Substrate rotating apparatus, substrate processing system including the same, and substrate processing method using the same
US-12578647-B2 · Mar 17, 2026 · US
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Lee Kuntack patents
Lee Kuntack is listed as an inventor on 101 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Lee Kuntack |
| Total patents | 101 |
| First publication | May 12, 2015 |
| Latest publication | Mar 17, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Wafer drying apparatus, wafer processing system including the same, and wafer processing method using the same
US-2026040861-A1 · Feb 5, 2026 · US
Substrate processing method using low temperature developer and semiconductor device manufacturing apparatus using the same
US-12523935-B2 · Jan 13, 2026 · US
Substrate processing apparatus and substrate processing method
US-2025387810-A1 · Dec 25, 2025 · US
Wafer drying apparatus, wafer processing system including the same, and wafer processing method using the same
US-12463061-B2 · Nov 4, 2025 · US
Substrate processing apparatus, semiconductor manufacturing equipment, and substrate processing method
US-12422754-B2 · Sep 23, 2025 · US
Substrate processing apparatus and substrate processing method
US-12420316-B2 · Sep 23, 2025 · US
Apparatus and method for drying substrate
US-2025259862-A1 · Aug 14, 2025 · US
Substrate transferring unit, substrate processing apparatus, and substrate processing method
US-2025210405-A1 · Jun 26, 2025 · US
Apparatus and method for drying substrate
US-12308255-B2 · May 20, 2025 · US
Recent patents
Latest publications not already listed above.
Apparatus for drying wafer and method for drying wafer
US-2025155816-A1 · May 15, 2025 · US
Substrate transferring unit, substrate processing apparatus, and substrate processing method
US-12278133-B2 · Apr 15, 2025 · US
Substrate heating apparatus and method for processing a substrate
US-12225634-B2 · Feb 11, 2025 · US
Apparatus for drying wafer and method for drying wafer
US-12216408-B2 · Feb 4, 2025 · US
Substrate processing apparatus and substrate processing method
US-12211716-B2 · Jan 28, 2025 · US
Substrate processing method and substrate processing system
US-12198923-B2 · Jan 14, 2025 · US
Substrate processing system and substrate processing method using the same
US-2025014915-A1 · Jan 9, 2025 · US
Substrate processing apparatus
US-2024339334-A1 · Oct 10, 2024 · US
Substrate processing baffle, substrate processing apparatus including the same, and substrate processing method using the same
US-2024280906-A1 · Aug 22, 2024 · US
Substrate processing method, micropattern forming method, and substrate processing apparatus
US-12057323-B2 · Aug 6, 2024 · US
Substrate processing apparatus, substrate processing method, and method of manufacturing semiconductor device
US-2024242985-A1 · Jul 18, 2024 · US
Baffle inspection apparatus
US-2024192071-A1 · Jun 13, 2024 · US
Substrate cleaning chamber, a substrate processing system including the same, and a method of processing a substrate using the substrate processing system
US-2024173751-A1 · May 30, 2024 · US
Substrate processing baffle, substrate processing apparatus including the same, and processing apparatus fabrication method
US-2024175629-A1 · May 30, 2024 · US
Substrate processing apparatus and substrate processing method
US-2024178024-A1 · May 30, 2024 · US
Fluidic baffle for high pressure fluid distribution and substrate processing apparatus
US-2024167156-A1 · May 23, 2024 · US
Substrate processing apparatus and method of processing a substrate using the same
US-2024170306-A1 · May 23, 2024 · US
Substrate processing apparatus and substrate processing method
US-2024149312-A1 · May 9, 2024 · US
Conditioner, chemical mechanical polishing apparatus including the same and method of manufacturing a semiconductor device using the apparatus
US-11964357-B2 · Apr 23, 2024 · US
Substrate transferring unit, substrate processing apparatus, and substrate processing method
US-2024120232-A1 · Apr 11, 2024 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Samsung Electronics Co Ltd | 99 |
| Semes Co Ltd | 6 |
| Lee Kuntack | 3 |
| Ko Yongsun | 2 |
| Kim Kyoungseob | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/0408 | 54 |
| H10P70/20 | 39 |
| H10P70/80 | 29 |
| H01L21/67034 | 28 |
| H10P72/0414 | 26 |