Method of manufacturing an oscillator

Patent metadata

Field	Value
Publication number	US-11201571-B2
Application number	US-201716086163-A
Country	US
Kind code	B2
Filing date	Mar 21, 2017
Priority date	Mar 25, 2016
Publication date	Dec 14, 2021
Grant date	Dec 14, 2021

Abstract

Provided is a method of manufacturing an oscillator, including: arranging an electrode on a piezoelectric ceramics free from being subjected to polarization treatment, to thereby provide a piezoelectric element; bonding the piezoelectric element and a diaphragm to each other at a temperature T 1 ; bonding the piezoelectric element and a power supply member to each other at a temperature T 2 ; and subjecting the piezoelectric ceramics to polarization treatment at a temperature T 3 , in which the temperature T 1 , the temperature T 2 , and the temperature T 3 satisfy a relationship T 1 >T 3 and a relationship T 2 >T 3.

First claim

The invention claimed is:

1. A method of manufacturing an oscillator, comprising, in sequence:
arranging an electrode on a piezoelectric ceramic free from being subjected to polarization treatment, to thereby provide a piezoelectric element;
bonding the piezoelectric element and an elastic body to each other at a temperature T 1 ;
bonding the piezoelectric element and a power supply member to each other at a temperature T 2 ; and
subjecting the piezoelectric ceramic to polarization treatment at a temperature T 3 ,
wherein the temperature T 1 , the temperature T 2 , and the temperature T 3 satisfy a relationship T 1 >T 2 >T 3 .

2. The method according to claim 1 , further comprising providing a first adhesive portion having a glass transition temperature Tg 1 between the piezoelectric element and the elastic body and a second adhesive portion having a glass transition temperature Tg 2 between the piezoelectric element and the power supply member, and
wherein the glass transition temperature Tg 1 , the glass transition temperature Tg 2 , and the temperature T 3 satisfy a relationship Tg 1 >T 3 and a relationship Tg 2 >T 3 .

3. The method according to claim 1 , wherein the temperature T 1 is 20° C. to less than 600° C.

4. The method according to claim 1 , wherein the temperature T 3 is 20° C. or more.

5. The method according to claim 1 , wherein the piezoelectric ceramic has a depolarization temperature Td, and the depolarization temperature Td and the temperature T 2 satisfy a relationship T 2 >Td.

6. The method according to claim 5 , wherein the depolarization temperature Td is 120° C. or less.

7. The method according to claim 1 , wherein the elastic body has a linear expansion coefficient αs at 20° C. of 9.0×10 −6 /° C. to 20.0×10 −6 /° C.

8. The method according to claim 7 , wherein the piezoelectric ceramic has a linear expansion coefficient αp at 20° C., and the linear expansion coefficient αs and the linear expansion coefficient αp satisfy a relationship 0.5≤αs/αp≤1.5.

9. The method according to claim 1 , wherein the elastic body comprises an alloy containing 50 mass % or more of steel and 10.5 mass % or more of chromium.

10. The method according to claim 1 , wherein the piezoelectric ceramic contains lead in a content of less than 1,000 ppm.

11. The method according to claim 1 , wherein the elastic body has a Young's modulus Ys at 20° C. and the piezoelectric ceramic has a Young's modulus Yp at 20° C., and the Young's modulus Ys and the Young's modulus Yp satisfy a relationship 0.5≤Ys/Yp≤2.

12. The method according to claim 1 , wherein the piezoelectric ceramic comprises a barium titanate based material.

13. The method according to claim 1 , wherein the piezoelectric ceramic has a rectangular parallelepiped shape, and
wherein the oscillator is configured to generate composite oscillation of a combination of two out-of-plane oscillation modes in which nodal lines are substantially orthogonal to each other.

14. The method according to claim 1 , wherein the piezoelectric element comprises two drive phase electrodes in portions with which the power supply member is brought into contact, and
wherein the piezoelectric ceramic has the same polarity in the portions that are brought into contact with the two drive phase electrodes.

Assignees

• Canon Kk

Inventors

• Hayashi Jumpei
• Takeda Kenichi
• Koyama Shinya
• Watanabe Takayuki
• Shimizu Yasushi
• Furuta Tatsuo
• Ueda Miki
• Uebayashi Akira
• Tanaka Hidenori
• Kubota Makoto

Classifications

• H02N2/026

  by pressing one or more vibrators against the driven body · CPC title

• H02N2/08

  using travelling waves {, i.e. Rayleigh surface waves} · CPC title

• H02N2/0015 Primary

  using only bending modes · CPC title

• G02B7/04

  with mechanism for focusing or varying magnification · CPC title

• H02N2/065

  Large signal circuits, e.g. final stages · CPC title