Dressing apparatus and dressing method for substrate rear surface polishing member

Patent metadata

Field	Value
Publication number	US-11059145-B2
Application number	US-201816059344-A
Country	US
Kind code	B2
Filing date	Aug 9, 2018
Priority date	Aug 10, 2017
Publication date	Jul 13, 2021
Grant date	Jul 13, 2021

Abstract

A dressing apparatus 200 includes a bus member 203 which is equipped with a ceiling plate 201 and a circular or polygonal cylindrical skirt portion 202 provided at a bottom surface of the ceiling plate 201 and which is configured to accommodate a polishing pad 131 from thereabove. The bus member 203 includes a dual fluid nozzle 204 configured to jet a cleaning liquid and a gas onto a polishing surface of the polishing pad 131; a dress board 205 configured to come into contact with the polishing surface of the polishing pad 131; and a rinse nozzle 206 configured to supply a rinse liquid onto a contact surface between the polishing surface of the polishing pad 131 and the dress board 205. A cleaning liquid, a fragment of a grindstone or a sludge is suppressed from being scattered around by the skirt portion 202.

First claim

We claim:

1. A dressing apparatus of a substrate rear surface polishing member configured to perform dressing of the polishing member configured to polish a rear surface of a substrate, the dressing apparatus of the substrate rear surface polishing member comprising:
a bus member which is equipped with a ceiling plate and a circular or polygonal cylindrical skirt portion provided at a bottom surface of the ceiling plate and which is configured to accommodate the polishing member from thereabove;
a nozzle provided at the bus member and configured to jet a cleaning liquid and a gas onto a polishing surface of the polishing member accommodated in the bus member; and
a dressing member provided at the bus member and configured to come into contact with the polishing surface of the polishing member accommodated in the bus member,
wherein the dressing apparatus is provided at a position where the dressing apparatus does not overlap with the substrate as a polishing target, when viewed from the top.

2. The dressing apparatus of the substrate rear surface polishing member of claim 1 , further comprising:
a nozzle configured to supply a rinse liquid onto the polishing surface of the polishing member.

3. The dressing apparatus of the substrate rear surface polishing member of claim 1 ,
wherein a lower end of the skirt portion is located under a surface of the substrate as the polishing target.

4. The dressing apparatus of the substrate rear surface polishing member of claim 1 ,
wherein the dressing member has a planar shape at a side of the polishing surface of the polishing member, and has a shape covering at least a half of the polishing member.

5. The dressing apparatus of the substrate rear surface polishing member of claim 1 ,
wherein the dressing member is configured to be rotated.

6. The dressing apparatus of the substrate rear surface polishing member of claim 1 ,
wherein the dressing member has a columnar shape and is disposed such that a circumferential surface of the dressing member is configured to be contacted with the polishing surface of the polishing member, and the dressing member is configured to be rotated following up a rotation of the polishing member.

7. The dressing apparatus of the substrate rear surface polishing member of claim 6 ,
wherein the dressing member has a taper shape having different diameters at one end and the other end thereof.

8. The dressing apparatus of the substrate rear surface polishing member of claim 6 ,
wherein the dressing member is configured to be rocked centering on a preset supporting point other than an end portion thereof in a lengthwise direction.

9. The dressing apparatus of the substrate rear surface polishing member of claim 1 ,
wherein the dressing member is provided at the bus member with an elastic member therebetween.

10. The dressing apparatus of the substrate rear surface polishing member of claim 1 ,
wherein the dressing member is provided at the bus member with a universal joint therebetween.

11. The dressing apparatus of the substrate rear surface polishing member of claim 1 ,
wherein the cleaning liquid is heated.

12. The dressing apparatus of the substrate rear surface polishing member of claim 1 , further comprising:
an imaging device configured to check the polishing surface of the polishing member.

13. A dressing method of a substrate rear surface polishing member for performing cleaning and dressing of the polishing member by using a dressing apparatus as claimed in claim 12 ,
wherein the cleaning and the dressing are performed based on a surface state of the polishing surface of the polishing member obtained by the imaging device.

14. The dressing apparatus of the substrate rear surface polishing member of claim 1 , further comprising:
a laser displacement meter configured to check a surface state of the polishing surface of the polishing member.

15. A dressing method of a substrate rear surface polishing member for performing dressing of the polishing member configured to polish a rear surface of a substrate, the dressing method of the substrate rear surface polishing member comprising:
by using a bus member which is equipped with a ceiling plate and a circular or polygonal cylindrical skirt portion provided at a bottom surface of the ceiling plate and which is configured to accommodate the polishing member from thereabove,
at a position where the polishing member does not overlap with a substrate as a polishing target when viewed from the top,
performing cleaning by supplying a cleaning liquid onto a polishing surface of the polishing member while rotating the polishing member within the bus member, and performing dressing by bringing a dressing member provided at the bus member into contact with the polishing surface of the polishing member while rotating the polishing member.

16. A dressing method of a substrate rear surface polishing member for performing dressing of the polishing member configured to polish a rear surface of a substrate, the dressing method of the substrate rear surface polishing member comprising:
by using a bus member which is equipped with a ceiling plate and a circular or polygonal cylindrical skirt portion provided at a bottom surface of the ceiling plate and which is configured to accommodate the polishing member from thereabove,
at a position where the polishing member does not overlap with a substrate as a polishing target when viewed from the top,
performing cleaning by supplying a cleaning liquid onto a polishing surface of the polishing member within the bus member, and performing dressing by bringing a dressing member provided at the bus member into contact with the polishing surface of the polishing member while allowing the polishing member to revolve centering on a position other than a center of the polishing member.

17. The dressing method of the substrate rear surface polishing member of claim 15 ,
wherein a pressing pressure of the polishing member against the rear surface of the substrate while the rear surface of the substrate is polished is adjusted within the bus member.

18. The dressing method of the substrate rear surface polishing member of claim 16 ,
wherein a pressing pressure of the polishing member against the rear surface of the substrate while the rear surface of the substrate is polished is adjusted within the bus member.

Assignees

• Tokyo Electron Ltd

Inventors

• Okamoto Yoshiki
• Takiguchi Yasushi
• Kubo Akihiro
• Hosaka Hayato
• Ozasa Ryuto

Classifications

• B24B53/017 Primary

  Devices or means for dressing, cleaning or otherwise conditioning lapping tools · CPC title

• B24B49/12

  involving optical means · CPC title

• B24B53/007

  Cleaning of grinding wheels · CPC title

• B24B53/14

  Dressing tools equipped with rotary rollers or cutters; Holders therefor · CPC title

• B24B53/095

  Cooling or lubricating during dressing operation (cooling the grinding surfaces B24B55/02) · CPC title