-B2
Application number	US-201615139438-A
Country	US
Kind code	B2
Filing date	Apr 27, 2016
Priority date	Dec 12, 2006
Publication date	Dec 28, 2021
Grant date	Dec 28, 2021

Abstract

An apparatus for generating sputtering of a target to produce a coating on a substrate is provided. The apparatus has a magnetron including a cathode and an anode. A power supply is operably connected to the magnetron and at least one capacitor is operably connected to the power supply. The apparatus also includes an inductance operably connected to the at least one capacitor. A first switch and a second switch are also provided. The first switch operably connects the power supply to the magnetron to charge the magnetron and the first switch is configured to charge the magnetron according to a first pulse. The second switch is operably connected to discharge the magnetron. The second switch is configured to discharge the magnetron according to a second pulse.

First claim

What is claimed is:

1. A method of sputter coating a substrate or of manufacturing a sputter coated substrate comprising:
Providing a magnetron having an anode and a cathode
Providing a magnetron sputter source at the cathode
Exposing the substrate to said magnetron sputter source
Supplying said magnetron sputter source by a power supply
Providing at least one capacitor operatively connected to said power supply
Providing an inductance of 0.1 to 100 μH including a coil operatively connected to said at least one capacitor and in series with said power supply and said magnetron
Administering a first pulse by closing a first switch to connect said inductance to said at least one capacitor when the first switch is closed, the first pulse comprising a series of pulses administered with a duty cycle of 0.1% to 10% to said inductance, said administering including pulsed closing and opening of the first switch
Generating a discharge voltage at said magnetron sputter source with pulsatingly changing polarity by operating a second switch in a pulsed manner including pulsed opening and closing of the second switch to operatively cause energy stored in said inductance to be discharged to said magnetron sputter source, wherein the second switch is operationally connected to an intermediate tap of said coil, the second switch making a shortcut between the cathode and anode via a part of the coil when the second switch is closed, and the second switch uses an auto transforming effect of the inductance when the second switch is closed to create a positive voltage at the cathode
Controlling a property of a coating on the substrate by adjusting a time period of the pulsed opening and closing of the second switch and/or adjusting the inductance.

2. The method of claim 1 wherein the controlling of a coating coverage is by the adjusting the time period of the pulsed opening and closing of said second switch or by selecting a location of said intermediate tap along said inductance.

3. The method of claim 1 wherein the adjusting the time period of the pulsed opening and closing of the second switch includes at least one of opening of said second switch during said pulsed opening and closing of the second switch and adjusting the inductance includes selecting a location of said intermediate tap along said inductance.

4. The method of claim 3 wherein the property of the coating includes at least one of film stress, microstructure, mechanical property, electrical property, optical property.

5. The method of claim 1 wherein the property of the coating comprises at least one of a film stress, a microstructure, a mechanical property, an electrical property, or an optical property.

6. The method of claim 1 wherein the adjusting the time period of the pulsed opening and closing of the second switch comprises adjusting at least one of a pulse off-time, a pulse on-time, or a pulse duty cycle.

7. The method of claim 1 wherein the adjusting the inductance comprises adjusting a point at which the second switch is connected to the coil.

8. The method of claim 1 wherein the property of the coating comprises a bottom and/or a sidewall coverage in trenches and/or vias of the substrate.

Assignees

• Evatec Ag

Inventors

• Kadlec Stanislav
• Weichart Jurgen

Classifications

• H01J37/32944 Primary

  Arc detection · CPC title

• C23C14/3485 Primary

  using pulsed power to the target · CPC title

• H01J37/3467

  Pulsed operation, e.g. HIPIMS · CPC title

• H01J37/3408

  Planar magnetron sputtering · CPC title

• H01J37/32045

  Circuits specially adapted for controlling the glow discharge · CPC title