Substrate drying method, photoresist developing method, photolithography method including the same, and substrate drying system

Patent metadata

Field	Value
Publication number	US-11189503-B2
Application number	US-201916420776-A
Country	US
Kind code	B2
Filing date	May 23, 2019
Priority date	Nov 14, 2018
Publication date	Nov 30, 2021
Grant date	Nov 30, 2021

Abstract

Disclosed are substrate drying methods, photoresist developing methods, and/or photolithography methods. The substrate drying method including providing a drying liquid on a substrate, increasing a pressure of the drying liquid to produce a supercritical fluid, and removing the supercritical fluid to dry the substrate may be provided.

First claim

What is claimed is:

1. A substrate drying method comprising:
providing a substrate on a cassette in a chamber, the substrate including an top surface having photoresist patterns;
providing a wetting liquid in the chamber so that the photoresist patterns are dipped in the wetting liquid;
inverting the substrate in the wetting liquid by rotating the cassette so that the photoresist patterns face a bottom portion of the chamber;
providing a drying liquid in the chamber such that the drying liquid has a density lower than that of the wetting liquid and is provided on the wetting liquid;
selectively exhausting the wetting liquid in the chamber through the bottom portion of the chamber to replace the wetting liquid between the photoresist patterns with dry liquid;
increasing a pressure of the drying liquid in the chamber to produce a supercritical fluid;
removing the supercritical fluid in the chamber to dry the substrate; and
inverting the substrate in the chamber by rotating the cassette so that the photoresist patterns face a top portion of the chamber.

2. The method of claim 1 , further comprising:
reinverting the substrate after the removing the supercritical fluid.

3. The method of claim 1 , wherein the wetting liquid has a density higher than a density of the drying liquid.

4. The method of claim 1 , wherein the wetting liquid includes deionized water.

5. The method of claim 1 , wherein
the drying liquid includes liquid carbon dioxide, and
the supercritical fluid includes supercritical carbon dioxide.

6. The method of claim 1 , further comprising:
providing a drying gas on the substrate.

7. The method of claim 6 , wherein the drying gas includes a carbon dioxide gas.

8. A developing method comprising:
providing a developing solution on a substrate;
providing a rinse solution on the substrate to remove the developing solution; and
drying the substrate by removing the rinse solution,
wherein the drying the substrate includes,
providing the substrate on a cassette in a chamber, the substrate including an top surface having photoresist patterns,
providing a wetting liquid in the chamber so that the photoresist patterns are dipped in the wetting liquid,
inverting the substrate in the wetting liquid by rotating the cassette so that the photoresist patterns face a bottom portion of the chamber,
providing a drying liquid the chamber such that the drying liquid has a density lower than that of the wetting liquid and is provided on the wetting liquid,
selectively exhausting the wetting liquid in the chamber through the bottom portion of the chamber to replace the wetting liquid between the photoresist patterns with the dry liquid,
increasing a pressure of the drying liquid in the chamber to produce a supercritical fluid,
removing the supercritical fluid in the chamber to dry the substrate, and
inverting the substrate in the chamber by rotating the cassette so that the photoresist patterns face a top portion of the chamber.

9. The method of claim 8 , wherein
the developing solution includes TetraMethyl-Ammonium-Hydroxide (TMAH), and
the rinse solution includes deionized water.

10. The method of claim 9 , wherein
the wetting liquid includes a same material as the rinse solution.

11. The method of claim 8 , wherein
the developing solution includes a nonpolar solvent, and
the rinse solution includes acetic acid.

12. The method of claim 8 , wherein the drying the substrate further comprises providing a drying gas on the substrate, and a pressure of the drying gas is higher than that of a triple point of the drying gas.

13. A photolithography method, comprising:
forming a photoresist on a substrate;
exposing a portion of the photoresist to light; and
developing the photoresist to form photoresist patterns on the substrate,
wherein the developing the photoresist includes,
providing a developing solution on the substrate,
providing a rinse solution on the substrate to remove the developing solution,
providing the substrate on a cassette in a chamber, the substrate including an top surface having the photoresist patterns,
providing a wetting liquid in the chamber so that the photoresist patterns are dipped in the wetting liquid,
inverting the substrate in the wetting liquid by rotating the cassette so that the photoresist patterns face a bottom portion of the chamber, and
drying the substrate by removing the rinse solution, and

wherein the drying the substrate includes,
providing a drying liquid in the chamber such that the drying liquid has a density lower than that of the wetting liquid and is provided on the wetting liquid,
selectively exhausting the wetting liquid in the chamber through the bottom portion of the chamber to replace the wetting liquid between the photoresist patterns with the dry liquid,
increasing a pressure of the drying liquid in the chamber to produce a supercritical fluid,
removing the supercritical fluid in the chamber to dry the substrate, and
inverting the substrate in the chamber by rotating the cassette so that the photoresist patterns face a top portion of the chamber.

14. The method of claim 13 , wherein
the photoresist includes a positive-type photoresist, and
the developing solution includes TetraMethyl-Ammonium-Hydroxide (TMAH), and the rinse solution includes deionized water.

15. The method of claim 14 , wherein
the wetting liquid includes a same material as the rinse solution, and
the drying the substrate further comprises reinverting the substrate.

16. The method of claim 13 , wherein
the photoresist includes a negative-type photoresist,
the developing solution includes a nonpolar solvent, and
the rinse solution includes acetate.

17. The method of claim 13 , wherein the light includes an extreme ultraviolet (EUV) beam.

Assignees

• Samsung Electronics Co Ltd

Inventors

• Kim Young-Hoo
• Lee Kuntack
• Cho Yong-Jhin
• Koh Chawon
• Park Sunghyun
• Lee Hyosan
• Cha Ji Hoon
• Choi Soo Young

Classifications

• H10P70/80

  Cleaning only by supercritical fluids · CPC title

• H10P14/683

  carbon-based polymeric organic materials, e.g. polyimides, poly cyclobutene or PVC · CPC title

• H10P72/0408 Primary

  for drying · CPC title

• G03F7/32

  Liquid compositions therefor, e.g. developers · CPC title

• G03F7/40 Primary

  Treatment after imagewise removal, e.g. baking · CPC title