Method and apparatus for determining process rate

Patent metadata

Field	Value
Publication number	US-11056322-B2
Application number	US-201715667978-A
Country	US
Kind code	B2
Filing date	Aug 3, 2017
Priority date	Sep 23, 2015
Publication date	Jul 6, 2021
Grant date	Jul 6, 2021

Abstract

A method for dry processing a substrate in a processing chamber is provided. The substrate is placed in the processing chamber. The substrate is dry processed, wherein the dry processing creates at least one gas byproduct. A concentration of the at least one gas byproduct is measured. The concentration of the at least one gas byproduct is used to determine processing rate of the substrate.

First claim

What is claimed is:

1. An apparatus for processing a substrate, comprising:
a processing chamber;
a substrate support for supporting the substrate within the processing chamber;
a gas source;
a gas inlet connected between the gas source and the processing chamber for providing gas from the gas source into the processing chamber;
a RF power source for providing RF power into the processing chamber;
an exhaust pressure system, comprising;
an exhaust pump, with an inlet connected to the processing chamber and an outlet for directing exhaust away from the processing chamber and the exhaust pump, wherein the outlet is an exhaust pipe extending from the exhaust pump, wherein the exhaust pipe has an interior;
a multipass gas cell with an interior, wherein the interior of the multipass gas cell comprises at least a portion of the interior of the exhaust pipe;
an IR laser positioned to direct an IR beam into the multipass gas cell; and
a sensor for detecting the IR beam after the IR beam has made multiple passes within the multipass gas cell and providing sensor output; and

a controller connected to receive the sensor output from the sensor and controllably connected to the gas source and RF power source, wherein the controller comprises:
at least one processor; and
non-transitory computer readable media, comprising:
computer readable code for measuring a concentration of at least one gas byproduct based on the sensor output from the sensor with respect to time, wherein the concentration of the at least one gas byproduct with respect to time has a plurality of peaks and valleys; and
computer readable code for using times between peaks and valleys to determine transitions between each of a plurality of bilayers on the substrate.

2. The apparatus, as recited in claim 1 , wherein the non-transitory computer readable media, further comprises:
computer readable code for determining a process endpoint based on the measured concentration of the at least one gas byproduct; and
computer readable code for stopping a process based on the determined process endpoint.

3. The apparatus, as recited in claim 2 , wherein the computer readable code for measuring the concentration of at least one gas byproduct comprises computer readable code for measuring at least one gas byproduct that has a silicon containing component.

4. The apparatus, as recited in claim 2 , wherein the computer readable media, further comprises:
computer readable code for creating one or more concentration models related to processing rate and processing uniformity; and
computer readable code for fitting the measured concentration of the at least one gas byproduct to at least one of the one or more concentration models.

5. The apparatus as recited in claim 4 , wherein the fitting the measured concentration of the at least one gas byproduct to at least one of the one or more concentration models fits the measured concentration of the at least one gas byproduct to the at least one of the one or more concentration models over time.

6. The apparatus, as recited in claim 1 , wherein the non-transitory computer readable media, further comprises:
computer readable code for dry processing a substrate, wherein the dry processing creates at least one gas byproduct;
computer readable code for measuring a concentration of the at least one gas byproduct using laser-IR absorption with the multi-pass gas cell when the at least one gas byproduct is in the exhaust pipe of the exhaust pump; and
computer readable code for determining an aspect ratio dependent etch rate based on the measured concentration of the at least one gas byproduct.

7. The apparatus, as recited in claim 6 , wherein the computer readable code for measuring the concentration of the at least one gas byproduct comprises computer readable code for measuring at least one gas byproduct that has a silicon containing component.

8. The apparatus, as recited in claim 1 , wherein the computer readable code for using times between peaks and valleys, comprises computer readable code for using times between peaks and valleys to determine at least one of etch rate, etch selectivity, and etch uniformity.

9. The apparatus, as recited in claim 8 , further comprising computer readable code for changing a chamber parameter to correct at least one of etch rate, etch selectivity, and etch uniformity.

Assignees

• Lam Res Corp

Inventors

• Kabouzi Yassine
• Albarede Luc
• Bailey Iii Andrew D
• Luque Jorge
• Lee Seonkyung
• Lill Thorsten

Classifications

• H10P95/066

  the removal being a selective chemical etching step, e.g. selective dry etching through a mask · CPC title

• H10P74/238

  comprising acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection or in-situ thickness measurement · CPC title

• H10P50/693

  characterised by their size, orientation, disposition, behaviour or shape, in horizontal or vertical plane · CPC title

• H10P50/692

  characterised by their composition, e.g. multilayer masks or materials · CPC title

• H10P50/283

  by chemical means · CPC title