Breaking-in and cleaning method and apparatus for wafer-cleaning brush
US-2024066566-A1 · Feb 29, 2024 · US
US9252685B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9252685-B2 |
| Application number | US-201214344396-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 19, 2012 |
| Priority date | Oct 20, 2011 |
| Publication date | Feb 2, 2016 |
| Grant date | Feb 2, 2016 |
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Provided is a dust removing device that can be designed and controlled appropriately and has high dust removal performance even at low temperature, and an imaging device using the dust removing device. In a dust removing device to be set on a base, including a piezoelectric element formed of a piezoelectric material and a pair of opposing electrodes, a vibration member, and a fixation member containing at least a high molecular compound component, a phase transition temperature T from a first ferroelectric crystal phase to a second ferroelectric crystal phase of the piezoelectric material is set to −60° C.≦T≦−5° C., and whereby, the dust removing device can be designed and controlled appropriately and high dust removal performance can be obtained even at low temperature.
Opening claim text (preview).
The invention claimed is: 1. A dust removing device comprising: a piezoelectric element comprising a piezoelectric material and a pair of opposing electrodes; a vibration member; and a fixation member containing at least a high molecular compound component, wherein a phase transition temperature T from a first ferroelectric crystal phase to a second ferroelectric crystal phase of the piezoelectric material is −60° C.≦T≦−5° C., and wherein a modulus of elasticity at 25° C. of the fixation member is smaller than a modulus elasticity at −5° C. of the fixation member. 2. The dust removing device according to claim 1 , wherein the fixation member comprises an elastomer. 3. The dust removing device according to claim 1 , wherein the fixation member comprises a foamed resin. 4. The dust removing device according to claim 1 , wherein the fixation member is thermoplastic. 5. The dust removing device according to claim 1 , wherein the first ferroelectric crystal phase of the piezoelectric material comprises a tetragonal phase. 6. The dust removing device according to claim 1 , wherein the second ferroelectric crystal phase of the piezoelectric material comprises an orthorhombic phase. 7. The dust removing device according to claim 1 , wherein the piezoelectric material has a lead content of less than 1,000 ppm. 8. The dust removing device according to claim 1 , wherein the piezoelectric material comprises piezoelectric ceramics containing barium titanate as a main component. 9. The dust removing device according to claim 1 , wherein the piezoelectric material comprises, as a main component, a perovskite-type metal oxide represented by general formula (1): (Ba 1-x Ca x )(Ti 1-y Zr y )O 3 , where 0.02≦x≦0.30, 0.020≦y≦0.095, and y≦x. 10. The dust removing device according to claim 9 , wherein the piezoelectric material comprises an Mn component, and a content of the Mn component is from 0.02 parts by weight to 0.40 parts by weight with respect to 100 parts by weight of the perovskite-type metal oxide. 11. The dust removing device according to claim 1 , wherein the piezoelectric element and the vibration member have a plate shape, one electrode surface of the piezoelectric element is fixedly bonded to a plate surface of the vibration member, and the vibration member is fixed to a base through an intermediation of the fixation member. 12. The dust removing device according to claim 1 , comprising multiple piezoelectric elements. 13. The dust removing device according to claim 1 , wherein the vibration member comprises an optical material. 14. An imaging device comprising the dust removing device according to claim 1 and an image pickup element unit, wherein the vibration member of the dust removing device and a light receiving surface of the image pickup element unit are provided coaxially in this order.
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