Scanning probe microscope

Patent metadata

Field	Value
Publication number	US-9689892-B2
Application number	US-201415127463-A
Country	US
Kind code	B2
Filing date	Mar 20, 2014
Priority date	Mar 20, 2014
Publication date	Jun 27, 2017
Grant date	Jun 27, 2017

Abstract

A scanning probe microscope includes sample moving means 111 and 133 including a cylindrical piezoelectric scanner and configured to move a sample 110 arranged on an upper end surface of the piezoelectric scanner by bending the piezoelectric scanner 111 by an applied voltage, scanning control means configured to control a relative position of the probe 114 and the sample 110 by controlling the applied voltage, sample thickness acquisition means 138 configured to acquire a thickness value of the sample 110 , and correlative information determination means 139 configured to determine correlative information showing a corresponding relationship between the applied voltage to the piezoelectric scanner 111 and a displacement amount of a surface of the sample 110 in a horizontal direction using the thickness value, wherein the scanning control means 132 performs controlling of the relative position using the correlative information. With this, it becomes possible to perform accurate sample scanning considering effects on the movement amount of the sample 110 in the XY direction due to the thickness.

First claim

The invention claimed is:

1. A scanning probe microscope for detecting a three-dimensional shape or a physical quantity of a sample surface by scanning the sample surface by a minute probe, comprising:
a) sample moving means including a cylindrical piezoelectric scanner and configured to move a sample arranged on an upper end surface of the piezoelectric scanner by bending the piezoelectric scanner by an applied voltage;
b) scanning control means configured to control a relative position of the probe and the sample by controlling the applied voltage;
c) sample thickness acquisition means configured to acquire a thickness value of the sample; and
d) correlative information determination means configured to determine correlative information showing a corresponding relationship between the applied voltage to the piezoelectric scanner and a displacement amount of a surface of the sample in a horizontal direction using the thickness value,
wherein the scanning control means performs controlling of the relative position using the correlative information.

2. The scanning probe microscope according to claim 1 , further comprising:
e) sample thickness measurement means configured to measure a thickness of the sample,
wherein the sample thickness acquisition means acquires a thickness value of the sample from the sample thickness measurement means.

3. The scanning probe microscope according to claim 2 ,
wherein the sample thickness measurement means is a mechanism configured to drive the piezoelectric scanner and/or a probe in a direction that the sample and the probe move close to each other or move away from each other, and configured to obtain a thickness value of the sample from a driven amount of the piezoelectric scanner and/or the probe from a state in which the piezoelectric scanner and the probe are away from by a predetermined distance to a state in which the surface of the sample arranged on the upper end surface of the piezoelectric scanner and the probe are moved closer by a predetermined distance.

4. The scanning probe microscope according to claim 1 , further comprising:
f) user input receiving means configured to receive an input of a thickness value of the sample by a user,
wherein the sample thickness acquisition means acquires the thickness value of the sample from the user input receiving means.

5. The scanning probe microscope according to claim 1 , further comprising:
g) measurement value input receiving means configured to receive an input of a measurement value of the thickness value of the sample from an external measurement device,
wherein the sample thickness acquisition means acquires the thickness value of the sample from the measurement value input receiving means.

6. A scanning probe microscope for detecting a three-dimensional shape or a physical quantity of a sample surface by scanning the sample surface by a minute probe, comprising:
a) sample moving means including a cylindrical piezoelectric scanner and configured to move a sample arranged on an upper end surface of the piezoelectric scanner by bending the piezoelectric scanner by an applied voltage;
b) three-dimensional distribution data generation means configured to create three-dimensional distribution data showing a certain physical quantity at each position on the sample surface collected by moving the sample with respect to the probe by the sample moving means;
c) sample thickness acquisition means configured to acquire a thickness value of the sample; and
d) correlative information determination means configured to determine correlative information showing a corresponding relationship between the applied voltage to the piezoelectric scanner and a displacement amount of a surface of the sample in a horizontal direction using the thickness value,
wherein the three-dimensional distribution data generation means creates the three-dimensional distribution data using the correlative information.

7. The scanning probe microscope according to claim 6 , further comprising:
e) sample thickness measurement means configured to measure a thickness of the sample,
wherein the sample thickness acquisition means acquires a thickness value of the sample from the sample thickness measurement means.

8. The scanning probe microscope according to claim 7 ,
wherein the sample thickness measurement means is a mechanism configured to drive the piezoelectric scanner and/or a probe in a direction that the sample and the probe move close to each other or move away from each other, and configured to obtain a thickness value of the sample from a driven amount of the piezoelectric scanner and/or the probe from a state in which the piezoelectric scanner and the probe are away from by a predetermined distance to a state in which the surface of the sample arranged on the upper end surface of the piezoelectric scanner and the probe are moved closer by a predetermined distance.

9. The scanning probe microscope according to claim 6 , further comprising:
f) user input receiving means configured to receive an input of a thickness value of the sample by a user,
wherein the sample thickness acquisition means acquires the thickness value of the sample from the user input receiving means.

10. The scanning probe microscope according to claim 6 , further comprising:
g) measurement value input receiving means configured to receive an input of a measurement value of the thickness value of the sample from an external measurement device,
wherein the sample thickness acquisition means acquires the thickness value of the sample from the measurement value input receiving means.

Assignees

• Shimadzu Corp

Inventors

• Hirade Masato

Classifications

• G01Q10/065 Primary

  Feedback mechanisms, i.e. wherein the signal for driving the probe is modified by a signal coming from the probe itself · CPC title