Scanning probe microscope with case and elastic body

Patent metadata

Field	Value
Publication number	US-11073535-B2
Application number	US-201916728351-A
Country	US
Kind code	B2
Filing date	Dec 27, 2019
Priority date	Apr 25, 2019
Publication date	Jul 27, 2021
Grant date	Jul 27, 2021

Abstract

A scanning probe microscope includes a case, an actuator, at least one elastic body, and a probe. The actuator includes a piezoelectric scanner having a cylindrical shape and a sample holder. The piezoelectric scanner is disposed inside the case to be coaxial with the case such that the first end is fixed to the bottom portion. The sample holder is provided at a second end of the piezoelectric scanner. At least one elastic body is disposed so as to be sandwiched between the case and at least one of the piezoelectric scanner and the sample holder.

First claim

What is claimed is:

1. A scanning probe microscope comprising:
a case having a cylindrical shape with a bottom, the case having a bottom portion and a circumferential wall portion having an outside surface and an inside surface opposite the outside surface;
an actuator disposed inside the case;
a probe moved relative to the actuator for scanning, wherein
the actuator includes
a piezoelectric scanner having a cylindrical shape, and
a sample holder,
the sample holder includes
a flat plate portion that holds a sample, and
a protruding portion that protrudes from an edge of the flat plate portion to surround an end portion of the outside surface of the circumferential wall portion, the end portion being located on a side opposite to the bottom portion in an axis direction,

the piezoelectric scanner includes
a first end in the axis direction,
a second end on a side opposite to the first end in the axis direction,
a first electrode portion to which a voltage is applied such that the piezoelectric scanner is displaced in the axis direction, and
a second electrode portion to which a voltage is applied such that the piezoelectric scanner is displaced in a direction orthogonal to the axis direction; and

a first elastic body disposed between the protruding portion and the outside surface of the circumferential wall portion,
the piezoelectric scanner is disposed inside the case to be coaxial with the case such that the first end is fixed to the bottom portion, and
the sample holder is provided at the second end of the piezoelectric scanner.

2. The scanning probe microscope according to claim 1 , wherein the first elastic body is an O ring.

3. The scanning probe microscope according to claim 2 , wherein
the first electrode portion is located closer to the second end in the axis direction than the second electrode portion is, and
the first elastic body is in contact with the end portion of the outside surface of the circumferential wall portion.

4. The scanning probe microscope according to claim 1 , wherein
the first electrode portion is located closer to the second end in the axis direction than the second electrode portion is, and
the first elastic body is in contact with the end portion of the outside surface of the circumferential wall portion.

5. The scanning probe microscope according to claim 4 , further comprising:
a second elastic body disposed between the inside surface of the circumferential wall portion and the piezoelectric scanner,
wherein the second elastic body is in contact with the end portion of the inside surface of the circumferential wall portion.

6. The scanning probe microscope according to claim 5 , wherein the second elastic body is an O ring.

7. The scanning probe microscope according to claim 1 , further comprising:
a second elastic body disposed between the inside surface of the circumferential wall portion and the piezoelectric scanner.

8. The scanning probe microscope according to claim 7 , wherein the second elastic body is an O ring.

Assignees

• Shimadzu Corp

Inventors

• Hirade Masato

Classifications

• G01Q20/04 Primary

  Self-detecting probes, i.e. wherein the probe itself generates a signal representative of its position, e.g. piezoelectric gauge · CPC title

• G01Q10/04 Primary

  Fine scanning or positioning · CPC title

• G01Q60/02

  Multiple-type SPM, i.e. involving more than one SPM techniques · CPC title

• G01Q60/04 Primary

  STM [Scanning Tunnelling Microscopy] combined with AFM [Atomic Force Microscopy] · CPC title

• G01Q60/00

  Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof · CPC title