Chuck table and inspection apparatus

Patent metadata

Field	Value
Publication number	US-11152246-B2
Application number	US-202016773358-A
Country	US
Kind code	B2
Filing date	Jan 27, 2020
Priority date	Feb 14, 2019
Publication date	Oct 19, 2021
Grant date	Oct 19, 2021

Abstract

A chuck table holding a frame unit including a workpiece is securely placed in an opening of an annular frame by a tape. A transparent holder having a holding surface holds the workpiece with the tape interposed therebetween. A frame body is erected around and surrounding the holder, the frame body having a plurality of suction holes that are open in an inner circumferential surface of the frame body. The frame body has an inside diameter equal to or smaller than an inside diameter of the annular frame. While an opening of the frame body is being covered by the tape, a suction force is transmitted through the suction holes into the frame body, discharging air from between the tape and the holding surface to bring the tape into intimate contact with the holding surface thereby securing the workpiece of the frame unit to the holding surface.

First claim

What is claimed is:

1. A chuck table for holding a frame unit including a workpiece securely placed in an opening of an annular frame by a tape, comprising:
a holder having a holding surface for holding the workpiece thereon with the tape interposed therebetween, the holder being made of a transparent material; and
a frame body erected around the holder and surrounding the holder, the frame body having an upper surface stepped above the holding surface, a lower surface opposite the upper surface, an inner circumferential surface between the upper surface and the lower surface, and a plurality of suction holes defined in the frame body and open in the inner circumferential surface of the frame body between the holding surface and the upper surface, wherein the frame body has an inside diameter equal to or smaller than an inside diameter of the annular frame, and,
while an opening of the frame body is being covered by the tape of the frame unit, a suction force is transmitted through the suction holes into the frame body, discharging air from between the tape and the holding surface to bring the tape into intimate contact with the holding surface thereby securing the workpiece of the frame unit to the holding surface.

2. The chuck table according to claim 1 ,
wherein the holding surface of the holder is flat in its entirety and is free of suction grooves.

3. An inspection apparatus for inspecting a workpiece, comprising:
a chuck table for holding, on a holding surface, a frame unit including a workpiece securely placed in an opening of an annular frame by a tape;
a camera unit for capturing an image of the workpiece held on the chuck table through the holding surface from a holding surface side; and
a moving unit for relatively moving the chuck table and the camera unit in X-axis directions parallel to the holding surface or Y-axis directions perpendicular to the X-axis directions,
wherein the chuck table includes:
a holder having the holding surface for holding the workpiece with the tape interposed therebetween, the holder being made of a transparent material, and
a frame body erected around the holder and surrounding the holder, the frame body having an upper surface stepped above the holding surface, a lower surface opposite the upper surface, an inner circumferential surface between the upper surface and the lower surface, and a plurality of suction holes defined in the frame body and open in the inner circumferential surface of the frame body between the holding surface and the upper surface,
wherein the frame body has an inside diameter equal to or smaller than an inside diameter of the annular frame, and,
while an opening of the frame body is being covered by the tape of the frame unit, a suction force is transmitted through the suction holes into the frame body, discharging air from between the tape and the holding surface to bring the tape into intimate contact with the holding surface thereby securing the workpiece of the frame unit to the holding surface.

4. The inspection apparatus according to claim 3 , wherein
the inspection apparatus is incorporated in a processing apparatus including a processing unit for processing the workpiece with a cutting blade or a laser beam, and
the processing unit processes the workpiece held on the chuck table and inspects the workpiece by capturing an image of the workpiece processed by the processing unit through the chuck table.

5. The inspection apparatus according to claim 3 , wherein the work piece is held on the holder with a face side of the work piece against with the holding surface.

6. The inspection apparatus according to claim 3 , wherein the work piece is held on the holder with a reverse side of the work piece against the holding surface.

Assignees

• Disco Corp

Inventors

• Tanaka Hideaki

Classifications

• H10P72/78 Primary

  using vacuum or suction, e.g. Bernoulli chucks · CPC title

• H10P72/0442

  Apparatus for placing on an insulating substrate, e.g. tape · CPC title

• H10P72/0428

  Apparatus for mechanical treatment or grinding or cutting · CPC title

• H10P74/203

  Structural properties, e.g. testing or measuring thicknesses, line widths, warpage, bond strengths or physical defects · CPC title

• H10P72/7616 Primary

  characterised by a coating, a hardness or a material · CPC title