Piezoelectric material, piezoelectric element, multilayered piezoelectric element, liquid ejection head, liquid ejection apparatus, ultrasonic motor, optical equipment, vibration apparatus, dust removing apparatus, imaging apparatus, and electronic equipment

Patent metadata

Field	Value
Publication number	US-9343650-B2
Application number	US-201414217725-A
Country	US
Kind code	B2
Filing date	Mar 18, 2014
Priority date	Mar 29, 2013
Publication date	May 17, 2016
Grant date	May 17, 2016

Abstract

Provided is a lead-free piezoelectric material having a satisfactory and stable piezoelectric constant and electric insulation property in a wide practical temperature range. Provided is a piezoelectric material, including a perovskite-type metal oxide represented by the following general formula (1) as a main component, the piezoelectric material containing Mn in a content of 0.01 part by weight or more and 0.80 part by weight or less with respect to 100 parts by weight of the perovskite-type metal oxide: (Li αx Na αy K αz Ba β Bi 0.5α+γ ) a (Ti α+β Fe γ ) O 3 . . . (1), where 0.800≦α≦0.999, 0≦β≦0.150, 0.001≦γ≦0.050, α+β+γ=1, 0≦x≦0.050, 0.045≦y≦0.450, 0.045≦z≦0.450, 0.450≦x+y+z≦0.500, and 0.980≦a≦1.020.

First claim

What is claimed is:

1. A piezoelectric material, comprising a perovskite-type metal oxide represented by the following general formula (1) as a main component, the piezoelectric material containing Mn in a content of 0.01 part by weight or more and 0.80 part by weight or less with respect to 100 parts by weight of the perovskite-type metal oxide:
(Li αx Na αy K αz Ba β Bi 0.5α+γ ) a (Ti α+β Fe γ )O 3   (1)

where 0.800≦α≦0.999, 0≦β≦0.150, 0.001≦γ≦0.050, α+β+γ=1, 0≦x≦0.050, 0.045≦y≦0.450, 0.045≦z≦0.450, 0.450≦x+y+z≦0.500, and 0.980≦a≦1.020.

2. The piezoelectric material according to claim 1 , wherein the piezoelectric material satisfies a relationship: 2αy+β≧2α(x+z).

3. The piezoelectric material according to claim 2 , wherein the piezoelectric material satisfies a relationship: 2αy+β≧4.6α(x+z).

4. The piezoelectric material according to claim 1 , wherein the piezoelectric material satisfies a relationship: 0.002≦γ≦0.020.

5. The piezoelectric material according to claim 1 , wherein the piezoelectric material has a depolarization temperature of 140° C. or more.

6. The piezoelectric material according to claim 1 , wherein the piezoelectric material contains crystal grains having an average equivalent circle diameter of 0.3 μm or more and 10 μm or less.

7. The piezoelectric material according to claim 1 , wherein the piezoelectric material has a relative density of 93% or more and 100% or less.

8. A piezoelectric element, comprising at least a first electrode, a piezoelectric material portion, and a second electrode,
wherein the piezoelectric material portion includes the piezoelectric material according to claim 1 .

9. A multilayered piezoelectric element, comprising two or more piezoelectric material layers and two or more electrode layers including one or more internal electrode, which are stacked alternately,
wherein the piezoelectric material layer includes the piezoelectric material according to claim 1 .

10. The multilayered piezoelectric element according to claim 9 , wherein the internal electrode contains Ag and Pd, and a weight ratio M1/M2 between a containing weight M1 of the Ag and a containing weight M2 of the Pd satisfies a relationship: 0.25≦M1/M2≦4.0.

11. The multilayered piezoelectric element according to claim 9 , wherein the internal electrode contains at least one of Ni or Cu.

12. A liquid ejection head, comprising at least:
a liquid chamber including a vibration portion containing the piezoelectric element according to claim 8 ; and
an ejection orifice communicating with the liquid chamber.

13. A liquid ejection apparatus, comprising:
a stage configured to receive an object; and
the liquid ejection head according to claim 12 .

14. An ultrasonic motor, comprising at least:
a vibrating body containing the piezoelectric element according to claim 8 ; and
a rotor which comes into contact with the vibrating body.

15. An optical equipment, comprising a drive unit including the ultrasonic motor according to claim 14 .

16. A vibration apparatus, comprising a vibrating body containing a diaphragm and the piezoelectric element according to claim 8 disposed on the diaphragm.

17. A dust removing apparatus, comprising a vibration portion including the vibration apparatus according to claim 16 .

18. An imaging apparatus, comprising at least:
the dust removing apparatus according to claim 17 ; and
an imaging element unit,
wherein the dust removing apparatus includes the diaphragm provided on a light receiving surface of the imaging element unit.

19. An electronic equipment, comprising a piezoelectric acoustic component including the piezoelectric element according to claim 8 .

20. A liquid ejection head, comprising at least:
a liquid chamber including a vibration portion containing the multilayered piezoelectric element according to claim 9 ; and
an ejection orifice communicating with the liquid chamber.

21. A liquid ejection apparatus, comprising:
a stage configured to receive an object; and
the liquid ejection head according to claim 20 .

22. An ultrasonic motor, comprising at least:
a vibrating body containing the multilayered piezoelectric element according to claim 9 ; and
a rotor which comes into contact with the vibrating body.

23. An optical equipment, comprising a drive unit including the ultrasonic motor according to claim 22 .

24. A vibration apparatus, comprising a vibrating body containing a diaphragm and the multilayered piezoelectric element according to claim 9 disposed on the diaphragm.

25. A dust removing apparatus, comprising a vibration portion including the vibration apparatus according to claim 24 .

26. An imaging apparatus, comprising at least:
the dust removing apparatus according to claim 25 ; and
an imaging element unit,
wherein the dust removing apparatus includes the diaphragm provided on a light receiving surface of the imaging element unit.

27. An electronic equipment, comprising a piezoelectric acoustic component including the multilayered piezoelectric element according to claim 9 .

Assignees

• Canon Kk
• Fuji Chemical Kk

Inventors

• Kubota Makoto
• Hayashi Jumpei
• Uchida Fumio
• Maeda Kenji
• Shimizu Chiemi

Classifications

• H01L41/0477 Primary

  Electricity · mapped topic

• H01L41/1878

  Electricity · mapped topic

• H01L41/083

  Electricity · mapped topic

• H01L41/273

  Electricity · mapped topic

• H01L41/1871

  Electricity · mapped topic