Film forming method for metal film and film forming apparatus for metal film

Patent metadata

Field	Value
Publication number	US-11035049-B2
Application number	US-201816135586-A
Country	US
Kind code	B2
Filing date	Sep 19, 2018
Priority date	Sep 28, 2017
Publication date	Jun 15, 2021
Grant date	Jun 15, 2021

Abstract

A solid electrolyte membrane is disposed between an anode and a substrate, and voltage is applied between the anode and the substrate while the solid electrolyte membrane is pressed onto the substrate so as to form a metal film on the substrate. In this film forming method, there is used the solid electrolyte membrane that includes: a first portion made of an ion permeable material; and a second portion made of a material having an electric insulating property and having a low permeability of metallic ions, the second portion being embedded in the first portion so as to be exposed from a surface of the solid electrolyte membrane, the surface of the solid electrolyte membrane facing the substrate.

First claim

What is claimed is:

1. A film forming apparatus for a metal film, the apparatus comprising:
an anode;
a solid electrolyte membrane disposed between the anode and a substrate;
a solution storage part storing a metallic solution containing metallic ions such that the metallic solution comes in contact with the solid electrolyte membrane from an anode side of the solid electrolyte membrane;
a pressing part pressing the solid electrolyte membrane to the substrate; and
an electric power source applying voltage between the anode and the substrate,
wherein
the film forming apparatus forms the metal film deriving from the metallic ions on a surface of the substrate by applying voltage by the electric power source,
wherein
the solid electrolyte membrane includes:
a first portion made of an ion permeable material that the metallic ions permeate; and
a second portion made of a material having an electric insulating property and having a lower permeability of the metallic ions than a permeability of the ion permeable material,
the second portion being entirely embedded in the first portion except for at least a portion of the second portion being exposed from a surface of the solid electrolyte membrane, the portion of the second portion being closest to the substrate than other portions of the second portion, the surface of the solid electrolyte membrane facing the substrate, and
the second portion is formed such that when the voltage is applied, the metallic ions passing through the first portion pass around the second portion, and a metal of the metallic ions is precipitated on the surface of the substrate, the surface of the substrate facing the second portion.

2. The film forming apparatus for the metal film according to claim 1 , wherein
the surface of the solid electrolyte membrane from which the second portion is exposed includes portions swelling toward a side where the substrate is disposed.

3. The film forming apparatus for the metal film according to claim 1 , wherein
the second portion includes multiple fibers.

4. The film forming apparatus for the metal film according to claim 3 , wherein
the multiple fibers extend along one direction with intervals between the fibers.

5. The film forming apparatus for the metal film according to claim 1 , wherein
the solid electrolyte membrane is set to be a first solid electrolyte membrane, and
a second solid electrolyte membrane made of an ion permeable material that the metallic ions permeate is stacked on the first solid electrolyte membrane on a side where the second solid electrolyte membrane comes in contact with the metallic solution in the solution storage part.

Assignees

• Toyota Motor Co Ltd

Inventors

• Iisaka Hirofumi

Classifications

• B01D69/108

  Inorganic support material · CPC title

• C25D17/16

  Apparatus for electrolytic coating of small objects in bulk · CPC title

• C25D17/12

  Shape or form (C25D17/14 takes precedence) · CPC title

• C25D17/008

  Current shielding devices · CPC title

• C25D17/005

  Contacting devices · CPC title